access icon free Fracture mechanism of movable part in micro-electro-mechanical systems device based on empirical electron theory

The fracture of movable part is a serious issue in micro-electro-mechanical systems (MEMS) device application. However, its fracture mechanism is not clear yet. The fracture mechanism of movable part based on empirical electron theory (EET) of solids and molecules, in which fracture model is built based on valence electron structure and broken bond of the crystal plane is clarified. Simulation and test results match EET-fracture model quite well with low errors of 8.22 and 5.95%, respectively, which shows a good accuracy among existing fracture models. It is believed that EET-fracture model is quite effective and useful to evaluate movable part function in the research of MEMS devices.

Inspec keywords: electron theory; micromechanical devices; fracture

Other keywords: fracture mechanism; movable part; empirical electron theory; fracture models; MEMS device application; MEMS devices; match EET-fracture model; micro-electro-mechanical systems device; molecules; valence electron structure; broken bond; solids; crystal plane

Subjects: Micromechanics (mechanical engineering); Fracture mechanics and hardness (mechanical engineering)

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