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In this chapter, we give an overview of the basic physics and experimental method behind the conventional ion-beam modification of semiconductors. In particular, we describe the basic understanding of the keV ion implantation process used for doping Si and the fascinating amount of materials physics involved in the path from the initial implantation to the dopant activation. We also describe two recent developments related to the physics of implantation: the mechanisms of surface ripple formation and time-resolved experiments used to shed new light on defect migration and interaction processes.
This chapter deals with the use of ion beam analysis (IBA) techniques, in particular in channeling geometry, to study defects in semiconductors. After a tutorial (Section 11.1) introducing the basic principles of IBA and channeling techniques, selected examples of their use to characterize defects (e.g., lattice location of dopants and implantation damage) are described in Section 11.2. Finally, Section 11.3 consists of a brief outlook into future developments and applications.
Characterisation and Control of Defects in Semiconductors Understanding the formation and introduction mechanisms of defects in semiconductors is essential to understanding their properties. Although many defect-related problems have been identified and solved over the past 60 years of semiconductor research, the quest for faster, cheaper, lower power, and new kinds of electronics generates an ongoing need for new materials and properties, and so creates new defect-related challenges. This book provides an up-to-date review of the experimental and theoretical methods used for studying defects in semiconductors, focussing on the most recent developments in the methods. These developments largely stem from the requirements of new materials - such as nitrides, the plethora of oxide semiconductors, and 2-D semiconductors - whose physical characteristics and manufacturing challenges are much more complex than in conventional Si/Ge or GaAs. Each chapter addresses both the identification and quantification of the defects and their characteristics, and goes on to suggest routes for controlling the defects and hence the semiconductor properties. The book provides valuable information and solutions for scientists and engineers working with semiconductors and their applications in electronics.
The impact of substrate doping on the short-channel effects (SCEs) of bulk-planar junctionless transistor (BPJLT) has been studied. It has been found that increasing substrate doping in bulk region reduces off-state leakage current (I OFF) and the sub-threshold slope (SS) of the device. To further reduce the SCEs of BPJLT heavily doped δ-layer of thickness 10 nm has been added below the channel. Despite the presence of δ-layer in BPJLT reduces SCEs, the SCE, mainly SS, is still limited by the fundamental limit of 60 mV/decade. Therefore, to reduce SS below 60 mV/decade, negative capacitance (NC) δ-BPJLT has been proposed by adding the layer of ferroelectric material at gate stack. It has been found that in comparison with conventional BPJLT and δ-BPJLT, the insertion of ferroelectric layer in NC-δ-BPJLT not only reduces the I OFF and the SS but also improves I ON/I OFF ratio of the device. Thus, embedding heavily doped δ-layer in the bulk region and the ferroelectric layer at the gate stack of BPJLT makes it a promising device for low-power applications.
Titanate nanotube thin (TNT) films were synthesised by alkaline hydrothermal method using titanium (Ti) plates as precursors. Copper–cobalt (Cu–Co)-codoped titanate/Ti dioxide (TiO2) nanocomposite thin films were prepared by doping Cu and Co to TNT films through ion exchange method and annealed at 500°C for 120 min. The as-prepared nanocomposite films were characterised by scanning electron microscopy, transmission electron microscopy, X-ray diffractometer, and ultraviolet–visible absorption spectra. The results show that anatase TiO2 particles were grown on the surface of titanate nanomaterial films. The composite materials mainly consisted of anatase TiO2 particles and titanate nanotubes/nanosheets. Cu–Co-codoped titanate/TiO2 nanocomposite thin films exhibited superior visible height adsorption property due to the reduced energy bandgap of composites introduced by additional Cu and Co 3d orbitals.
Hexagonal CdS and Fe-doped CdS nanorods were synthesised by a facile hydrothermal method and characterised by X-ray diffraction, energy dispersive X-ray spectroscopy, UV–vis absorption, photoluminescence, and X-ray photoelectron spectroscopy. The magnetic properties of undoped and Fe-doped CdS nanorods were investigated at room temperature. The experimental results demonstrate that the ferromagnetism of the Fe-doped CdS nanorods differs from that of the undoped CdS nanorods. The remanence magnetisation (M r) and the coercive field (H c) of the Fe-doped CdS nanorods were 4.9 × 10−3 emu/g and 270.6 Oe, respectively, while photoluminescence properties were not influenced by doping. First-principle calculations show that the ferromagnetism in Fe-doped CdS nanocrystal arose not only from the Fe dopants but also from the Cd vacancies, although the main contribution was due to the Fe dopants.
