Gold-coated scanning probes for direct ‘write’ of sub-micron metallic structures
The fabrication and application of new gold-coated scanning probes (SPs) for direct ‘write’ of sub-micron metallic structures are reported. The SP consists of a base structure made of silicon nitride and a thin gold coating. The tip profile and radius of curvature are tightly controlled in the probe fabrication to ensure a predictable tip–substrate contact. By scanning a fabricated probe on a single crystal silicon surface in an ambient environment, sub-micron gold lines were formed as a result of direct gold material transfer from the SP tip onto the silicon surface, which is believed to be induced by the friction and wear associated with the probe scanning.
