http://iet.metastore.ingenta.com
1887

Materials for MEMS and NEMS device technology

More general concepts than this:

1-20 of 29 results
1 2 | Next >

Filter by subject:

  • Electrical and electronic engineering [29]
  • Components, electron devices and materials [29]
  • Semiconductor materials and technology [29]
  • MEMS and NEMS device technology [29]
  • Materials for MEMS and NEMS device technology [29]
  • Physics [21]
  • Fabrication of MEMS and NEMS devices [18]
  • General [14]
  • Specific instrumentation and techniques of general use in physics [14]
  • Mechanical instruments, equipment, and techniques [14]

Filter by content type:

Filter by publication date:

Filter by author:

Filter by access type:

1 2 | Next >
Items per page 20 | 50 | 100
This is a required field
Please enter a valid email address