Pure and manganese (Mn)-doped zinc oxide (ZnO) (0, 1, 2 and 4 wt%) nanoparticles are synthesised by refluxing method. The as-synthesised nanoparticles are characterised by X-ray powder diffraction, Fourier transform infrared spectroscopy, transmission electron microscopy and energy-dispersive X-ray spectroscopy (EDS). The results show that pure and Mn-doped ZnO nanoparticles have a hexagonal wurtzite structure and the (101) diffraction peaks position of Mn-doped ZnO shift toward the smaller value of diffraction angle compared with pure ZnO powders, confirming that the Mn2+ were well incorporated into ZnO crystal lattice. Moreover, Mn doping also restrained the growth of particles and the size decreased from 14.9244 to 13.1196 nm with the increase in doping concentration from 0 to 4 wt%. The EDS analysis for 2 wt% Mn-doped ZnO confirms the presence of Mn in ZnO nanocrystal. The dielectric measurements show that Mn-doped ZnO ceramics exhibit higher dielectric constant, while dielectric constant and dielectric loss increased continuously with the temperature increased. In addition, 2 wt% Mn-doped ZnO ceramics showed the high dielectric constant (23 × 103) and low dielectric loss (0.95) at 125°C after sintering at 1000°C for 2 h.
A simple and new solid-state molten-salt method to synthesise silver (Ag)-doped titanium dioxide (TiO2) nanoparticles for solar light-induced photocatalytic applications is examined. Ag-doped TiO2 nanoparticles with varied Ag content ranging from 3 to 10% were synthesised by a single-step molten-salt synthesis method. The effect of Ag content on the antibacterial and photocatalytic activity of nanoparticles was tested. The prepared nanoparticles were studied by scanning electron microscopy (SEM), energy-dispersive X-ray (EDX) spectrometry, ultraviolet–visible (UV–vis) diffusive reflectance spectrometer (UV–vis DRS) and powder X-ray diffraction. The SEM image of nanoparticles clearly showed the presence of agglomerated spherical particles. The EDX analysis of the particles confirmed successful doping of particles in the presence of the Ag in the particles. The doping of Ag in TiO2 produced TiO2 pure anatase phase. According to UV–vis DRS results, increasing Ag-doped content in the Ag-doped TiO2 resulted in a higher visible absorption capability of the materials. Ag doping also improved the antibacterial and photocatalytic activity of TiO2 nanoparticles. The maximum photocatalytic activity under light irradiation was observed for 5% Ag-doped TiO2.
Copper (Cu)-doped cadmium sulphide (CdS) quantum dots (QDs) sensitised zinc oxide photoelectrodes have been fabricated for a solar cell (SC). For the synthesis of QDs, simple chemical methods have been adapted and the QDs were prepared on poly-vinyl alcohol capping agent. The influences of doping on structural properties of QDs have been studied using X-ray diffraction analysis and transmission electron microscopy images. Ultraviolet–visible absorption spectroscopy reveals an enhanced optical absorption in doped QDs. The photovoltaic performance of the Cu-doped CdS QDs was studied by measuring the current density–voltage (J–V) characteristics of the fabricated SC. An enhanced photo-conversion efficiency was observed in doped CdS QDs compared with the undoped QDs sensitised SC.
The low Pr-doped Bi2O3 photocatalyst was prepared via the acrylamide polymerisation method. The photocatalytic activity of prepared samples was evaluated by degrading methyl orange under visible-light irradiation. In comparison to α-Bi2O3 nanoparticles, 4% Pr-α-Bi2O3 photocatalyst exhibit obviously enhanced photocatalytic performance. The theoretical calculation and experimental results show that Pr doping can extend the optical absorption range from 436 to 518 nm and improve the photocatalytic efficiency from 40.9 to 70.4%. This long-wavelength response can be happened because of Pr doping that gives rise to the modification of electron structure and the hybridisation of the energy levels.
