Radiation effects (semiconductor technology)
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In this work, performance degradation of 65 nm N-channel metal-oxide-semiconductor field effect transistors (NMOSFETs) with enclosed gate and two-edged gate layouts under hot carrier stress and constant voltage stress is investigated. Compared with the cold carrier, the hot carrier effect (HCE) causes more serious degradation in threshold voltage and transconductance. It is shown that cold carrier contribution is reversible, while HCE damage is permanent, it cannot be reversed by application of the annealing bias. Meanwhile, an enclosed gate NMOSFET is proved to have higher resistance to HCE than two-edged gate NMOSFET fabricated in the same 65 nm complementary metal-oxide-semiconductor (CMOS) technology according to the results of experiments. That is, the enclosed gate NMOSFET not only provides total-dose radiation tolerance but also improves the hot carrier reliability of advanced CMOS circuits. The contributions of the two types of carriers to the degradation of transistor performance are analysed. The physical mechanism of HCE reliability of different geometry MOSFETs is studied.
A novel fault tolerant delay cell for ring oscillator (RO) is proposed. As RO is one of the crucial blocks in phased locked loop, delayed locked loo and clock data recovery, it should be tolerated against single event transient (SET) and stuck at faults for harsh environment. Their proposed hybrid fault tolerant topology is combination of triple and quad transistors redundancy, which is applied to the delay cell structure based on the sensitivity role of each transistor. The simulation results with Cadence software show that the proposed fault-tolerant delay cell dissipates 34.34 µW power, while it occupies 127.2 µm2 chip area. The proposed topology not only has lower power dissipation in comparison with existing fault tolerant delay cells but also is more reliable against stuck at single and multiple faults and also SETs. By using the proposed reliable delay cell in the RO, the achieved power dissipation and phase noise are about 249 µW and −96 dBc/Hz, respectively, while higher reliability is achieved in comparison with non-redundant RO s.
Radiations in harsh environments can significantly affects the performance of the silicon devices. Therefore, these effects should be taken into account in the system design phase. In this paper is shown the design of two high-speed drivers for optical Mach Zehnder modulators (MZM). The two drivers are designed to address the effects of low and high Total Ionization Dose (TID) levels, in the standard 65 nm CMOS technology. The target bit rate of the two drivers is 10 Gbps. The heavy effects that TID has on p-mosfets make the CMOS logic usable only for low radiation levels. Therefore, for TID levels higher than 10 Mrad the Current Mode Logic (CML) is more suitable. The use of this approach for the High TID driver allows reducing the effects of silicon damages. On the other hand, the CMOS driver allow halves the consumption power using only the 5% of layout area compared to the CML driver.
Field programmable gate array (FPGA) attributes of logic configurability, bitstream storage, and dynamic signal routing can be realised by leveraging the complementary benefits of emerging devices with complementary metal oxide semiconductor (CMOS)-based devices. A novel carbon/magnet lookup table (CM-LUT) is developed and evaluated by trading off a range of mixed heterogeneous technologies to balance energy, delay, and reliability attributes. Herein, magnetic spintronic devices are employed in the configuration memory to contribute non-volatility and high scalability. Meanwhile, carbon nanotube field-effect transistors (CNFETs) provide desirable conductivity, low delay, and low power consumption. The proposed CM-LUT offers ultra-low power and high-speed operation while maintaining high endurance re-programmability with increased radiation-induced soft-error immunity. The proposed four-input one-output CM-LUT utilises 41 CNFETs and 20 magnetic tunnel junctions for read operations and 35 CNFET to perform write operations. Results indicate that CM-LUT achieves an average four-fold energy reduction, eight-fold faster circuit operation and 9.3% reconfiguration power delay product improvement in comparison with spin-based look-up tables. Finally, additional hybrid technology designs are considered to balance performance with the demands of energy consumption for near-threshold operation.
