Design of double-layer SiN x :H film and its application in c-Si PERC solar cells

Fan Jinxing; Wang Yin; Zhou Hongping; Xu Linyun; Yang Yanhua

Design of double-layer SiN _x :H film and its application in c-Si PERC solar cells

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Author(s): Fan Jinxing¹ ; Wang Yin¹ ; Zhou Hongping¹ ; Xu Linyun¹ ; Yang Yanhua¹
- Affiliations: 1: College of Mechanical and Elcetronic Engineering, Nanjing Forestry University , Nanjing 210037 , People's Republic of China
Source: Volume 15, Issue 14, 16 December 2020, p. 1003 – 1006
DOI: 10.1049/mnl.2020.0175 , Online ISSN 1750-0443

Received 19/03/2020, Accepted 23/07/2020, Revised 03/06/2020, Published 16/12/2020

The existing solar cell anti-reflection film technology still cannot adequately meet the light trapping needs of solar cells. In this Letter, double-layered SiN _x :H films were prepared for c-Si solar cells by plasma enhanced chemical vapor deposition (PECVD). Herein, the authors introduce a simple, convenient method to lower the reflectance in silicon solar cells by applying double-layered SiN _x :H film to increase the refractive index of such film. Compared to the single layer film devices, the reflectance of the double-layered SiN _x :H film can be significantly reduced by >30% through enhanced absorption of light in solar cells. This method has achieved an average of 0.08% conversion efficiency, with the highest being 0.18%. In addition, the double-layer film solar cells also showed a better passivation performance than that of the single-layer film, so that the minority carrier lifetime was up to 137 µs. Therefore, the improvement of solar cell efficiency mainly come from the decrease of reflectivity and the improvement in film passivation performance. The work of this Letter demonstrated the light trapping advantages and passivation enhancement performance of double-layer films applied to single crystal silicon solar cells.