Visible and near-infrared light responsed Sn1−x Bi x S2nanosheets was synthesised via a simple hydrothermal method. Rhodamine B was adopted to evaluate the degradation efficiency of the as-prepared samples. Experimental results showed that the doping content of Bi3+ could obviously affect the degradation efficiency of SnS2. It was first increased and then decreased with increasing the Bi3+ content under the visible light irradiation. When the mole fraction of doping Bi3+ was 5%, the as-prepared Sn0.95Bi0.05S2 with a bandgap of 0.38 eV had the highest degradation efficiency of 95.9% in 120 min. Moreover, the as-prepared composites possessed more effective electron–hole pair separation than that of pure SnS2. In addition, a possible degradation mechanism of the as-prepared Sn0.95Bi0.05S2 was proposed.
A widely used approach to reduce the charge recombination and improve the performance of a silicon based Schottky barrier solar cell (SBSC) is to use an interfacial layer between metal and Si. In the present work we have investigated the role of graphene oxide (GO) as interfacial layer for p doped Si (p-Si) based SBSC utilizing AZO (Aluminum doped ZnO) as transparent top contact. The not obvious compatibility of the different layers combined in the solar device results clear from the improvement of all the electrical parameters measured in the AZO/GO/p-Si solar cell respect to the simple AZO/p-Si device used as reference. In particular dark IV characterization put in evidence the majority carrier blocking properties of the GO in this type of structure, with an increment of 140 meV in the barrier height respect to the device without GO, resulting in a 100% enhancement in the final solar cell efficiency.
One of the significant advantages of the ultraviolet (UV) light exposure of chalcogenide glasses (ChGs), photodoping process, is in the application of programmable metallisation cells (PMCs) as a novel non-volatile resistive memory. The memory state of a PMC is dictated by the formation or dissolution of a metallic filament in a ChG film between active metal and inert metal contacts. Owing to relatively rigid covalent bonds mixed with soft van der Waals interconnections, ChGs are able to form acceptor-like traps where electrons are absorbed, and therefore electron mobility decreases compared with crystallised structures. The role of electrons in the interaction with ionic species in ChGs is inevitable. One the other hand, holes are considered as majority carries and their role in interaction with the system is also significant. Therefore, knowing carrier mobility in ChGs is essential. To extract carrier mobilities, for the first time a circuit setup accompanying with time constant extraction method for Ge30Se70 as a ChG material without and with UV light exposure is proposed. Owing to being straightforward, this method can be applied to other ChG materials as well as other light sources or even ionising radiation particles.
A triple p–n junction Si photodetector using 0.25-μm standard CMOS process at 650- and 850-nm wavelengths is presented and investigated. Triple p–n junctions are formed vertically by n+-implant/p-well (N+/HVPW), p-well/n+-buried layer (HVPW/NBL), and n+-buried layer/p-substrate (NBL/P-sub) junctions to attain a wavelength-dependent response. The responsivity and pulse response were characterised in different bias schemes. Measured photocurrents from HVPW/NBL and NBL/P-sub junctions under reverse biasing and a floating electrode on N+-HVPW showed the smallest FWHM values. The −3 dB bandwidth of 1.9 GHz converted from pulse measurement is the highest result ever reported in 654-nm wavelength using standard CMOS technology. The proposed triple p–n junction Si photodetector with bias schemes shows combined excellent performance in 650- and 850-nm wavelengths.
Manganese (Mn)-doped titanium dioxide (TiO2) nanostructures were synthesised by hydrothermal reaction of TiO2 and Mn acetate with ethylenediamine and thiourea. The prepared samples were characterised by X-ray diffraction, Fourier transform infrared spectroscopy, transmission electron microscopy, field emission scanning electron microscopy and energy dispersive X-ray spectroscopy. Characterisation of samples confirmed the formation of pure and crystalline nanostructures. Photoluminescence spectroscopy was carried out to study the optical properties of the pure and Mn-doped TiO2 nanostructures. A vibrating sample magnetometer was used to study the magnetic properties of the prepared Mn-doped TiO2 nanostructures.
In this reported work, TiO2 nanoparticles containing anatase-rutile and pure rutile phases were prepared by sol–gel and hydrolysis in acidic solution methods, respectively. Two general procedures, doping during synthesis (DDS) via a hydrolysis method and doping on the provided TiO2 nanoparticles (DOP) that is performed by the impregnation method have been studied by doping copper to these nanoparticles. The photocatalytic activity was evaluated by photodegradation of C.I. Acid Red 27 as a model contaminant. The prepared samples were characterised by X-ray diffraction, atomic absorption flame emission spectroscopy and scanning electron microscopy. It is found that the photosensitised degradation activity can be enhanced by doping an appropriate amount of Cu. Photocatalytic activity results indicated that samples that have been doped by the DDS procedure show higher photocatalytic efficiency than samples doped by the DOP procedure.
