access icon free Local strain gauge based on the nanowires ring resonator embedded in a flexible substrate

The authors proposed a flexible microresonator based on nanowires composed of Ⅱ–Ⅵ compounds to detect the small strain caused by external motion. The nanowire ring resonator is embedded in polydimethylsiloxane (PDMS) flexibility to improve the coupling efficiency. In this work, CdS nanowire is fabricated onto a PDMS flexible substrate. With the help of a fibre tip, the single nanowire is manipulated under a microscope, allowing the curved line to be a ring and making the litter overlapping. This overlap increases coupling efficiency and sensor performance. The ring cavity has the parameters of diameter 1 µm, length 75 µm and radius ∼10 µm. Experiments demonstrated the process of fabricating a strain sensor and detected peak shifts. This resonant wavelength appeared red-shift and linear tuned when stretching the flexible substrate. The quality factor was about 2000 and the gauge factor was about 80 nm per stretching unit. Being a small structure and high sensitivity, the sensor can be integrated into the chip. This promotes the development of miniaturisation to some extent. As a result, this work is beneficial to optical manipulation, further being extended to the tunable light source.

Inspec keywords: optical fabrication; cadmium compounds; micro-optomechanical devices; Q-factor; strain sensors; optical sensors; nanofabrication; microcavities; optical resonators; micromechanical resonators; nanowires; strain gauges; nanophotonics; II-VI semiconductors; nanosensors; microsensors

Other keywords: tunable light source; PDMS flexible substrate; strain sensor; microscope; CdS; external motion; coupling efficiency; chip; stretching unit; local strain gauge; sensor performance; resonant wavelength; CdS nanowire; quality factor; size 75.0 mum; polydimethylsiloxane flexibility; single nanowire; II-VI compounds; red-shift; gauge factor; fibre tip; size 1.0 mum; nanowire ring resonator; flexible microresonator; ring cavity

Subjects: Measurement of mechanical variables; Nanophotonic devices and technology; MEMS and NEMS device technology; Micromechanical and nanomechanical devices and systems; Nanophotonic devices and technology; Optical instruments and techniques; Microsensors and nanosensors; Micro-optical devices and technology; Micro-optical devices and technology; Mechanical variables measurement; Sensing and detecting devices; Optical elements, devices and systems; Other optical system components; Optical fabrication, surface grinding

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