access icon free Design of a high-speed electrothermal linear micromotor for microelectromechanical systems safety-and-arming devices

© The Institution of Engineering and Technology
Received 19/03/2016, Accepted 27/06/2016, Revised 27/06/2016, Published 01/11/2016

The design, fabrication and characterisation of a high-speed electrothermal linear micromotor for microelectromechanical systems safety-and-arming devices are presented. The micromotor consists of a microspring, a barrier plate and four V-shaped electrothermal actuators with microlever amplifications. The whole device is fabricated on a silicon-on-insulator wafer with a 50 µm device layer and the fabrication process is introduced. The micromotor has been successfully operated at a speed of 35.66 mm/s over a range of 500 µm with an output force of 5.27 mN under the applied voltage of 23 V. The chip area of the fabricated micromotor is about 19.20 mm2, which means the micromotor can be easily integrated with other microdevices. The linear micromotor performs well in driving force, mechanical strength and working speed, which signifies the proposed device is suitable for safety-and-arming devices.

Inspec keywords: electromechanical actuators; linear motors; springs (mechanical); micromotors; safety devices; silicon-on-insulator

Other keywords: microlever amplifications; voltage 23 V; distance 500 mum; working speed; driving force; high-speed electrothermal linear micromotor; velocity 35.66 mm/s; mechanical strength; microspring; size 50 mum; V-shaped electrothermal actuators; barrier plate; microelectromechanical systems safety-and-arming devices; silicon-on-insulator wafer

Subjects: Linear machines; Micromotors; Design and modelling of MEMS and NEMS devices; Control gear and apparatus

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