Capacitance estimate for electrostatically actuated narrow microbeams

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Capacitance estimate for electrostatically actuated narrow microbeams

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A novel estimate for the line-to-ground capacitance that accurately predicts the pull-in instability parameters for narrow electrostatically actuated microbeams is proposed. Parameters in the proposed formula are obtained by least square fitting data from a fully converged numerical solution with the method of moments. For a narrow microbeam, it is shown that the new formula significantly improves upon classical formulas that neglect fringing field effects due to the finite thickness of the microbeam cross-section.

Inspec keywords: capacitance measurement; beams (structures); micromechanical devices

Other keywords: pull-in instability parameters; microbeam cross-section; electrostatically actuated narrow microbeam; line-to-ground capacitance; least square fitting data; capacitance

Subjects: MEMS and NEMS device technology; Impedance and admittance measurement

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Erratum for ‘Capacitance estimate for electrostatically actuated narrow microbeams’