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access icon free Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.

References

    1. 1)
      • 9. Fan, L., Wu, M.C., Choquette, K.D., Crawford, M.H.: ‘Self-assembled microactuated XYZ stages for optical scanning and alignment’. Int. Solid State Sensors and Actuators Conf., Transducers 97, 1997, pp. 319322.
    2. 2)
      • 18. Arevalo, A., Foulds, I.G.: ‘Polyimide thermal micro actuator’. 2014 COMSOL Conf., Cambridge, England.
    3. 3)
      • 19. Arevalo, A., Foulds, I.G.: ‘Parametric study of polyimide-lead zirconate titanate thin film cantilevers for transducer applications’. 2013 COMSOL Conf., Rotterdam, Holland, 2013.
    4. 4)
      • 24. Arevalo, A., Foulds, I.G., ‘MEMS acoustic pixel’. 2014 COMSOL Conf., Cambridge, England, 2014.
    5. 5)
    6. 6)
      • 23. Arevalo, A., Ilyas, S., Conchouso, D., Foulds, I.G.: ‘Simulation of a polyimide based micromirror’. 2014 COMSOL Conf., Boston, USA, 2014.
    7. 7)
    8. 8)
      • 20. Conchouso, D., Arevalo, A., Castro, D., et al: ‘Simulation of SU-8 frequency-driven scratch drive actuators’. 15th Int. Conf. on Computer Modelling and Simulation (UKSim), 2013 UKS, 2013, pp. 803808.
    9. 9)
      • 21. Arevalo, A., Conchouso, D., Castro, D., Jaber, N., Younis, M.I., Foulds, I.G.: ‘Towards a digital sound reconstruction MEMS device: characterization of a single PZT based piezoelectric actuator’. 10th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems NEMS 2015, Xia'an, China, April 2015.
    10. 10)
      • 1. Sameoto, D., Ma, A.H., Parameswaran, M., Leung, A.M.: ‘Assembly and characterization of buckled cantilever platforms for thermal isolation in a polymer micromachining process’. Canadian Conf. on Electrical and Computer Engineering, 2007, pp. 296299.
    11. 11)
    12. 12)
      • 8. Wu, M.C.: ‘Micromachining for optical and optoelectronic systems’, Proc. IEEE, 1997, pp. 18331856.
    13. 13)
    14. 14)
      • 25. Arevalo, A., Byas, E., Conchouso, D., Castro, D., Ilyas, S., Foulds, I.G.: ‘A versatile multi-user polyimide surface micromachining process for MEMS applications’. 10th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, Xia'an, China, April 2015.
    15. 15)
      • 11. Ma, A.H., Leung, A.M.: ‘Three-axis thermal accelerometer based on buckled cantilever microstructure’, IEEE Sensors Conference, 2008, pp. 14921495.
    16. 16)
      • 12. Carreno, A.A.A., Conchouso, D., Zaher, A., Foulds, I., Kosel, J.: ‘Simulation of a low frequency Z-axis SU-8 accelerometer in coventor ware and MEMS+’. 15th Int. Conf. on Computer Modelling and Simulation (UKSim), 2013 UKS, June 2013, pp. 792797.
    17. 17)
      • 2. Arevalo, A., Conchouso, D., Rawashdeh, E., Castro, D., Fould, I.G.: ‘Platform isolation using out-of-plane compliant mechanisms’, 2014, COMSOL ConferenceBoston, USA, Aug 2014.
    18. 18)
    19. 19)
    20. 20)
    21. 21)
    22. 22)
      • 6. Conchouso, D., Arevalo, A., Castro, D., Foulds, I.G.: ‘Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications’. 10th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, Xia'an, China April 2015.
    23. 23)
      • 7. Valencia, M., Atallah, T., Castro, D., et al: ‘Development of untethered SU-8 polymer scratch drive microRobots’. 2011 IEEE 24th Int. Conf. on Micro Electro Mechanical Systems (MEMS), Cancun, January 2011, pp. 12211224.
    24. 24)
    25. 25)
      • 15. Carreño, A.A., Conchouso, D., Foulds, I.G.: ‘Optimized cantilever-to-anchor configurations of buckled cantilever plate structures for transducer applications’, COMSOL, Milan, 2012, 2012.
    26. 26)
      • 28. Castro, D., Arevalo, A., Rawashdeh, E., Dechev, N.: ‘Simulation of a micro-scale out-of-plane compliant mechanism’. 2014 COMSOL Conf., Cambridge, England, 2014.
    27. 27)
      • 4. Carreno, A.A., Byas, E., Foulds, I.G.: ‘μHeater on a buckled cantilever plate for gas sensor applications’. 2012 COMSOL Conf., Milan, Italy, 2012.
    28. 28)
      • 26. Fan, Y., Arevalo, A., Li, H., Foulds, I.G.: ‘Low-cost silicon wafer dicing using a craft cutter’, Microsyst. Technol., 2014, 21, (4), pp. 14111414.
    29. 29)
    30. 30)
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