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High-accuracy silicon-on-insulator accelerometer with an increased yield rate
Author(s): Enfu Li, Pengcheng Li, Qiang Shen, Honglong Chang
Source: Micro & Nano Letters, Volume 10, Issue 10, 2015 , p. 477 - 482
Type: Article
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This Letter presents a high accuracy silicon-on-insulator (SOI) capacitive accelerometer using a backside dry release process. To increase the yield rate of the process, the deep reactive iron etching (DRIE) process was improved using a grooved accompany wafer to balance the pressure inside the back cavity of the SOI devices. By using this method, almost all the devices after the DRIE will not crack. Thus, the yield rate is significantly increased. Furthermore, the DRIE process was improved by dividing the DRIE process into four stages to decrease the tilt angle of DRIE. It is experimentally demonstrated that the tilt angle of the side wall was decreased from 0.81° to 0.27° and the loss of the capacitive sensitivity caused by the error was decreased from 28 to 8%. Test results show that sensitivity, bias stability, and noise floor of the accelerometer is 3.1 V/g, 16 μg, and 3.1 μg/√Hz, respectively.

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Tilt sensor based on a dual-axis microaccelerometer with maximum sensitivity and minimum uncertainty in the full measurement range
Author(s): Enfu Li, Jiming Zhong, Honglong Chang
Source:
Type: Article
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This work presents an approach to enhance the sensitivity and lower the uncertainty of a tilt sensor based on a dual-axis accelerometer. The arctangent function arctan(a 2/a 1) instead of traditional arcsine function arcsin(a 2 /g) or arcsin(a 1/g) is used to solve for tilt angle. As a result, the measured sensitivity of tilt angle is kept in the maximum constant value (17.45 mg/°) and the measurement uncertainty is kept in the minimum constant value (0.033° for the tilt sensor of this work) in the measurement range of −90° to +90°. It is also experimentally verified that the solving method has the maximum sensitivity (the average value of 17.74 mg/° with a root mean square of 0.008 mg/°) and minimum uncertainty (the average value of 0.034° with a root mean square of 0.003°) compared with other solving methods in the range of −90° to +90°]. The output of tilt sensor in the range of −90° to+90° and +90° to +270° is axial symmetry about 90°, so it is easy to extend the measurement range to 360°. Therefore, the presented approach is proved to be effective to enhance tilt sensor sensitivity and lower the uncertainty.

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