Processing of graphene into a cantilever beam structure using a focused ion beam

Kazuma Matsui; Yusuke Takei; Akira Inaba; Tomoyuki Takahata; Kiyoshi Matsumoto; Isao Shimoyama

Processing of graphene into a cantilever beam structure using a focused ion beam

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Author(s): Kazuma Matsui ¹ ; Yusuke Takei ¹ ; Akira Inaba ¹ ; Tomoyuki Takahata ¹ ; Kiyoshi Matsumoto ² ; Isao Shimoyama ¹
- Affiliations: 1: Department of Mechano-Informatics, The University of Tokyo, Tokyo, Japan 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan ;
  2: Department of Mechanical Engineering, Faculty of Science and Engineering, Toyo University, 2100 Kujirai, Kawagoe-shi, Saitama 350-8585, Japan
Source: Volume 11, Issue 11, November 2016, p. 670 – 674
DOI: 10.1049/mnl.2016.0198 , Online ISSN 1750-0443

Received 26/04/2016, Accepted 29/06/2016, Revised 27/06/2016, Published 01/11/2016

A graphene cantilever beam of arbitrary shape by patterning suspended graphene using a focused ion beam (FIB) is fabricated. Suspended graphene was formed by transferring graphene over a trench structure and patterned the suspended graphene into a cantilever beam structure. When the suspended graphene is patterned by an FIB, the high-ion irradiation of FIB deforms the shape of the cantilever beam; in contrast, low-ion irradiation cannot penetrate the suspended graphene. An evaluation of the ion irradiation dose of the FIB and the damages caused to the suspended graphene confirmed that in the case of few-layer graphene with a maximum of three layers, optimum processing can be performed by an ion irradiation of 6 × 10¹⁶ ions/cm². Under this condition, a graphene cantilever beam with a width of 1.34 μm and a length of 2.13 μm could be fabricated. Furthermore, the Raman spectroscopy results indicate that the FIB process does not significantly change the properties of the graphene.

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Processing of graphene into a cantilever beam structure using a focused ion beam

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