The electrical properties of pn junctions, with various semiconductor materials with different doping concentrations fabricated by using surface-activated-bonding (SAB), were investigated by measuring their current-voltage (I-V) characteristics. The I-V characteristics of p +-GaAs/n ++-Si, p +-GaAs/n +-Si, p +-Si/n +-Si, p ++-Si/n +-InGaP, and p +-Si/n +-InGaP junctions showed ohmic-like properties. The interface resistance and the resultant electrical loss decreased with increasing impurity concentration at the interface. These results demonstrate the significance of SAB for fabricating tandem solar cells.
Arsenic (As) diffusion in germanium (Ge) has been studied by implanting As in a Ge substrate with high boron (B) background doping. The high hole density induced by the B doping suppresses negatively charged vacancies (V) in Ge. Under this condition, we have investigated the dependence of As diffusion on the dopant-vacancy pairs As+V0 by secondary ion mass spectroscopy. After rapid thermal annealing at 600−750°C, the chemical profiles of As do not change in the highly B doped Ge. Experimental results suggest that the As+V0 pairs are not the diffusion vehicles of As in Ge. Activation energy of the As+V0 pairs has to be larger than 3.25 eV.
N, C-codoped BiOCl (BiOCl–NC) flower-like hierarchical structures were synthesised by an one-pot solvothermal process and characterised by X-ray diffraction patterns, X-ray photoelectron spectroscopy, UV–vis diffuse reflectance spectra, transmission electron microscopy and high-resolution transmission electron microscopy. As-synthesised BiOCl–NC showed higher photocatalytic activity in an aqueous RhB photodegradation system than pure BiOCl under visible light irradiation. The trapping experiments of active species during the photocatalytic reaction showed that the photocatalytic degradation of organic pollutants in the BiOCl–NC system proceeds through direct hole transfer and O2•− rather than •OH.
Tunnel currents through semiconductor tunnel barriers have proved very difficult to control to the extent that device-to-device variability and wafer-to-wafer irreproducibility have prevented electronic devices based on tunnelling from ever going into production. With reference to a single tunnel barrier of AlAs in a GaAs multilayer structure with an asymmetric doping profile, it is shown that, with careful attention to detail, diodes from equivalent sites on three separate wafers can be produced whose average current in forward bias is within 1 % while the total in-wafer standard deviation of current at the same fixed bias (0.5 V) is 6 %, dominated by a systematic cross-wafer variation that is described. This level of reproducibility now enables these devices to be used in pick-and-place systems for the manufacture of low-cost hybrid integrated microwave circuits.
Al-doped ZnO nanoparticles have been synthesised via sol–gel method. Aluminum nitrate and aluminum chloride, as two widespread doping sources, have been compared in various Al/Zn molar ratios of 0.1, 0.5, 1, 2 and 5. After sol preparation, all samples with different Al content have been aged and then dried at 120°C. The resultant grinned powders calcined at different temperatures of 400, 500, and 600°C. X-ray diffraction (XRD) method has been used to investigate crystallisation behaviour and structural properties of samples. Less crystallinity in chloride source samples is detected compared to the nitrate source; however, identical distortion of hexagonal wurtzite unit cell in both sources was evident in XRD results. Field emission scanning electron microscopy demonstrates semisphere morphology of ZnO nanoparticles with particle size less than 60 nm. Fourier transform infrared spectroscopy was conducted to find possible chemical reactions and complexes during the sol–gel process in different Al source samples. UV-vis spectroscopy was carried out to find optical properties of the Al:ZnO samples. The results represent different optical properties in Al chloride and Al nitrate sources.
A specific structure of doped graphene with substituted silicon impurity is introduced and ab initio density-functional approach is applied for the energy band structure calculation of the proposed structure. Using the band structure calculation for different silicon sites in the host graphene, the effect of silicon concentration and unit cell geometry on the bandgap of the proposed structure is also investigated. Chemically, silicon-doped graphene results in an energy gap as large as 2 eV according to density-functional theory calculations. As the authors will show, in contrast to previous bandgap engineering methods, such structure has significant advantages including wide gap tuning capability and its negligible dependency on lattice geometry.
