Piezoelectric and ferroelectric devices
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A chirp spread spectrum communication link for high-speed indoor wireless systems using a broadband SAW chirp filter is proposed. This system combines the multipath resolving ability of spread spectrum with the diversity of a RAKE-type receiver. Computer simulations and experimental results show nearly ideal performance in multipath fading conditions.
The preparation of sol–gel derived thin films of the piezoelectric ceramic lead zirconate titanate (PZT) has been investigated on different substrate configurations for bulk acoustic wave device applications operating at microwave frequencies. Films having a composition of Pb(Zr0.53Ti0.47)O3 have been prepared on platinised silicon (Pt–Si) and platinised gallium arsenide (Pt–GaAs) substrates using a 1,3-propanediol and a novel 1,1,1-tris(hydroxymethyl)ethane based sol–gel technique. Crystalline PZT films were produced on the Pt–GaAs by firing the sol–gel coating at 650°C for a dwell time of 1 second using rapid thermal processing techniques. A single deposition of the precursor sol resulted in films having a thickness of ~0.4 µm. Average values of remanent polarisation for the films were 29 and 24 µC/cm2 on Pt–Si and Pt–GaAs, respectively. Microwave characterisation performed on PZT/Pt–Si based BAW resonator structures indicate a fundamental parallel resonance at 0.1 GHz, having an unloaded QF of 1 × 1011 Hz.
The authors describe and demonstrate a system exploiting the use of cylindrical ultrasonic waveguides for ‘remote’ Lamb wave generation and detection in thin plates. Ultrasonic energy is introduced into the cylindrical waveguides from a piezoceramic transducer via an epoxy bond, and the nature of this coupling is investigated theoretically using finite element analysis. The results show that lateral modes in the transducer (related to width and length, or diameter) couple into the waveguide more effectively than the more efficient thickness modes, as a result of the epoxy bond converting lateral motion into longitudinal motion. The thin cylindrical waveguides are then used to deliver ultrasonic signals to specific points in plate-type structures. As such, the waveguides may be considered as point sources, a combination of which can behave as a line array. To demonstrate this, it is shown that Lamb waves are generated and detected by bonding the ends of several copper wires, at half-wavelength spacing, to the surface of a sheet of aluminium. The fundamental symmetric and asymmetric modes are then used to explore possible non-destructive evaluation measurements. Following this, a form of portable ‘wire’ transducer, comprising an array of waveguide sources, is presented that allows the detection of synthetic flaws in an aluminium plate.
Interdigital transducers (IDTs) made from the piezoelectric polymer PVDF have been built; they transmit ultrasonic Lamb waves into 1–2 mm thick steel and aluminium plates and receive signals reflected from features in the structure. The IDTs are designed to be permanently bonded to the structure under inspection. Such IDTs have considerable potential for use in smart-structure monitoring applications. However, before this potential can be realised, the nature of the acoustic field that they produce must be thoroughly understood. Experimentally measured acoustic fields are presented for two example IDTs, one that produces a collimated beam for line inspection and one that produces a divergent beam for sector inspection. The development of modelling software based on Huygens' principle, which enables the acoustic field from such IDTs to be predicted rapidly, is then described. Example results from this software are presented and compared with experimental measurements. Further predictions made with the model are then used to elucidate certain basic guidelines for IDT design.
A dual delay line surface acoustic wave device designed for gas sensing applications is described. The viability of this design is demonstrated using data showing the response to NO2 with a sensitising layer of lead phthalocyanine.
The velocity of surface acoustic waves in proton-exchanged 128°-rotated Y cut X propagation lithium niobate with a Cu or Al thin film deposited on the sample surface has been measured using acousto-optic techniques in a wide frequency range. The electrical and mechanical perturbations of the propagation surface introduced by the metal film affects the acoustic velocity, thus providing a mean for its accurate control.
A new surface acoustic wave multi-channel sensor array suitable for pattern recognition purposes has been implemented and tested on an ST-cut quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displacement components of the acoustic wave on the propagation direction.
The microwave response of a parallel plate dielectric resonator, made of bulk single crystal SrTiO3 coated with thin YBa2Cu3O7–x film, is investigated when a pulse voltage is applied. Pulses of ~1 kV amplitude, and 1 ms leading and 3 µs trailing fronts, were used. No relaxation process in the material of the disk resonator has been observed.
