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access icon openaccess Flexible capacitive pressure sensor based on multi-walled carbon nanotube electrodes

Flexible pressure sensors offer the advantages of flexibility, low cost, and easy to large area fabrication, and they have wide applications in many fields. This work proposes a flexible capacitive pressure sensor that exhibits a sandwich-like structure, a good performance, and a simple process. Multi-walled carbon nanotube (MWNT) is used to fabricate the two electrodes of the sensor because this low cost material possesses good mechanical and electronic properties. Meanwhile, MWNT naturally forms numerous micro–nano structures that can enhance the sensitivity of a sensor. In addition, the dielectric layer of the sensor composed of parylene C (poly(chloro-p-xylylene)) is sandwiched between the two electrodes. The experimental results show that the pressure sensor demonstrates high sensitivity and a rapid response. The average sensitivity is 1.33 kPa–1 at a pressure that ranges from 0 to 758 Pa and the response time reach to millisecond level. Given that low cost, good property and simple process, the sensor has wide application prospects in electronic skins, health monitoring devices, and other wearable electronic products.

http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2016.0529
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content/journals/10.1049/mnl.2016.0529
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