The atmosphere compensating technique with an individual selenium source is, first, used in the growth of phosphorus-doped p-type ZnSe nanowires. The morphology and structure characterisations reveal that the as-synthesised ZnSe nanowires have a wurtzite structure with a diameter of about 160 nm, a growth direction of [001]. The electrical properties’ characterisations demonstrate that the selenium atmosphere compensation technique assisted with phosphorus-doping leads to a substantial action in p-type conductivity of ZnSe nanowires with a high mobility of 1.25 cm2 V−1 S−1 and carrier concentration of 1.47×1018 cm−3. The photoluminescence measurements show a dominant emission and two donor–acceptor pair emission.
Water-soluble Mn-doped CdS nanocrystals were synthesised by an aqueous colloidal synthetic technique. X-ray diffraction identifies that the Mn-doped CdS nanocrystal is a cubic structure without impurity phase. Transmission electron microscopy suggests a narrow size distribution of the nanocrystals with an average particle size of ∼3.6 nm. Moreover, UV–vis absorption and photoluminescence (PL) spectra of the nanoparticle were also measured. PL results show that Mn-doped CdS nanocrystals have a distinct Mn2+ related emission well-separated from the trap state emission. Reaction variables such as the 3-Mercaptopropionic acid/Cd (MPA/Cd) ratio, reaction temperature and Mn2+ doped concentration were systematically investigated to evaluate the impact of these variables on particle size and optical property. The results indicate that the 2 mol% Mn-doped CdS nanocrystals synthesised at 70°C and the MPA/Cd ratio of 3.5 have the highest PL intensity.
This paper gives detailed view on the Nanoelectronics and the approaches adopted for improving the speed of the device without compromising the performance. Performance of the device is mainly based on the speed of operation, Operating voltage and size of the device. In the recent years the two main approaches adopted for optimizing the device performance are new and modified device architectures and using alternate materials which are different from the normal materials used for electronics. Device structures have been modified and designed according to the application. Device modelling is the approach adopted by various companies and research groups in the universities to modify and design new device structures using device modelling and simulation software's. Performance of the device can be improved by using alternate materials such as GaAs, ZnO, BiTe, In, TiO, Fe, Co, Al, Zr etc. Materials other than silicon and germanium with better optoelectronic and electronic properties have been used to improve the performance of the device. The property of the materials can be improved by doping different materials at different compositions and preparing nanomaterials by using different preparation techniques. Materials property is analyzed by using different characterization techniques such as XRD, SEM, TEM, UV, LCR, etc.
A method to estimate the gauge factor of a polysilicon strain gauge at the wafer level is proposed. It is difficult to measure the gauge factor of a polysilicon strain gauge formed on the silicon diaphragm of a mechanical transducer because the polysilicon strain gauge is integrated into the diaphragm. The authors fabricated polysilicon strain gauges of various shapes and implanted with various concentrations of boron, and measured the gauge factor of each strain gauge. In the experimental results, the gauge factors are calculated by multiplying the resistivity coefficient of gauge factor (RCGF) determined by the boron concentration and resistivity of the polysilicon strain gauge. The authors also determined the RCGF of the polysilicon strain gauges implanted with boron concentrations of 1.0×1019, 1.5×1019 and 1.0×1020 cm−3.
A commercial silicon-based variable optical attenuator has been converted to a low bandwidth (quasi-CW) light monitor through an ion implantation and annealing process. The measured total optical loss of the device is <5 dB while the responsivity per tapped fraction is 1 mA/W/dB. The straightforward manner in which the monitoring functionality is induced suggests a cost-effective route to CW optical monitors using a widely available commercial product.
The authors simulate both conventional and doping superlattice GaInNAs solar cells. They show that for a conventional cell with 1 µm diffusion lengths the maximum possible efficiency is approximately 9.5% and for 0.1 µm diffusion lengths it is 6.5% as the device must be relatively thin. Doping superlattice structures with varying number of layers and different layer thicknesses are simulated to find the design which yields the highest efficiency. A high number of thin layers allow a high percentage of incident photons to be absorbed, and carrier separated increasing the short-circuit currents leading to efficiencies close to 12%.
