© The Institution of Engineering and Technology
The acquisition of a high-quality imaging performance by an atomic force microscope is significantly influenced by the motion coupling effect of its key scanning unit, i.e. its piezoelectric tube scanner. In this Letter, to improve its performance, a MIMO model predictive control scheme for reducing this effect is proposed. The proposed controller achieves this by greatly overcoming the problem of tilted characters in the atomic force microscopy (AFM) scanned images. The experimental results are demonstrating the effectiveness of the proposed control technique.
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content/journals/10.1049/mnl.2019.0334
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Compensation of motion coupling effect in AFM imaging