Spray coating of polymer electret with polystyrene nanoparticles for electrostatic energy harvesting

Yixin Xu; Anxin Luo; Ai Zhang; Yulong Zhang; Bin Tang; Kai Wang; Fei Wang

Spray coating of polymer electret with polystyrene nanoparticles for electrostatic energy harvesting

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Author(s): Yixin Xu ¹ ; Anxin Luo ¹ ; Ai Zhang ^{1, 2} ; Yulong Zhang ^{1, 2} ; Bin Tang ³ ; Kai Wang ^{1, 2} ; Fei Wang ^{1, 2}
- Affiliations: 1: Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, People's Republic of China ;
  2: Shenzhen Key Laboratory of 3rd Generation Semiconductor Devices, Southern University of Science and Technology, Shenzhen 518055, People's Republic of China ;
  3: Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, People's Republic of China
Source: Volume 11, Issue 10, October 2016, p. 640 – 644
DOI: 10.1049/mnl.2016.0336 , Online ISSN 1750-0443

Received 23/05/2016, Accepted 18/08/2016, Revised 17/08/2016, Published 01/10/2016

A spray-coating method for cyclic olefin copolymer (COC) electret material with polystyrene (PS) nanoparticles is developed here. Compared with the traditional polymer electret materials, the COC electrets with PS nanoparticles achieved better surface charge stability when exposed to harsh environment at high humidity or high temperature. With the spray coating technique, they can easily control the thickness of the electret layer. The surface charge stability of the electret has been detailed studied with various concentrations of the nanoparticles. They have also applied the spray coated electret to electrostatic energy harvesting devices. The experiments confirmed that the energy harvesting devices can generate more stable power output using the spray coated electret with nanoparticles.