Operation of the 1-transistor, 1-capacitor dynamic random access memory cell that allows for two-bit operation, double the typical storage capacity, is explored. By using a metal-ferroelectric-semiconductor field-effect transistor, a second bit is captured in the ferroelectric layer polarisation resulting from negative and positive polarisation states. As a result, new modes of operation are created giving non-volatile, long-term storage as well as decreased power consumption and radiation hardening. A typical write and read operating cycle is outlined in-depth and used to verify operation indicating four distinct states representing the two bits. The resulting empirical data gives a comprehensive presentation of the read cycle of the memory cell. Methods for determining the polarisation state of the transistor are also explored and used to determine the average value for measured channel resistance using three types of transistors, each having different channel width and length.
Power metal-oxide semiconductor field-effect transistors (MOSFETs) are increasingly used in the space probes where the environment is composed of various kinds of particles. Thus, it is essential to study the influence of the natural radiation environment on the electrical behaviour of MOSFETs in space. This study presents two-dimensional numerical simulation results, which investigates the sensitive volume, triggering criteria and characteristics of single-event burnout (SEB) and single-event gate rupture (SEGR) for the split-gate enhanced power U-shape MOSFET (SGE-UMOS). In addition, the comparison of the standard Trench-UMOS and SGE-UMOS for both SEB and SEGR simulation results is investigated. The SGE-UMOS shows an improved SEB performance than the standard Trench-UMOS with a larger safe operating area. The SGE-UMOS can also contribute to protect against SEGR compared with standard Trench-UMOS.
In this study, the authors evaluate different schemes of address decoders based on bulk, single gate (SG) silicon-on-insulator (SOI) and double gate (DG) FinFET technology. Schemes differ in terms of back gate connections, and swing on the enable and address lines. The analysis for delay, power dissipation and critical charge has been carried out. Radiation induced single event transients and multiple bit upsets in address decoder have been studied. For radiation hardened applications, tied gate configuration has been found to be good choice over bulk, SG-SOI and independent gate configurations. The effect of process parameter variations on different schemes has been studied. HSPICE simulations have been performed with 45 nm bulk, SG-SOI and DG-FinFET predictive technology models.
The authors investigated the performance of ZnO nanowire-based metal–semiconductor field effect transistors (MESFETs) by focusing electron beam on the Schottky gate. The MESFET was fabricated by employing Tantalum as drain and source and by using Schottky barrier at tungsten–ZnO interface as the gate. As to IDS against VGS curves, once the gate was illuminated with electron beam radiation, crests with a redshift as VDS increased and a p-type semiconductor transistor behaviour were observed. At the critical points, the value of VDS−VGS revealed a linear behaviour with the increasing VDS. The authors attributed these results to the gain enhanced by electron beam radiation and carrier-trapping process, while the shift may be associated with the image-force lowing effect.
An original method is presented to improve DC electrical performance of AlGaAs/InGaAs PHEMTs by using a low neutron radiation dose. An increase of the drain–source saturation current, a decrease of the knee voltage and a reduction of the leakage current of the Schottky contact are observed without degrading the current-gain cutoff frequency when the devices are irradiated with a neutron radiation dose of 1.2×1010 neutrons/cm2.
The effect of excess donor doping introduced by implantation with 700 kV and 1.8 MeV protons and subsequent annealing up to 550°C in silicon substrates with different oxygen content was investigated. Three different types of silicon material were chosen for this purpose: Czochralski, oxygen-lean and oxygen rich float-zone silicon. Deep and shallow levels resulted from implantation and subsequent annealing were studied by deep level transient spectroscopy and C-Vprofiling. Results show that hydrogen donors appear at the proton end-of-range after implantation in all materials. Their introduction rate depends linearly on proton fluence and is substantially higher in Czochralski and oxygen-rich float zone materials due to higher oxygen concentration. It is shown that during post-implantation annealing, the excess donor doping changes in several phases. Hydrogen donors anneal out above 250°C and then, hydrogen-related thermal donors and thermal donors are generated. When annealing temperature exceeds 400°C, the hydrogen thermal donors are still localized at the proton end-of-range in oxygen-lean float zone silicon while in Czochralski silicon and oxygen-rich float zone material, thermal donors arise in the whole bulk and radiation enhanced thermal donors decorate the profile of radiation damage. The level of local doping by hydrogen thermal donors is proportional to implantation fluence and layers are stable up to 550°C for implantation fluences above 1013 cm-2 . The detrimental effect of hydrogen donors and thermally activated donors on blocking characteristics of power p+nn+ diodes is also discussed.
