Piezoelectric and ferroelectric devices
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- 1998 [7]
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The preparation of sol–gel derived thin films of the piezoelectric ceramic lead zirconate titanate (PZT) has been investigated on different substrate configurations for bulk acoustic wave device applications operating at microwave frequencies. Films having a composition of Pb(Zr0.53Ti0.47)O3 have been prepared on platinised silicon (Pt–Si) and platinised gallium arsenide (Pt–GaAs) substrates using a 1,3-propanediol and a novel 1,1,1-tris(hydroxymethyl)ethane based sol–gel technique. Crystalline PZT films were produced on the Pt–GaAs by firing the sol–gel coating at 650°C for a dwell time of 1 second using rapid thermal processing techniques. A single deposition of the precursor sol resulted in films having a thickness of ~0.4 µm. Average values of remanent polarisation for the films were 29 and 24 µC/cm2 on Pt–Si and Pt–GaAs, respectively. Microwave characterisation performed on PZT/Pt–Si based BAW resonator structures indicate a fundamental parallel resonance at 0.1 GHz, having an unloaded QF of 1 × 1011 Hz.
The authors describe and demonstrate a system exploiting the use of cylindrical ultrasonic waveguides for ‘remote’ Lamb wave generation and detection in thin plates. Ultrasonic energy is introduced into the cylindrical waveguides from a piezoceramic transducer via an epoxy bond, and the nature of this coupling is investigated theoretically using finite element analysis. The results show that lateral modes in the transducer (related to width and length, or diameter) couple into the waveguide more effectively than the more efficient thickness modes, as a result of the epoxy bond converting lateral motion into longitudinal motion. The thin cylindrical waveguides are then used to deliver ultrasonic signals to specific points in plate-type structures. As such, the waveguides may be considered as point sources, a combination of which can behave as a line array. To demonstrate this, it is shown that Lamb waves are generated and detected by bonding the ends of several copper wires, at half-wavelength spacing, to the surface of a sheet of aluminium. The fundamental symmetric and asymmetric modes are then used to explore possible non-destructive evaluation measurements. Following this, a form of portable ‘wire’ transducer, comprising an array of waveguide sources, is presented that allows the detection of synthetic flaws in an aluminium plate.
Interdigital transducers (IDTs) made from the piezoelectric polymer PVDF have been built; they transmit ultrasonic Lamb waves into 1–2 mm thick steel and aluminium plates and receive signals reflected from features in the structure. The IDTs are designed to be permanently bonded to the structure under inspection. Such IDTs have considerable potential for use in smart-structure monitoring applications. However, before this potential can be realised, the nature of the acoustic field that they produce must be thoroughly understood. Experimentally measured acoustic fields are presented for two example IDTs, one that produces a collimated beam for line inspection and one that produces a divergent beam for sector inspection. The development of modelling software based on Huygens' principle, which enables the acoustic field from such IDTs to be predicted rapidly, is then described. Example results from this software are presented and compared with experimental measurements. Further predictions made with the model are then used to elucidate certain basic guidelines for IDT design.
The ultrasonic motor is a new type of motor. In recent years, some mathematical models for the ultrasonic motor have been reported. However, these models are very complex to apply to control of the motor, and therefore speed or position controllers for this type of motor have been designed based on proportional and integral controllers or fuzzy controllers. Since these controllers cannot take account of the motor's dynamics, a simple and convenient mathematical model of the ultrasonic motor is necessary in order to achieve high control performance. The authors propose a simplified mathematical model for the ultrasonic motor, which is expressed by a difference equation, and they then design a speed controller based on adaptive control theory. Adaptive control is attractive for controlling the ultrasonic motor because its speed characteristics vary with drive conditions. The effectiveness of the proposed control scheme is demonstrated by experiments. Furthermore, the paper indicates the influence of control delay and model orders on the mathematical model experimentally.
KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show electromechanical coupling coefficients (K2) of 0.021 at the centre frequency of 960 MHz and λ/h = 0.24 (λ = SAW wavelength, h = KNbO3 film thickness). These values are in fairly good agreement with theoretical values calculated using the piezoelectric constants of single crystals.
To improve the power-durability of RF-band SAW filters, single-crystal Al/Ti electrode films were successfully grown on 64°Y-X LiNbO3 substrates by the electron-beam vapour deposition technique. The time to failure of the single-crystal Al/Ti electrodes became approximately 680 times longer than that of Al-Cu alloy electrodes.
The design of robust control strategies for the active vibration control of isotropic plates is presented. The models of the structures are developed using the Rayleigh-Ritz method. A technique for the optimal placement of piezoelectric actuators is developed using modal controllability and a genetic algorithm (GA) as the search engine. The model was used to design robust controllers (LQG and H∞) for a cantilever supported plate. The proposed controllers were then implemented with the measured results comparing favourably with those predicted from simulation.