References

1. 1)
  - 2. Mitsuya, H., Ashizawa, H., Sugiyama, T., et al: ‘Electret-based low power resonator for robust pressure sensor’. Proc. of IEEE MEMS 2014, 26–30 January 2014, pp. 717–720.
2. 2)
  - 6. Crovetto, A., Wang, F., Triches, M., et al: ‘MEMS fabricated energy harvesting device with 2D resonant structure’. The 12th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2012), Oral Presentation, 2–5 December 2012.
3. 3)
  - 7. Bu, L., Wu, X., Wang, X., et al: ‘Non-resonant electrostatic energy harvester for wideband applications’, IET Micro Nano Lett., 2013, 8, (3), pp. 135–137 (doi: 10.1049/mnl.2012.0924).
4. 4)
  - 12. Suzuki, Y.: ‘Recent progress in MEMS electret generator for energy harvesting’, IEEJ Trans. Electr. Electron. Eng., 2011, 6, pp. 101–111 (doi: 10.1002/tee.20631).
5. 5)
  - 13. Kashiwagi, K., Okano, K., Miyajima, T., et al: ‘Nano-cluster-enhanced high-performance perfluoro-polymer electrets for energy harvesting’, J. Micromech. Microeng., 2011, 21, (12), p. 125016 (doi: 10.1088/0960-1317/21/12/125016).
6. 6)
  - 1. Ko, W.C., Tseng, C.K., Leu, I.Y., et al: ‘Use of 2-(6-mercaptohexyl) malonic acid to adjust the morphology and electret properties of cyclic olefin copolymer and its application to flexible loudspeakers’, Smart Mater. Struct., 2010, 19, p. 055007 (doi: 10.1088/0964-1726/19/5/055007).
7. 7)
  - 15. Gerhard-Multhaupt, R., Kunstler, W., Gome, T., et al: ‘Porous PTFE space-charge electrets for piezoelectric applications’, IEEE Trans. Dielectr. Electr. Insul., 2000, 7, (4), pp. 480–488 (doi: 10.1109/94.868065).
8. 8)
  - 23. Li, S., Crovetto, A., Peng, Z., et al: ‘Bi-resonant structure with piezoelectric PVDF films for energy harvesting from random vibration sources at low frequency’, Sens. Actuators A, Phys., 2016, 247, pp. 547–554 (doi: 10.1016/j.sna.2016.06.033).
9. 9)
  - 22. Li, S., Peng, Z., Zhang, A., et al: ‘Dual resonant structure for energy harvesting from random vibration sources at low frequency’, AIP Adv., 2016, 6, p. 015019 (doi: 10.1063/1.4941353).
10. 10)
  - 20. Triches, M., Wang, F., Crovetto, A., et al: ‘A MEMS energy harvesting device for vibration with low acceleration’. The 26th European Conf. on Solid-State Transducers (Eurosensors 2012), 9–12 September 2012, pp. 770–773.
11. 11)
  - 25. Yang, Z., Halvorsen, E., Dong, T.: ‘Electrostatic energy harvester employing conductive droplet and thin-film electret’, J. Microelectromech. Syst., 2013, 23, pp. 315–323 (doi: 10.1109/JMEMS.2013.2273933).
12. 12)
  - 17. Liu, S.W., Shen, Z.Y., Lye, S.W., et al: ‘Stable micro sized electret array produced by localised charging using a silicon shadow mask’, IET Micro Nano Lett., 2012, 7, (11), pp. 1094–1096 (doi: 10.1049/mnl.2012.0639).
13. 13)
  - 14. Xu, Y., Luo, A., Zhang, A., et al: ‘Spray coating of polymer electret with nano particles for stable surface charge’. Proc. of IEEE NEMS 2016, B2L-B-3, Sendai, 17–21 April 2016.
14. 14)
  - 18. Wang, F., Hansen, O.: ‘Invisible surface charge pattern on inorganic electrets’, IEEE Electron Device Lett., 2013, 34, (8), pp. 1047–1049 (doi: 10.1109/LED.2013.2269991).
15. 15)
  - 10. Crovetto, A., Wang, F., Hansen, O.: ‘Modeling and optimization of an electrostatic energy harvesting device’, J. Microelectromech. Syst., 2014, 23, (5), pp. 1141–1155 (doi: 10.1109/JMEMS.2014.2306963).
16. 16)
  - 16. Wang, F., Bertelsen, C., Skands, G., et al: ‘Reactive ion etching of polymer materials for an energy harvesting device’, Microelectron. Eng., 2012, 97, pp. 227–230 (doi: 10.1016/j.mee.2012.03.016).
17. 17)
  - 3. She, X., Liu, J., Zhang, J., et al: ‘Spatial profile of charge storage in organic field-effect transistor nonvolatile memory using polymer electrets’, Appl. Phys. Lett., 2013, 103, p. 143302 (doi: 10.1063/1.4824213).
18. 18)
  - 24. Wang, F., Hansen, O.: ‘Electrostatic energy harvesting device with out-of-plane gap closing scheme’. The 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), 16–20 June 2013, pp. 2237–2240.
19. 19)
  - 5. Suzuki, Y.: ‘Development of a MEMS energy harvester with high-performance polymer electrets’. Proc. PowerMEMS, 2010, pp. 47–52.
20. 20)
  - 19. Leonov, V., Fiorini, P., Van Hoof, C.: ‘Stabilization of positive charge in SiO2/Si3N4 electrets’, IEEE Trans. Dielectr. Electr. Insul., 2006, 13, (5), pp. 1049–1056.
21. 21)
  - 11. Wang, F., Hansen, O.: ‘Electrostatic energy harvesting device with out-of-the-plane gap closing scheme’, Sens. Actuators A, Phys., 2014, 211, pp. 131–137 (doi: 10.1016/j.sna.2014.02.027).
22. 22)
  - 4. Lo, H., Tai, Y.C.: ‘Parylene-based electret power generators’, J. Micromech. Microeng., 2008, 18, (10), p. 104006 (doi: 10.1088/0960-1317/18/10/104006).
23. 23)
  - 8. Crovetto, A., Wang, F., Hansen, O.: ‘An electret-based energy harvesting device with a wafer-level fabrication process’, J. Micromech. Microeng., 2013, 23, (11), p. 114010 (doi: 10.1088/0960-1317/23/11/114010).
24. 24)
  - 9. Paracha, A.M., Basset, P., Galayko, D., et al: ‘A silicon MEMS DC/DC converter for autonomous vibration-to-electrical-energy scavenger’, IEEE Electron Device Lett., 2009, 30, (5), pp. 481–483 (doi: 10.1109/LED.2009.2015780).
25. 25)
  - 21. Pham, N.P., Burghartz, J.N., Sarro, P.M.: ‘Spray coating of photoresist for pattern transfer on high topography surfaces’, J. Micromech. Microeng., 2005, 15, pp. 691–697 (doi: 10.1088/0960-1317/15/4/003).

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Spray coating of polymer electret with polystyrene nanoparticles for electrostatic energy harvesting

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