© The Institution of Engineering and Technology
Accurate and meticulous measurement is an important prerequisite to obtain the real surface information of samples in atomic force microscopy (AFM). A severe problem is the frequent occurrence of measurement errors, which are mainly caused by the nonlinearity of the probe driver, the temperature drift of the system and the tip characteristics. The measurement errors caused by probe tip are the main source of errors in AFM nanoscale measurements. The shape and state of AFM tip will distort the AFM image from the actual sample morphology. If the information about the probe is known, the measurement error caused by the probe tip can be greatly reduced. In order to obtain accurate AFM images, a new method based on geometric measurement model and blind tip reconstruction is proposed to eliminate tip-sample convolution in the measurement of grating samples. The static and dynamic characteristics of the AFM tip are described by four parameters: cone angle, curvature radius, scanning inclination angle and mounting inclination angle. Finally, the feasibility and effectiveness of the new calibration method are verified by evaluating the image reconstruction quality. In conclusion, the proposed method can effectively reconstruct accurate AFM images of the grating.
References
-
-
1)
-
11. Gołek, F., Mazur, P., Ryszka, Z.: ‘AFM image artifacts’, Appl. Surf. Sci., 2014, 304, pp. 11–19 (doi: 10.1016/j.apsusc.2014.01.149).
-
2)
-
2. Binnig, G., Gerber, Ch., Stoll, E.: ‘Atomic resolution with atomic force microscope’, Surface Sci. Lett., 1987, 189, pp. 1–6 (doi: 10.1016/S0039-6028(87)80407-7).
-
3)
-
12. Shen, J., Zhang, D., Zhang, F.H.: ‘AFM tip-sample convolution effects for cylinder protrusions’, Appl. Surf. Sci., 2017, 422, pp. 482–491 (doi: 10.1016/j.apsusc.2017.06.053).
-
4)
-
19. Keller, D.: ‘Reconstruction of STM and AFM images distorted by finite-size tips’, Surf. Sci., 1991, 253, pp. 353–364 (doi: 10.1016/0039-6028(91)90606-S).
-
5)
-
27. Reiss, G., Vancea, J., Wittmann, H.: ‘Scanning tunneling microscopy on rough surfaces: tip-shape-limited resolution’, J. Appl. Phys., 1990, 67, pp. 1156–1159 (doi: 10.1063/1.345712).
-
6)
-
22. Villarrubia, J.S.: ‘Morphological estimation of tip geometry for scanned probe microscopy’, Surf. Sci., 1994, 321, pp. 287–300 (doi: 10.1016/0039-6028(94)90194-5).
-
7)
-
25. Yuan, S., Luan, F., Song, X.: ‘Reconstruction of an AFM image based on estimation of the tip shape’, Meas. Sci. Technol., 2013, 24, p. 105404 (doi: 10.1088/0957-0233/24/10/105404).
-
8)
-
24. Tian, F., Qian, X.P., Villarrubia, J.S.: ‘Blind estimation of general tip shape in AFM imaging’, Ultramicroscopy, 2008, 109, pp. 44–53 (doi: 10.1016/j.ultramic.2008.08.002).
-
9)
-
17. Wang, C., Wang, X., et al: ‘Image description with polar harmonic Fourier moments’, IEEE Trans. Circuits Syst. Video Technol., 2019, 30, pp. 4440–4452 (doi: 10.1109/TCSVT.2019.2960507).
-
10)
-
15. Li, G., Wang, Y., Liu, L.: ‘Drift compensation in AFM-based nanomanipulation by strategic local scan’, IEEE Trans. Autom. Sci. Eng., 2012, 9, pp. 755–762 (doi: 10.1109/TASE.2012.2211077).
-
11)
-
6. D'Amato, C.A., Giovannetti, R., Zannotti, M.: ‘Enhancement of visible-light photoactivity by polypropylene coated plasmonic Au/TiO2 for dye degradation in water solution’, Appl. Surf. Sci., 2018, 441, pp. 575–587 (doi: 10.1016/j.apsusc.2018.01.290).
-
12)
-
21. Odin, C., Aime, J.P., Kaakour, Z.E.I., et al: ‘Tip's finite size effects on atomic force microscopy in the contact mode: simple geometrical considerations for rapid estimation of apex radius and tip angle based on the study of polystyrene latex balls’, Surf. Sci., 1994, 317, pp. 321–340 (doi: 10.1016/0039-6028(94)90288-7).