References

1. 1)
  - 6. Atabaev, T.S., Molkenova, A.: ‘Upconversion optical nanomaterials applied for photocatalysis and photovoltaics: recent advances and perspectives’, Front. Mater. Sci., 2019, 13, pp. 335–341 (doi: 10.1007/s11706-019-0482-z).
2. 2)
  - 7. Holman, Z.C.: ‘Parasitic absorption in the rear reflector of a silicon solar cell: simulation and measurement of the sub-bandgap reflectance for common dielectric/metal reflectors’, Solar Energy Mater. Solar Cells, 2014, 120, (1), pp. 426–430 (doi: 10.1016/j.solmat.2013.06.024).
3. 3)
  - 10. Oh, J., Yuan, H.C., Branz, H.M.: ‘An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures’, Nat. Nanotechnol., 2012, 7, (11), pp. 743–748 (doi: 10.1038/nnano.2012.166).
4. 4)
  - 16. Chen, J.Y., Sun, K.W.: ‘Growth of vertically aligned ZnO nanorod arrays as antireflection layer on silicon solar cells’, Solar Energy Mater. Solar Cells, 2010, 94, (5), pp. 930–934 (doi: 10.1016/j.solmat.2010.01.005).
5. 5)
  - 4. Rahman, T., Bonilla, R.S., Nawabjan, A., et al: ‘Passivation of all-angle black surfaces for silicon solar cells’, Sol. Energy Mater. Sol. Cells, 2017, 160, pp. 444–453 (doi: 10.1016/j.solmat.2016.10.044).
6. 6)
  - 21. Wright, D.N., Marstein, E.S., Holt, A.: ‘Double layer anti-reflective coatings for silicon solar cells’. Conf. Record of the Thirty-first IEEE Photovoltaic Specialists Conf., Lake Buena Vista, FL, USA, 2005, pp. 1237–1240.
7. 7)
  - 3. Otto, M., Algasinger, M., Branz, H., et al: ‘Black silicon photovoltaics’, Adv. Opt. Mater., 2015, 3, (2), pp. 147–164 (doi: 10.1002/adom.201400395).
8. 8)
  - 17. Lee, I., Lim, D.G., Lee, S.H., et al: ‘The effects of a double layer anti-reflection coating for a buried contact solar cell application’, Surf. Coat. Technol., 2001, 137, (1), pp. 86–91 (doi: 10.1016/S0257-8972(00)01076-8).
9. 9)
  - 5. Roy, A.B., Dhar, A., Choudhuri, M., et al: ‘Black silicon solar cell: analysis optimization and evolution towards a thinner and flexible future’, Nanotechnology, 2016, 27, (30), p. 305302 (doi: 10.1088/0957-4484/27/30/305302).
10. 10)
  - 11. Schmidt, J., Aberle, A.G.: ‘Carrier recombination at silicon-SiNx:H filmsinterfaces fabricated by plasma-enhanced chemical vapor deposition’, J. Appl. Phys., 1999, 85, pp. 3626–3633 (doi: 10.1063/1.369725).
11. 11)
  - 19. Du, G., Zhang, Y., Li, W., et al: ‘Performance enhancement of multicrystalline silicon solar cells and modules using double-layer SiNx:H antireflection coatings’, Prog. Photovolt., Res. Appl., 2015, 23, (12), pp. 1806–1814 (doi: 10.1002/pip.2623).
12. 12)
  - 23. Bustarret, E., Bensouda, M., Habrard, M.C., et al: ‘Configurational statistics in a-SixNyHz alloys: A quantitative bonding analysis’, Phys. Rev. B, 1988, 38, (12), pp. 8171–8184 (doi: 10.1103/PhysRevB.38.8171).
13. 13)
  - 18. Gong, D., Lee, Y.J., Ju, M., et al: ‘Sinx double layer antireflection coating by plasma-enhanced chemical vapor deposition for single crystalline silicon solar cells’, Jpn. J. Appl. Phys., 2011, 50, (8S2), p. 08KE01 (doi: 10.7567/JJAP.50.08KE01).
14. 14)
  - 13. Boden, S.A., Bagnall, D.M.: ‘Optimization of moth-eye antireflection schemes for silicon solar cells’, Prog. Photovolt. Res. Appl., 2010, 18, (3), pp. 195–203 (doi: 10.1002/pip.951).
15. 15)
  - 12. Jia, X., Zhou, C., Tang, Y., et al: ‘Siox (C)/SiNx dual-layer anti-reflectance coating for improving solar cell efficiency’. 2015 IEEE 42nd Photovoltaic Specialist Conf. (PVSC), New Orleans, LA, USA, 2015, pp. 1–4.
16. 16)
  - 25. Robertson, J., Warren, W.L., Kanicki, J.: ‘Nature of the Si and N dangling bonds in silicon nitride’, J. Non-Cryst. Solids, 1995, 187, pp. 297–300 (doi: 10.1016/0022-3093(95)00153-0).
17. 17)
  - 20. Shibata, N.: ‘Plasma-chemical vapor-deposited silicon oxide/silicon oxynitride double-layer antireflective coating for solar cells’, Jpn. J. Appl. Phys., 1991, 30, (Part 1, No. 5), pp. 997–1001 (doi: 10.1143/JJAP.30.997).
18. 18)
  - 9. Huang, Z., Geyer, N., Werner, P., et al: ‘Metal-assisted chemical etching of silicon: a review: in memory of prof. Ulrich Gösele’, Adv. Mater., 2011, 23, (2), pp. 285–308 (doi: 10.1002/adma.201001784).
19. 19)
  - 24. Lelièvre, J.F., Fourmond, E., Kaminski, A., et al: ‘Study of the composition of hydrogenated silicon nitride SiNx:H for efficient surface and bulk passivation of silicon’, Sol. Energy Mater. Sol. Cells, 2009, 93, (8), pp. 1281–1289 (doi: 10.1016/j.solmat.2009.01.023).
20. 20)
  - 2. Balaji, N., Hussain, S.Q., Park, C., et al: ‘Surface passivation schemes for high-efficiency c-Si solar cells-A review’, Trans. Electr. Electron. Mater., 2015, 16, (5), pp. 227–233 (doi: 10.4313/TEEM.2015.16.5.227).
21. 21)
  - 15. Wang, K.X., Yu, Z., Liu, V., et al: ‘Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings’, Nano Lett., 2012, 12, (3), pp. 1616–1619 (doi: 10.1021/nl204550q).
22. 22)
  - 8. Zheng, X.D., Ye, Y.Z., Shen, L.F.: ‘The measurements of spectral reflectance spatial distribution on mc-Si solar cell surface’, Appl. Mech. Mater., 2013, 241, pp. 2184–2187.
23. 23)
  - 14. Aroutiounian, V.M., Martirosyan, K., Soukiassian, P.: ‘Low reflectance of diamond-like carbon/porous silicon double layer antireflection coating for silicon solar cells’, J. Phys. D, Appl. Phys., 2004, 37, (19), p. L25 (doi: 10.1088/0022-3727/37/19/L01).
24. 24)
  - 1. Ju, M., Lee, Y.J., Balaji, N., et al: ‘Industry applicable future texturing process for diamond wire sawed multi-crystalline silicon solar cells: a review’, Current Photovoltaic Res., 2018, 6, (1), pp. 1–11.
25. 25)
  - 22. Ko, J., Gong, D., Pillai, K., et al: ‘Double layer SiNx: H films for passivation and anti-reflection coating of c-Si solar cells’, Thin Solid Films, 2011, 519, (20), pp. 6887–6891 (doi: 10.1016/j.tsf.2011.04.078).

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Design of double-layer SiN _x :H film and its application in c-Si PERC solar cells

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