A number of GaAs-based long-wavelength, vertical-cavity, surface-emitting laser structures with optical and electrical confinement based on selective area epitaxy have been fabricated and evaluated. The influence on output power, threshold current, thermal stability and modal properties from design parameters such as bottom-distributed Bragg reflector (DBR) doping, cavity doping, dielectric top DBR design and carrier confinement barriers is evaluated. More than 7 mW of output power is emitted from multimode devices with a square active region size of 10 µm. Single-mode power from smaller devices is restricted to 1.5 mW because of a non-optimal cavity shape.
Tantalum-doped ZnO transparent conductive films are deposited on glass substrates by radio frequency sputtering at 300°C. The influence of O2/Ar ratio on the structural, electrical, and optical properties of the as-deposited films is investigated. The lowest resistivity of 4.1×10−4 Ωcm is obtained from the film prepared at the O2/Ar ratio of 1/12. The average optical transmittance of the films is over 90%.
A high-growth-temperature GaAs spacer layer (HGTSL) is shown to significantly improve the performance of 1.3 µm multilayer InAs/GaAs quantum-dot (QD) lasers. The HGTSL inhibits threading dislocation formation, resulting in enhanced electrical and optical characteristics and hence improved performance of QD lasers. To further reduce the threshold current density and improve the room-temperature characteristic temperature (T0), the high-reflection (HR) coating and p-type modulation doping have been incorporated with the HGTSL technique. A very low continuous-wave room-temperature threshold current of 1.5 mA and a threshold current density of 18.8 A cm−2 are achieved for a three-layer device with a 1 mm HR/HR cavity, while a very low threshold current density of 48 A cm−2 and a negative T0 are achieved in the p-doped lasers.
The use of expanded mode layers in lasers designed for DVD read/write applications is investigated and their performance is compared with that of a more conventional structure. The expanded mode design achieves a higher confinement factor and hence much lower threshold currents than the conventional structure, for the same measured vertical farfield divergence of 18°. T0 is increased from 51 to 65 K (20–70°C) for the expanded mode structure for 320-µm long devices with uncoated facets. It is also found that zinc or magnesium can be used interchangeably for the p-dopant in a given structure without any impact on device performance.
The segmented contact method is used to study the performance of intrinsic and p-doped quantum dot structures emitting at 1.3 µm. From measurements of the absorption, it is shown that despite being doped to a level of 18 acceptor atoms per dot, only 19% of the quantum dot states are filled by excess holes, illustrating the importance of the continuum states in the wetting layer. We directly measure the modal gain and non-radiative recombination and show that the modal gain is increased as a function of transparency point when p-dopants are introduced without a significant increase in non-radiative recombination. These results explain the 65% reduction in threshold current observed for uncoated 1500 µm long devices at 300 K.
Nitrogen-doped ZnO thin films were deposited using the pulsed laser deposition technique. The epitaxial ZnO films were p-type in the measured temperature range 200–450 K, with hole concentrations and mobilities of 9.6×1015 cm−3 and 10.8 cm2/V-s, respectively, at room temperature. The films remained p-type under conditions of changing illumination. This result represents a step towards realisation of ZnO-based optoelectronic devices for high-temperature operation.
The aim of the authors is a performance comparison of quantum dot infrared photodetectors (QDIPs) with quantum well infrared photodetectors (QWIPs) under various operating conditions. This type of photodetector is interesting from the point-of-view that QWIPs have numerous advantages over photodetectors based on HgCdTe. From a quantum structure point-of-view, QDIPs have several advantages over QWIPs, especially their wide spectrum range that can be covered, as well as the availability of absorption normal incident light. However, they still have some problems that include high values of dark current and lower values of their responsivity. For these reasons, there is a need to make a theoretical comparison between the two fundamental types of quantum photodetectors. The more interesting parameters of these detectors to achieve this comparison are calculated. These parameters include dark current, photocurrent, responsivity and detectivity. Numerical results show that QDIPs have a lower value for their responsivity and detectivity for the same operating conditions. The aim is to reduce the dark current by adjusting the doping level of these detectors. Moreover, the effect of lateral size and its associated adaptive value can improve the behaviour of the QDIPs that are processed to some extent.
