Wafer-level fabrication of low power consumption integrated alcohol microsensor

Wafer-level fabrication of low power consumption integrated alcohol microsensor

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An integrated alcohol microgas sensor was designed and fabricated based on TiO2/SnO2 nanocomposites acting as a sensing layer and microheater providing working temperature. The stacked TiO2/SnO2 nanocomposites were prepared by magnetron sputtering. A unique suspended membrane consisting of Si3N4/SiO2/Si3N4/SiO2 four layers was prepared by different methods, respectively, and applied in microheater to support the electrodes and sensing layer for reducing power consumption. The fabrication process tackled the difficulty that the sensing layer preparation is incompatible with microelectromechanical systems micromachining technology and realised the mass production of the wafer-level sensor chips with good consistency. The microalcohol sensors showed excellent response characteristics for alcohol (50–600 ppm) detection at low power consumption (39 mW).

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