Fabrication of alumina micromixer with two-dimensional serpentine microchannels by centrifuge-assisted micromoulding

Bo Su; Junhu Meng; Zhaozhu Zhang; Fuyan Liu; Aijun Zhang

Fabrication of alumina micromixer with two-dimensional serpentine microchannels by centrifuge-assisted micromoulding

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Author(s): Bo Su ^{1, 2} ; Junhu Meng ¹ ; Zhaozhu Zhang ¹ ; Fuyan Liu ^{1, 2} ; Aijun Zhang ^{1, 2}
- Affiliations: 1: State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, People's Republic of China ;
  2: University of Chinese Academy of Sciences, Beijing 100039, People's Republic of China
Source: Volume 10, Issue 12, December 2015, p. 703 – 706
DOI: 10.1049/mnl.2015.0091 , Online ISSN 1750-0443

Received 08/03/2015, Accepted 12/08/2015, Revised 11/08/2015, Published 01/12/2015

A two-dimensional (2D) serpentine mixer was made of alumina using centrifuge-assisted micromoulding. Concentrated aqueous alumina slurry was filled into microstructured polydimethylsiloxane micromoulds with the aid of centrifugation to form green micromixers, which were then sintered to obtain the final products. In contrast to the micromixer fabricated by micromoulding (filling without the aid of centrifugation), it is found that using centrifugation significantly improved the structural integrity of the green micromixer. Straight and serpentine microchannels with rectangular cross-sections were precisely fabricated. After sintering at 1600^oC, defect-free alumina micromixer with a relative density of 98.7%, linear shrinkage of about 18%, hardness of 20.9 GPa, flexural strength of 328.2 MPa and roughness of 143.9 nm was attained. The results show that ceramic microdevices with complex-shaped 2D microchannels (with diameters ≤ 100 μm and aspect ratios ≤ 2) can be reliably fabricated by centrifuge-assisted micromoulding.