-
13)
-
13. Mokaberi, B., Requicha, A.A.G.: ‘Compensation of scanner creep and hysteresis for AFM nanomanipulation’, IEEE Trans. Autom. Sci. Eng., 2008, 5, pp. 197–206 (doi: 10.1109/TASE.2007.895008).
-
14)
-
20. Nagase, M., Namatsu, H., Kurihara, K.: ‘Critical dimension measurement in nanometer scale by using scanning probe microscopy’, Jpn. J. Appl. Phys., 1996, 35, pp. 4166–4174 (doi: 10.1143/JJAP.35.4166).
-
15)
-
9. Tan, U.X., Latt, W.T., Shee, C.Y.: ‘Feedforward controller of ill-conditioned hysteresis using singularity-free Prandtl–Ishlinskii model’, IEEE/ASME Trans. Mechatron., 2009, 14, pp. 598–605 (doi: 10.1109/TMECH.2008.2009936).
-
16)
-
10. Yang, Q., Jagannathan, S., Bohannan, E.W.: ‘Automatic drift compensation using phase correlation method for nanomanipulation’, IEEE Trans. Nanotechnol., 2008, 7, pp. 209–216 (doi: 10.1109/TNANO.2007.915021).
-
17)
-
8. Wang, Z., Liu, L., Wang, Z.: ‘An extended PI model for hysteresis and creep compensation in AFM based nanomanipulation’. IEEE Int. Conf. on. Robotics and Biomimetics (ROBIO), Tianjin, People's Republic of China, 14–18 December 2010, pp. 992–997.
-
18)
-
7. Dong, Z., Uchechukwu, C., Wejinya, : ‘Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates’, Appl. Surf. Sci., 2012, 258, pp. 8689–8695 (doi: 10.1016/j.apsusc.2012.05.076).
-
19)
-
1. Binnig, G., Quate, C.F., Gerber, C.: ‘Atomic force microscope’, Phys. Rev. Lett., 1986, 56, pp. 930–933 (doi: 10.1103/PhysRevLett.56.930).
-
20)
-
4. Nagelkerke, A., Bussink, J., Rowan, A.E.: ‘The mechanical microenvironment in cancer: how physics affects tumours’, Seminars Cancer Biology, 2015, 35, pp. 62–70 (doi: 10.1016/j.semcancer.2015.09.001).
-
21)
-
23. Tranchida, D., Piccarolo, S., Deblieck, R.A.C.: ‘Some experimental issues of AFM tip blind estimation: the effect of noise and resolution’, Meas. Sci. Technol., 2006, 17, pp. 2630–2636 (doi: 10.1088/0957-0233/17/10/014).
-
22)
-
18. De Rose, J.A., Revel, J.P.: ‘Examination of atomic (scanning) force microscopy probe tips with the transmission electron microscope’, Microsci. Microanal., 1997, 3, pp. 203–213 (doi: 10.1017/S143192769797015X).
-
23)
-
14. Yuan, S., Liu, L., Wang, Z.: ‘Feature referenced tip localization enhanced by probability motion model for AFM based nanomanipulations’. IEEE Int. Conf. on Robotics and Biomimetics (ROBIO), Phuket, Thailand, 7–11 December 2011, pp. 1421–1426.
-
24)
-
5. Shi, Y., Liam, C., Balke, N.: ‘In-situ electrochemical-AFM study of localized corrosion of Al x CoCrFeNi high-entropy alloys in chloride solution’, Appl. Surf. Sci., 2018, 439, pp. 533–544 (doi: 10.1016/j.apsusc.2018.01.047).
-
25)
-
16. Daoui, A., Yamni, M., El ogri, O., et al: ‘Stable computation of higher order Charlier moments for signal and image reconstruction’, Inf. Sci., 2020, 521, pp. 251–276 (doi: 10.1016/j.ins.2020.02.019).
-
26)
-
26. Yacoot, A., Koenders, L.: ‘Aspects of scanning force microscope probes and their effects on dimensional measurement’, J. Phys. D, Appl, Phys., 2008, 41, p. 103001 (doi: 10.1088/0022-3727/41/10/103001).
-
27)
-
28)
-
3. Gan, Y.: ‘Atomic and sub-nanometer resolution in ambient conditions by atomic force microscopy’, Surf. Sci. Rep., 2009, 64, pp. 99–121 (doi: 10.1016/j.surfrep.2008.12.001).
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