The ultrasonic motor is a new type of motor. In recent years, some mathematical models for the ultrasonic motor have been reported. However, these models are very complex to apply to control of the motor, and therefore speed or position controllers for this type of motor have been designed based on proportional and integral controllers or fuzzy controllers. Since these controllers cannot take account of the motor's dynamics, a simple and convenient mathematical model of the ultrasonic motor is necessary in order to achieve high control performance. The authors propose a simplified mathematical model for the ultrasonic motor, which is expressed by a difference equation, and they then design a speed controller based on adaptive control theory. Adaptive control is attractive for controlling the ultrasonic motor because its speed characteristics vary with drive conditions. The effectiveness of the proposed control scheme is demonstrated by experiments. Furthermore, the paper indicates the influence of control delay and model orders on the mathematical model experimentally.
A low-loss 10 GHz range surface acoustic wave (SAW) filter is investigated. It is fabricated on 128° Y-X LiNbO3 using electron beam direct writing and a lift-off process (aluminium electrode width = 95 nm, thickness = 30 nm). Experimental results of the ladder type SAW filter show low loss characteristics. A minimum insertion loss of 3.4 dB in the 10 GHz range is obtained.
The authors demonstrate the use of a thermosensitive quartz resonator oscillator as a thermal sensor to measure and control the temperature of a sapphire whispering gallery mode resonator. The high sensitivity of the quartz sensor allows an efficient thermal regulation of the sapphire resonator at ambient temperature as well as at 77 K. At 300 K, the measured frequency stability of the 9.4 GHz sapphire resonator oscillator is better than 10-9 for integration times up to 1000 s.
KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show electromechanical coupling coefficients (K2) of 0.021 at the centre frequency of 960 MHz and λ/h = 0.24 (λ = SAW wavelength, h = KNbO3 film thickness). These values are in fairly good agreement with theoretical values calculated using the piezoelectric constants of single crystals.
On-chip, non-volatile analogue memory is essential in hardware implementations of many of the early stages of signal processing, including neural network preprocessors and other adaptive sensor fusion amplifiers. Such storage is also desirable for trimming analogue circuits electronically and for parameter retention on power-down. This paper reviews the current state-of-the-art from a designer's perspective, highlighting the promises and problems associated with a range of approaches.
Imaging and display systems that allow the user to obtain distance information and evaluate changes in the relative positions of objects are finding increasing numbers of applications, one area that is of increasing importance is that of stereoscopic endoscopy. Perception of depth through stereoscopic imaging has been shown to give significant improvements in the efficiency with which surgeons carry out operations. Current stereoendoscope systems utilise a two camera system combined with either dual lenses or a single lens plus image splitter system for image capture. A camera and display system is described that allows stereoscopic pairs of images to be obtained through a standard single lens endoscope using a novel electro-optic shutter combined with a standard CCD camera. The use of this ferroelectric liquid crystal shutter allows the optical path to be switched at video frame rates and offers the advantages of being lightweight, simple to drive and having no moving parts. The present system uses field sequential display of the two images combined with FELC shutter glasses to present the left and right images to the user's eyes, although ‘glasses free’ systems could be implemented directly in combination with this camera arrangement.
Microengineering started as a field of study of devices which exploited the mechanical properties of silicon. In particular, sensors, of which pressure sensors and accelerometers are the two greatest commercial successes to date, became a very popular field of study. The subject of actuation in microengineering is now attaining equal importance with that of sensors; examples of commercially exploited devices include inkjet printer nozzles, micromirrors, pumps, valves, bimorphs and gyroscopes. This paper reviews the subject of actuation in microengineering, in terms of the factors to consider, the mechanisms and materials involved, example structures and a comparison of the advantages and drawbacks associated with each actuation system.
To improve the power-durability of RF-band SAW filters, single-crystal Al/Ti electrode films were successfully grown on 64°Y-X LiNbO3 substrates by the electron-beam vapour deposition technique. The time to failure of the single-crystal Al/Ti electrodes became approximately 680 times longer than that of Al-Cu alloy electrodes.