References

1. 1)
  - 12. Meng, J.H., Loh, N.H., Fu, G., et al: ‘Micro powder injection moulding of alumina micro-channel part’, J. Eur. Ceram. Soc., 2011, 31, (6), pp. 1049–1056 (doi: 10.1016/j.jeurceramsoc.2010.11.034).
2. 2)
  - 17. Holthaus, M.G., Treccani, L., Rezwan, K.: ‘Comparison of micropatterning methods for ceramic surfaces’, J. Eur. Ceram. Soc., 2011, 31, (15), pp. 2809–2817 (doi: 10.1016/j.jeurceramsoc.2011.07.020).
3. 3)
  - 9. Ferraris, E., Reynaerts, D., Lauwers, B.: ‘Micro-EDM process investigation and comparison performance of Al2O3 and ZrO2 based ceramic composites’, CIRP Ann. Manuf. Technol., 2011, 60, (1), pp. 235–238 (doi: 10.1016/j.cirp.2011.03.131).
4. 4)
  - 7. Vasudev, A., Kaushik, A., Jones, K., et al: ‘Prospects of low temperature co-fired ceramic (LTCC) based microfluidic systems for point-of-care biosensing and environmental sensing’, Microfluidics Nanofluidics, 2013, 14, (3–4), pp. 683–702 (doi: 10.1007/s10404-012-1087-3).
5. 5)
  - 6. Newman, S.G., Gu, L., Lesniak, C., et al: ‘Rapid Wolff-Kishner reductions in a silicon carbide microreactor’, Green Chem., 2014, 16, (1), pp. 176–180 (doi: 10.1039/C3GC41942H).
6. 6)
  - 13. Zhang, D., Su, B., Button, T.W.: ‘Micropatterning of fine scale ceramic structures’, J. Mater. Sci., 2002, 37, (15), pp. 3123–3126 (doi: 10.1023/A:1016114513003).
7. 7)
  - 19. Huisman, W., Graule, T., Gauckler, L.J.: ‘Alumina of high reliability by centrifugal casting’, J. Eur. Ceram. Soc., 1995, 15, (9), pp. 811–821 (doi: 10.1016/0955-2219(95)00053-W).
8. 8)
  - 22. Meng, J.H., Loh, N.H., Fu, G., et al: ‘Replication and characterization of 316L stainless steel micro-mixer by micro powder injection molding’, J. Alloys Compd., 2010, 496, (1), pp. 293–299 (doi: 10.1016/j.jallcom.2010.01.147).
9. 9)
  - 11. Bonnas, S., Ritzhaupt-Kleissl, H.J., Haußelt, J.: ‘Electrophoretic deposition for fabrication of ceramic microparts’, J. Eur. Ceram. Soc., 2010, 30, (5), pp. 1159–1162 (doi: 10.1016/j.jeurceramsoc.2009.06.039).
10. 10)
  - 8. Lejeune, M., Chartier, T., Dossou-Yovo, C., et al: ‘Ink-jet printing of ceramic micro-pillar arrays’, J. Eur. Ceram. Soc., 2009, 29, (5), pp. 905–911 (doi: 10.1016/j.jeurceramsoc.2008.07.040).
11. 11)
  - 5. Pedro, S.G., Puyol, M., Alonso-Chamarro, J.: ‘Continuous flow synthesis of nanoparticles using ceramic microfluidic devices’, Nanotechnology, 2010, 21, (41), p. 415603 (doi: 10.1088/0957-4484/21/41/415603).
12. 12)
  - 18. Hassanin, H., Jiang, K.: ‘Fabrication and characterization of stabilised zirconia micro parts via slip casting and soft moulding’, Scr. Mater., 2013, 69, (6), pp. 433–436 (doi: 10.1016/j.scriptamat.2013.05.004).
13. 13)
  - 21. Hakamada, M., Asao, Y., Kuromura, T., et al: ‘Fabrication of copper microchannels by the spacer method’, Scr. Mater., 2007, 56, (9), pp. 781–783 (doi: 10.1016/j.scriptamat.2007.01.014).
14. 14)
  - 10. Bertsch, A., Jiguet, S., Renaud, P.: ‘Microfabrication of ceramic components by microstereolithography’, J. Micromech. Microeng., 2004, 14, (2), pp. 197–203 (doi: 10.1088/0960-1317/14/2/005).
15. 15)
  - 16. Ahn, S.J., Min, J.H., Kim, J., et al: ‘Process mechanism for vacuum-assisted microfluidic lithography with ceramic colloidal suspensions’, J. Am. Ceram. Soc., 2008, 91, (7), pp. 2143–2149 (doi: 10.1111/j.1551-2916.2008.02458.x).
16. 16)
  - 15. Su, B., Zhang, Z.Z., Meng, J.H.: ‘Centrifuge-assisted micromolding of ceramic microparts’, Ceram. Int., 2014, 40, (8), pp. 13735–13739 (doi: 10.1016/j.ceramint.2014.05.021).
17. 17)
  - 1. Nguyen, N.-T., Wu, Z.: ‘Micromixers – a review’, J. Micromech. Microeng., 2005, 15, pp. R1–R16 (doi: 10.1088/0960-1317/15/2/R01).
18. 18)
  - 14. Zhang, D., Su, B., Button, T.W.: ‘Improvements in the structural integrity of green ceramic microcomponents by a modified soft molding process’, J. Eur. Ceram. Soc., 2007, 27, (2), pp. 645–650 (doi: 10.1016/j.jeurceramsoc.2006.04.045).
19. 19)
  - 2. Jensen, K.F., Reizman, B.J., Newman, S.G.: ‘Tools for chemical synthesis in microsystems’, Lab Chip, 2014, 14, (17), pp. 3206–3212 (doi: 10.1039/C4LC00330F).
20. 20)
  - 20. Yu, J.Y., Sun, X.D., Li, Q., et al: ‘Preparation of Al2O3 and Al2O3-ZrO2 ceramic foams with adjustable cell structure by centrifugal slip casting’, Mater. Sci. Eng. A, 2008, 476, (1), pp. 274–280 (doi: 10.1016/j.msea.2007.04.100).
21. 21)
  - 3. Wang, H.Z., Li, X.Y., Uehara, M., et al: ‘Continuous synthesis of CdSe-ZnS composite nanoparticles in a microfluidic reactor’, Chem. Commun., 2004, (1), pp. 48–49 (doi: 10.1039/b310644f).
22. 22)
  - 23. Müller, M., Çetinel, F.A., Rögner, J., et al: ‘Surface state defining factors as key to the strength of ceramic micro parts’, Microsyst. Technol., 2013, 19, (4), pp. 555–561 (doi: 10.1007/s00542-012-1657-z).
23. 23)
  - 4. Ribeiro-Costa, R.M., Cunha, M.R., Gongora-Rubio, M.R., et al: ‘Preparation of protein-loaded-PLGA microspheres by an emulsion/solvent evaporation process employing LTCC micromixers’, Powder Technol., 2009, 190, (1), pp. 107–111 (doi: 10.1016/j.powtec.2008.04.093).

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Fabrication of alumina micromixer with two-dimensional serpentine microchannels by centrifuge-assisted micromoulding

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