The development of appropriate edge termination structures is a challenging task for all kinds of different vertical power semiconductors such as high-voltage diodes, IGBTs or especially compensation devices. Ion-beam induced charge microscopy and electron-beam induced charge microscopy are reliable tools for imaging of space-charge regions and detection of electric-field enhancements inside of power devices. The usefulness of these methods is shown for the example of high-voltage power diodes and low-voltage power MOSFET. Advantages and limitations of the measurement techniques are discussed.
The influence of annealing temperature (700, 800°C) and implantation dose (1 × 1013 - 1 × 1014 cm-2 ) of 9.5 MeV Pd on the subsequent Radiation Enhanced Diffusion (RED) is studied in the range of optimal diffusion temperatures (550, 600, 650°C)for the electrical parameters of a power P-I-N diode. Spreading resistance measurements have shown that the Pd dose of 1 × 1014 cm-2 is capable to compensate the anode doping profile in the N-base close to the anode junction similar to that of the RED from sputtered Pd. Contrary to the devices with sputtered Pd, the reproducibility of this process is lower and the radiation damage from the Pd implantation compensates the high doped P layer up to the Pd range (≈ 3.5 μm). The dependences of leakage, carrier lifetime, forward voltage drop and reverse recovery on the process parameters of the Pd layer are shown for 2.5 kV/100 A diode.
Enhanced formation of shallow donors (SDs) in hydrogen or helium-irradiated and subsequently annealed float‐zone n-type silicon is investigated. Ion energies, irradiation fluences and annealing temperatures were chosen in ranges typically used for local lifetime control in silicon power devices. Introduced radiation defects and SDs were investigated by deep-level transient spectroscopy and C–V profiling. Results show that radiation damage produced by helium ions remarkably enhances formation of thermal donors (TDs) when the annealing temperature exceeds 375°C, i.e. when the majority of vacancy-related recombination centres anneal out. Proton irradiation introduces hydrogen donors (HDs) which form a Gaussian peak at the proton end-of-range. Their concentration linearly increases with proton fluence and changes dramatically during post-irradiation annealing between 100 and 200°C since HD constituents are reacting with radiation damage. Their annealing in this temperature range is influenced by the electric field. If annealing temperature exceeds 400°C, HDs disappear and the excessive shallow doping is caused, as in the case of helium irradiation, by TDs enhanced by radiation damage. Shallow doping introduced by both hydrogen and helium can have a detrimental influence on blocking voltage of power diodes if high irradiation fluences or wrong annealing conditions are chosen.
A substantial reduction of the leakage current in 4H-SiC pin diodes is observed after <10 eV UV irradiation in air. The high energy UV is believed to remove carbon clusters from the SiC surface. Comparison of leakage current in 4H-SiC pin diodes after different surface treatments, including reactive ion etching, exposure to two different sources of UV light and different forms of chemical cleaning, is presented. Exposure to 4.9 eV UV light in nitrogen atmosphere enhances the leakage by one order of magnitude.
A nanoscale characterisation of the electrical conduction of irradiated thin SiO2 gate oxides of MOS devices has been performed with a conductive atomic force microscope. The electrical images reveal the existence of weak spots, which have been attributed to the electrical damage induced by irradiation. Although their I–V characteristics show a leaky behaviour, these locations have not experienced a hard breakdown event.
The back channel low-frequency noise of 1.2 μm×2.3 μm SOI nMOS transistors with a buried oxide thickness of 170 nm was measured as a function of frequency, back gate bias Vbg and temperature T. For a temperature range of 85≤T≤320 K, noise measurements were performed at frequencies of 0.3≤f≤1 kHz with top gate bias Vbg=0 V and Vbg−Vbg−th=4 V, where Vbg−th is the back gate threshold voltage. The temperature and frequency dependences of the 1/f noise of back channel SOI nMOS transistors show thermally activated charge exchange between the Si channel and defects in the buried oxide. Comparison is made with the Dutta and Horn model of 1/f noise. Devices on one particular wafer appear to show a mixture of 1/f noise and noise with a higher frequency exponent at low temperatures. Little change is observed in back gate noise with irradiation for the devices and irradiation conditions studied. This is probably due to large preirradiation defect densities in the buried oxides.
