Design and realisation of radio-frequency attenuators based on microelectromechanical system switches

Xueli Nan; Binzhen Zhang; Xin Yang; Shaolei Ge

Design and realisation of radio-frequency attenuators based on microelectromechanical system switches

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Author(s): Xueli Nan ¹ ; Binzhen Zhang ¹ ; Xin Yang ¹ ; Shaolei Ge ¹
- Affiliations: 1: Science and Technology on Electronic Test and Measurement Laboratory, North University of china, Taiyuan 030051, People's Republic of China
Source: Volume 11, Issue 11, November 2016, p. 702 – 706
DOI: 10.1049/mnl.2016.0191 , Online ISSN 1750-0443

Received 17/04/2016, Accepted 06/07/2016, Revised 14/06/2016, Published 01/11/2016

Radio-frequency (RF) attenuators show unique advantages and a great development potential in phased array radars. A kind of programmable step attenuators with high precision based on contact-type microelectromechanical system series switches is proposed herein. This work paid attention to the design and fabrication of switches – the key components of attenuators. By setting up vent holes on the pull-down plates of switches, the mass of plates was reduced, together with the decreased influence of air damping. Meanwhile, switches were manufactured and packaged through ultraviolet lithography (UV-LIGA) technology with the S parameter test being performed. Results showed that the insertion loss in a range of 0.3 and 1.8 dB under the condition that attenuation modules are short-circuited at the same time, which is basically the same with the simulation results of 0.1–1.3 dB. While all the return losses S11 were <15 dB expect from that at 10 dB. In addition, the designed attenuator showed gentle attenuation in a range of DC ∼20 GHz. However, on the whole, the deviation is controlled within 2 dB, which is basically consistent with the design results of 1 dB. It can be found from the obtained results that all indices of the attenuator satisfied the design requirements.

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Design and realisation of radio-frequency attenuators based on microelectromechanical system switches

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