The physical and electrical properties of polycrystalline β-SiC were studied according to different nitrogen doping concentration. The crystalline peaks SiC(111), SiC(220), SiC(311) and SiC(222) appeared in XRD analysis of poly-SiC films deposited on Si substrates covered with thermally-grown SiO2. Resistance of nitrogen-doped SiC films decreased with increasing temperature. The size of resistance ratio was much bigger in films with low doping. On the other hand, the linearity of resistance variation was better in films with high doping.
The fabrication and characterisation of a monolithic extended cavity ridge laser using low-energy ion-implantation induced quantum well intermixing on InGaAs/InGaAsP quantum-well structure are presented. An extremely low propagation loss of 2 cm−1 in the passive waveguide section has been measured.
Fabrication of metal–semiconductor–metal near-infrared photodetectors with 0.4 µm-thick GaInNAs absorption layer was demonstrated. Better crystal quality and fewer dislocations were obtained from samples with lower nitrogen content based on the results of photoluminescence and high-resolution X-ray diffraction. The absorption edge located at 1.2 µm under 4 V bias was realised owing to the nitrogen incorporation effect, and the responsivity of GaInNAs MSM photodetectors higher than 60 mA/w was also successfully achieved when compared to other conventional InGaAs detectors. The devices, hereby demonstrated believably, should have potential applications in fibre optics communications.
An n-InAsSb/p-GaSb tunnel junction for intra-device contacts with an extremely low contact resistivity of 2.4×10−6 Ω cm2 is reported. Both sides of the junction were doped with silicon, using the amphoteric nature of the dopant for n- and p-type doping. This should provide long-term stability of the device.
A novel aspect of the carbon effect on indium electrical activation in silicon is presented. It is shown that, depending on the thermal budget used during annealing, the presence of carbon can increase or inhibit the indium electrical activation. The different behaviour is explained in terms of the Ins–Cs couple formation for low thermal budgets and carbon precipitation for high thermal budgets.
Two of the most important intermixing techniques, ion implantation and impurity free vacancy disordering, are investigated and compared in InGaAs/(Al)GaAs quantum well (QW) and quantum dot (QD) structures. For ion implantation induced intermixing, arsenic implantation was performed and the amount of interdiffusion created was found to vary as a function of implantation dose and temperature. Impurity free vacancy disordering was also enhanced by deposition of SiO2 in both QW and QD structures and annealing at different temperatures. In order to obtain large differential energy shifts for device integration using both methods, the essential issue of suppression of thermal interdiffusion using a TiO2 capping layer was also addressed.
It is known that the Zn doping profile in strained multi-quantum-well (MQW) InGaAsP lasers strongly affects the electro-optical characteristics of these devices and their temperature sensitivity. A systematic investigation of the excitation dependence of the active layer photoluminescence (PL) intensity from compressively strained InGaAsP MQW pin laser material with different Zn doping profiles is described. When the pn junction lies within the active region, the excitation dependence of the PL intensity is superlinear at low excitation and linear at higher excitation. As the Zn profile is set back from the heterointerface creating a displaced pn junction from the active region, the excitation dependence is superlinear and linear at 300 K but becomes linear for all excitation powers at 77 K. The implications of these observations are discussed.
A proton-implanted photonic crystal vertical-cavity surface-emitting laser for fibre optic applications is demonstrated. Ultra-low threshold current of about 1.25 mA, single fundamental mode (SMSR>40 dB) CW output power of over 1 mW, with a pulsed output power exceeding 2 mW has been achieved in the 850 nm range.
We report the high-temperature characteristics of 1.3-μm InGaAsP directly modulated lasers with a simple buried structure using Ru-doped semi-insulating InP. Clear eye openings under 10-Gbit/s direct modulations were obtained from 0°C to 100°C. (2 pages)
Optical studies of GaAs1−xNx/GaAs and BxGa1−xAs/GaAs epilayers grown by metal organic chemical vapour deposition (MOCVD), with various nitrogen (N) and boron (B) compositions, have been achieved by photoluminescence spectroscopy (PL) as a function of the excitation density and the sample temperature (10–300 K). The experiments have shown that the GaAsN PL band emission presents a more significant red shift than the BGaAs emission. For the GaAsN a reduction of 110 meV/1%N is shown, but for the BGaAs the PL band emission shifts to the low-energy side by up to 2.5%. A more significant blue shift of the PL bands with increasing the excitation density has been observed for GaAsN compared to BGaAs epilayer structures. The temperature dependence of the PL peak energy has shown S-shaped behaviour for both structures, but the localisation effects are more important in GaAsN than in BGaAs. Based on these experimental results, it is shown that B incorporation does not cause large modification of the band structure in BxGa1−xAs alloys compared to pure GaAsN structures.
