http://iet.metastore.ingenta.com
1887

Fabrication of piezoelectric vibration energy harvester using coatable PolyVinylidene DiFluoride and its characterisation

Fabrication of piezoelectric vibration energy harvester using coatable PolyVinylidene DiFluoride and its characterisation

For access to this article, please select a purchase option:

Buy article PDF
$19.95
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Micro & Nano Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

A cantilever-type vibration energy harvester (VEH) made of PolyVinylidene DiFluoride (PVDF) was fabricated and characterised. PVDF is one of polymer piezoelectric material, which is more flexible than ceramic-based piezoelectric materials such as lead zirconate titanate. Since PVDF dissolves in organic solvent, it is coatable on substrate or parts, making it compatible with micro electro mechanical systems process. The fabrication process of VEH is as follows: a PVDF film (thickness: 30 µm) was coated on a phosphor bronze rectangular plate (length: 35 mm, width: 15 mm, thickness: 0.1 mm) by bar-coating method, followed by polarisation by corona discharge method. Aluminium top electrode (length: 30 mm, width: 10 mm, thickness: 0.3 μm) was deposited on the PVDF film by DC sputtering. One end of the plate was clamped by a fixture to form a cantilever, the length of which is 25 mm. Finally, a proof mass (m = 0.2 g) was attached to the free end of cantilever. Output power P at resonant frequency (= 55 Hz) was measured as a function of load resistance R, in which acceleration was set to 17 m/s2. Maximum output of 4.3 µW was achieved at R = 2.1 MΩ, which is not inferior to those of reported VEHs using ceramic piezoelectric materials.

References

    1. 1)
    2. 2)
      • 2. Matsumoto, K., Saruwatari, K., Suzuki, Y.: ‘Vibration- powered battery-less sensor node using MEMS electret generator’, Digest Tech. PowerMEMS, 2011, 11, pp. 134137.
    3. 3)
    4. 4)
    5. 5)
    6. 6)
      • 6. Tsujiura, Y., Adachi, K., Kanno, I.: ‘Piezoelectric MEMS energy harvesters of PZT thin films on stainless steel cantilevers’, PowerMEMS’, 2012, 12, pp. 500503.
    7. 7)
      • 7. Kanno, I., Morimoto, K., Wasa, K., et al: ‘Energy harvester of c-axis oriented epitaxial PZT films on stainless steel sheets’. IEEJ Sensors Micromachines, 2009, pp. 594597.
    8. 8)
      • 8. Kanno, I., Sagawa, K., Oka, R., et al: ‘Piezoelectric energy harvesters of PZT films deposited on titanium cantilevers’, Power MEMS’, 2010, 10, pp. 379382.
    9. 9)
      • 9. Kanno, I., Kotera, H., Shibata, K., et al: ‘Characterization of vibration energy harvesters composed of piezoelectric thin films’. Jpn Soc. Mech. Eng. Micro-Nano Sci. Technol. Div., 2011, pp. 2627.
    10. 10)
      • 10. Tsujiura, Y., Suwa, E., Kurokawa, F., et al: ‘Reliability of vibration energy harvesters of metal-based PZT thin films’, Power MEMS’, 2014, 14, p. 557.
    11. 11)
    12. 12)
    13. 13)
    14. 14)
    15. 15)
    16. 16)
    17. 17)
      • 17. Liu, W., Han, M., Sun, X., et al: ‘Fabrication of spiral-shaped PVDF cantilever based vibration energy harvester’. Proc. IEEE, Nano/Micro Engineered and Molecular Syst., 2014, pp. 458461.
    18. 18)
    19. 19)
      • 19. Hakko co., Ltd.: available at http://www.hakko.co.jp/qa/qakit/html/h01100.htm.
    20. 20)
    21. 21)
      • 21. Measurement Specialties Inc.: ‘Piezo film sensors, technical manual.’, Available at http://www.meas-spec.com.
    22. 22)
    23. 23)
    24. 24)
      • 24. Jain, A., Rashmi, P.N., Kumar, J., et al: ‘Dielectric behaviour of PVDF thin films’, Indian J. Adv. Chem. Sci., 2014, 2, (3), pp. 212216.
    25. 25)
    26. 26)
    27. 27)
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2017.0128
Loading

Related content

content/journals/10.1049/mnl.2017.0128
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address