High sensitivity vanadium–vanadium pentoxide–aluminium metal–insulator–metal diode
- Author(s): Mohamed Abdel-Rahman 1 ; Khaled Issa 2 ; Muhammad F. Zia 3 ; Mohammad Alduraibi 4, 5 ; Mohammad Siraj 1 ; Amr Ragheb 2 ; Saleh Alshebeili 1, 2
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View affiliations
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Affiliations:
1:
Electrical Engineering Department , College of Engineering, King Saud University , P.O. Box 800, Riyadh 11421 , Saudi Arabia ;
2: KACST Technology Innovation Center in Radio frequency and Photonics for the e-Society (RFTONICS), King Saud University , Riyadh 11421 , Saudi Arabia ;
3: Prince Sultan Advanced Technologies Research Institute, King Saud University , P.O. Box 800, Riyadh 11421 , Saudi Arabia ;
4: Department of Physics & Astronomy , College of Science, King Saud University , P.O. Box 2455, Riyadh 11451 , Saudi Arabia ;
5: National Center for Applied Physics, King Abdulaziz City for Science and Technology , Riyadh 11442 , Saudi Arabia
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Affiliations:
1:
Electrical Engineering Department , College of Engineering, King Saud University , P.O. Box 800, Riyadh 11421 , Saudi Arabia ;
- Source:
Volume 13, Issue 5,
May
2018,
p.
680 – 683
DOI: 10.1049/mnl.2017.0728 , Online ISSN 1750-0443
This work reports on the fabrication of an improved sensitivity metal–insulator–metal (MIM) diode. They devise an asymmetric structure diode that cascades vanadium, vanadium pentoxide, and aluminium (V–V2O5–Al) thin film layers. The MIM diode is fabricated using electron-beam lithography, sputter deposition and metal liftoff techniques. X-ray photoelectron spectroscopy analysis is performed to determine the phase composition of the V2O5 insulating thin film. Electrical characterisation of the fabricated V–V2O5–Al shows a clear high sensitivity at −316 mV that reaches −8.52 V−1 with a dynamic resistance of 5.024 kΩ.
Inspec keywords: vanadium compounds; insulating thin films; vanadium; sputter deposition; X-ray photoelectron spectra; electron beam lithography; aluminium; thin film devices; MIM devices; semiconductor diodes
Other keywords: metal liftoff techniques; voltage -8.52 V; electron-beam lithography; high sensitivity vanadium–vanadium pentoxide–aluminium metal–insulator–metal diode; voltage -316.0 mV; dynamic resistance; X-ray photoelectron spectroscopy analysis; MIM diode; electrical characterisation; sputter deposition; insulating thin film; V-V2O5-Al; asymmetric structure diode
Subjects: Lithography (semiconductor technology); Junction and barrier diodes; Sputter deposition
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