Dilute nitride GaInNAs and GaInNAsSb alloys grown on GaAs have quickly become excellent candidates for a variety of lower cost 1.2–1.6 μm lasers, optical amplifiers and high-power Raman pump lasers that will be required to power the Internet and advanced communications systems capable of delivering multi-Gbit/s data rates to the desktop. Two particularly critical devices are vertical-cavity surface-emitting lasers (VCSELs) which must operate at high data rates (≥10 Gbit/s), uncooled over a broad thermal operating range and high power (≥500 mW) edge-emitting lasers for Raman amplifier pumps. Despite the fact that these materials are grown in a metastable regime, and there are still many remaining challenges, progress has been both rapid and very promising. Some of the material challenges include the limited solubility of N in GaAs, nonradiative defects that are caused by either or a combination of N incorporation, low growth temperature, and ion damage from the N plasma source. N and Sb add a unique set of properties to this metastable alloy; however, this significantly increases the complexity of its characterisation. The addition of Sb significantly improves the epitaxial growth and optical properties of the material at wavelengths longer than 1.3 μm and broadens the range of In and N composition alloys that can be grown. By adding Sb to the alloy, luminescence has been greatly enhanced between 1.3 and 1.6 μm where normally poor quality material results. Progress in overcoming some of the material challenges is described, particularly GaAsNSb against GaNAs QW barriers, plasma-source ion damage and progress in realising record-setting edge-emitting lasers and the first VCSELs operating at 1.5 μm based on GaInNAsSb QWs grown by solid-source MBE on GaAs.
Epitaxial growth and characterisation of Ga1−xInxAs1−yNy films and quantum wells are presented. Starting with the epitaxy on GaAs, recent results on the local bonding of nitrogen in Ga1−xInxAs1−yNy are reviewed, revealing that bonding of nitrogen is controlled by an interplay between bond cohesive energy and reduction of local strain. Thus, III–N bonding can be changed from Ga–N to In–N by post-growth thermal annealing. For high In-content Ga1−xInxAs1−yNy on InP it is demonstrated that only small amounts of Ga are necessary to cause the bonding of the nitrogen atoms to at least one Ga neighbour. The epitaxy on InP substrates, equivalent to a drastic increase in indium content, allows an extension of optical transitions to longer wavelengths. The feasibility of high In-content Ga1−xInxAs1−yNy pseudomorphic quantum wells on InP is shown. The deterioration of the photoluminescence properties with increasing nitrogen incorporation can be partially compensated by thermal annealing. Within the resolution limits of the secondary ion mass spectrometry experiments, no annealing-induced loss of nitrogen was observed. The indium-rich strained Ga0.22In0.78As0.99N0.01 quantum wells are shown to exhibit room-temperature photoluminescence at wavelengths up to 2.3 μm. Finally quantum well lasers emitting at wavelengths beyond 2 μm are demonstrated.
Both n-type InP and InGaAs layers are electrically isolated using iron and krypton ion implantation at 77K to create thermally-stable highly resistive regions. The data suggests that, in both InP and InGaAs, chemical induced compensation operates above a post-implant annealing temperature of 500°C for iron implant isolation. However, in the case of krypton, damage induced isolation is the only compensation mechanism responsible for electrical isolation in both materials. The isolation scheme used looks promising to III–V semiconductor industries since such high sheet resistance values (∼107 Ω/sq) with a broad thermally-stable window are obtained for both n-type InP and InGaAs materials.
Passivation of GaAs by silicon nitride (SixNy) deposition using low-frequency PECVD (LF PECVD) is presented. The high amount of hydrogen implantation during this process enhances the passivation effect, demonstrating for the first time the unpinning of the Fermi level by a simple deposition of SixNy on a deoxidised GaAs surface. The (NH4)2S/SixNy passivation is also simplified, and MIS capacitors are fabricated by a novel process, which consists in exposing the GaAs surface directly to sulphur solution, without the usual deoxidation etching step, followed by the deposition of LF PECVD SixNy. Good modulation of the surface potential is observed, and the interface state density (Dit) as measured from 1 MHz C–V characteristics has a minimum of 3×1011 cm−2 eV−1.