%0 Electronic Article
%A R.C. Batra
%A M. Porfiri
%A D. Spinello
%K pull-in instability parameters
%K microbeam cross-section
%K electrostatically actuated narrow microbeam
%K line-to-ground capacitance
%K least square fitting data
%K capacitance
%X A novel estimate for the line-to-ground capacitance that accurately predicts the pull-in instability parameters for narrow electrostatically actuated microbeams is proposed. Parameters in the proposed formula are obtained by least square fitting data from a fully converged numerical solution with the method of moments. For a narrow microbeam, it is shown that the new formula significantly improves upon classical formulas that neglect fringing field effects due to the finite thickness of the microbeam cross-section.
%T Capacitance estimate for electrostatically actuated narrow microbeams
%B Micro & Nano Letters
%D December 2006
%V 1
%N 2
%P 71-73
%I Institution of Engineering and Technology
%U https://digital-library.theiet.org/;jsessionid=r9og7pqbcdap.x-iet-live-01content/journals/10.1049/mnl_20065046
%G EN