Indium tin oxide coated PET for differential pH-sensing using field-effect transistor based sensor

Indium tin oxide coated PET for differential pH-sensing using field-effect transistor based sensor

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Indium tin oxide (ITO) on polyethylene terephthalate (PET) substrate is characterised in terms of pH-sensitivity. Commercial ITO/PET sheet was cut in a shape of electrode and was connected to the gate-terminal of a metal–oxide–semiconductor field-effect transistor as the sensory part, creating an extended gate field-effect transistor (EGFET) pH-sensor. The quality of laser micromachining as well as the moulded ITO/PET electrode is investigated. The pH-sensitivity and linearity of the sensor signal are studied over time for a single hanging ITO/PET electrode. With the help of a constant-charge amplifier circuitry, the reference electrode, dipped in the measurement cell, is grounded. Therefore, the noise level, coupled into the sensor signal from environment, is decreased and also integration of the second sensor to the measurement cell becomes possible. The pH-measurement is carried out while EGFET pair, immersed into a buffer solution next to a pseudo-reference electrode, is working in differential mode to compensate for the high drift signal rate which is common for this type of sensors. As the result, a very low-cost EGFET-based pH-sensor is achieved based on commercially available products independent of costly cleanroom processes.


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      • 17. Kao, W.-H., Lin, C.-H.: ‘Low-cost pH, temperature and ion concentration sensors utilizing laser machined touch panel film’. 2017 IEEE 12th Int. Conf. on Nano/Micro Engineered and Molecular Systems (NEMS), Los Angeles, CA, USA, 2017, pp. 110113.
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      • 23. Mokhtarifar, N., Goldschmidtboeing, F., Woias, P.: ‘EGFET differential pair with ITO as the extended-gate membrane for pH-sensing’. 2018 IEEE 13th Int. Conf. on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 2018.
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