The enhancement of gate leakage current after exposure to ionising radiation is generally believed to be the major challenge for devices and circuits operating in harsh radiation environments. How ultra-thin gate oxides subjected to heavy ion irradiation react to a subsequent electrical stress performed at low voltages has been investigated. Even in devices exhibiting small (or even negligible) enhancement of the leakage current, the time-to-breakdown is substantially reduced in comparison with unirradiated samples due to the onset of a soft or hard breakdown, in contrast with previous results found on thicker oxides.
The effects of pre-irradiation gate bias stress on the radiation response of power VDMOSFETs are presented, clearly demonstrating the inapplicability of gate bias stressing as a technique for radiation hardening of power MOSFETs.
The charge-to-breakdown of 3.3 nm oxynitride films shows significant degradation after irradiation with 342 MeV Au ions. In contrast, 5.4 nm Al2O3 films exhibit much less degradation for similar heavy-ion stress.
The authors demonstrate high-performance AlGaN/GaN heterostructure field-effect transistors (HFETs) with mesa isolation achieved by a recently developed UV-assisted, batch processing compatible, wet etching process. HFETs with a 0.2 µm gate feature peak cutoff frequencies of fT = 43 GHz and fMAX = 98 GHz for a piezoelectric HFET grown on a sapphire substrate by molecular beam epitaxy. The transistors feature low gate diode leakage currents and display no sensitivity to visible light.
The effect of radiation-induced changes on the characteristics of an n-channel MOSFET has been investigated theoretically. A one-dimensional semi-numerical model of the device has been developed which can estimate fairly accurate characteristics of the device under unirradiated and irradiated conditions. The effect of ionising radiation on the channel voltage and electric field profile in the channel has been estimated numerically for the first time. The present model enables one to determine the ID/VD and transfer characteristics of the device by considering the field dependent mobility of the surface channel in the irradiated condition. The model presented here can be used as a basic tool for analysing MOS transistors exposed to a nuclear environment.
The triggering mechanism for cosmic ray neutron-induced single-event burnout (SEB) in silicon insulated-gate bipolar transistors (IGBTs) and diodes was investigated by white neutron-irradiation experiments and transient device simulations. Electron-hole pairs are generated along the tracks of recoil ions produced by nuclear spallation reactions between incident neutrons and the constituent nuclei of the device. In the vicinity of the n−/n+ interface, the resulting dynamic current causes an increase in the electron density, and the space charge effect of the carriers leads to an increase in the peak electric field. In an IGBT, the onset of impact ionisation at this interface can cause a parasitic transistor to switch on. In the case of diodes, the electric field distribution leads to diode secondary breakdown. Therefore, impact ionisation at the n−/n+ interface is essential for triggering SEB. In this study, analytical equations are derived for the local rise in temperature during SEB. The local temperature rise is proportional to the energy, defined in terms of the product of the applied voltage and the total avalanche charge. The diameter of the damage region estimated using these equations is similar to the size of the observed annular voids.
A comprehensive study of displacement damage and total ionisation dose effects on 4H-silicon carbide power devices is presented. Power diodes and transistors produced by different manufacturers were irradiated by high-energy particles (protons, alphas, electrons and neutrons). The influence of radiation on device characteristics was determined, the introduced radiation defects were identified, and the main degradation mechanisms were established. Results show that radiation leads to the creation of acceptor traps in the lightly doped drift regions of irradiated devices. Devices then degrade due to the removal of the carriers and the decrease in carrier mobility and lifetime. For unipolar devices, the gradual increase of the forward voltage is typical while the blocking characteristics remain nearly unchanged. In bipolar devices, high introduction rates of defects cause a sharp reduction of carrier lifetime. This results in shorter carrier diffusion lengths and subsequent loss of conductivity modulation leading to a sharp increase of the forward voltage drop. The irradiation also shifts the threshold voltage of power switches. That is critical, namely for metal–oxide–semiconductor field-effect transistors. According to the authors’ study, the junction barrier Schottky diode and junction field-effect transistor (JFET) can be considered the most radiation-resistant SiC power devices.