© The Institution of Engineering and Technology
Radio-frequency (RF) attenuators show unique advantages and a great development potential in phased array radars. A kind of programmable step attenuators with high precision based on contact-type microelectromechanical system series switches is proposed herein. This work paid attention to the design and fabrication of switches – the key components of attenuators. By setting up vent holes on the pull-down plates of switches, the mass of plates was reduced, together with the decreased influence of air damping. Meanwhile, switches were manufactured and packaged through ultraviolet lithography (UV-LIGA) technology with the S parameter test being performed. Results showed that the insertion loss in a range of 0.3 and 1.8 dB under the condition that attenuation modules are short-circuited at the same time, which is basically the same with the simulation results of 0.1–1.3 dB. While all the return losses S11 were <15 dB expect from that at 10 dB. In addition, the designed attenuator showed gentle attenuation in a range of DC ∼20 GHz. However, on the whole, the deviation is controlled within 2 dB, which is basically consistent with the design results of 1 dB. It can be found from the obtained results that all indices of the attenuator satisfied the design requirements.
References
-
-
1)
-
12. He, X.J., Lv, Z.Q., Liu, B., et al: ‘High-isolation lateral RF MEMS capacitive switch based on HfO2 dielectric for high frequency applications’, Sens. Actuators A, Phys., 2012, 188, pp. 342–348 (doi: 10.1016/j.sna.2012.03.013).
-
2)
-
4. Ausanio, G., Iannotti, V., Ricciardi, E., et al: ‘Potentiality of a novel elastomagnetic attenuator for vibration control’, Sens. Actuators A, Phys., 2010, 159, pp. 219–226 (doi: 10.1016/j.sna.2010.03.023).
-
3)
-
5. Pozo-Gonzalo, C., Mecerreyes, D., Pomposo, J.A., et al: ‘All-plastic electrochromic devices based on PEDOT as switchable optical attenuator in the near IR’, Sol. Energy Mater. Sol. Cells, 2008, 92, pp. 101–106 (doi: 10.1016/j.solmat.2007.03.031).
-
4)
-
14. Angira, M., Rangra, K.: ‘A novel design for low insertion loss, multi-band RF-MEMS switch with low pull-in voltage’, Eng. Sci. Technol. Int. J., 2016, 19, pp. 171–177 (doi: 10.1016/j.jestch.2015.07.001).
-
5)
-
15. Abhilash, P., Sebastian, M.T., Surendran, K.P.: ‘Structural, thermal and dielectric properties of rare earth substituted eulytite for LTCC applications’, J. Eur. Ceram. Soc., 2016, 36, pp. 1939–1944 (doi: 10.1016/j.jeurceramsoc.2016.02.019).
-
6)
-
11. Yoshida, M., Matsumoto, H., Shintake, T., et al: ‘High-power microwave attenuator employing slow wave structure’, Nucl. Instrum. Methods Phys. Res. A, Accel. Spectrom. Detect. Assoc. Equip., 2012, 693, pp. 6–10 (doi: 10.1016/j.nima.2012.06.001).
-
7)
-
1. Boria, S., Pettinari, S., Giannoni, F., et al: ‘Analytical and numerical analysis of composite impact attenuators’, Compos. Struct..
-
8)
-
13. Tang, M., Yu, A.B., Liu, A.Q., et al: ‘High isolation X-band MEMS capacitive switches’, Sens. Actuators A, Phys., 2005, 120, pp. 241–248 (doi: 10.1016/j.sna.2004.11.026).
-
9)
-
9. Cáceres-Vélez, P.R., Fascineli, M.L., Yate, L., et al: ‘Humic acid: a natural attenuator of toxicity of silver nanoparticles in zebrafish embryos’, Toxicol. Lett., 2015, 238, p. S205.
-
10)
-
8. Cuong, N.D., Kim, D.-J., Kang, B.-D., et al: ‘Structural and electrical characterization of tantalum nitride thin film resistors deposited on AlN substrates for π-type attenuator applications’, Mater. Sci. Eng., B, 2006, 135, pp. 162–165 (doi: 10.1016/j.mseb.2006.08.057).
-
11)
-
2. Zhang, Y., Zhuang, Y., Li, Z., et al: ‘A 5-bit lumped 0.18 μm CMOS step attenuator with low insertion loss and low phase distortion in 3–22 GHz applications’, Microelectron. J., 2014, 45, pp. 468–476 (doi: 10.1016/j.mejo.2014.02.013).
-
12)
-
7. Syms, R.R.A., Zou, H., Stagg, J., et al: ‘MEMS variable optical attenuator with a compound latch’, Microelectron. Eng., 2004, 73–74, pp. 423–428 (doi: 10.1016/S0167-9317(04)00180-7).
-
13)
-
3. Askari, M., Kaabi, H., Kavian, Y.S.: ‘A switched T-attenuator using 0.18 μm CMOS optimized switches for DC-20 GHz’, AEU-Int. J. Electron. Commun., 2015, 69, pp. 1760–1765 (doi: 10.1016/j.aeue.2015.08.016).
-
14)
-
6. Gao, F., Ouyang, X., Yang, H., et al: ‘A novel pulsation attenuator for aircraft piston pump’, Mechatronics, 2013, 23, pp. 566–572 (doi: 10.1016/j.mechatronics.2013.05.004).
-
15)
-
10. Reiner, B., Wang, W., Liu, J., et al: ‘Platelet-activating factor attenuation of long-term potentiation in rat hippocampal slices via protein tyrosine kinase signaling’, Neurosci. Lett., 2016, 615, pp. 83–87 (doi: 10.1016/j.neulet.2016.01.033).
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2016.0191
Related content
content/journals/10.1049/mnl.2016.0191
pub_keyword,iet_inspecKeyword,pub_concept
6
6