access icon free Titanium oxide vertical resistive random-access memory device

Pt/TiO2/Pt vertical resistive random-access memory switching devices were fabricated in a vertical three-dimensional structure by combining conventional photolithography, electron-beam evaporation for electrodes and atomic layer deposition for dielectric layers. The active switching cross-sectional area was ∼0.02 µm2, which is comparable to nanosized devices that require more elaborative fabrication processes. Structural integrity and electrical characteristics of the vertical memory device were analysed by cross-sectional scanning, transmission electron microscopy and current–voltage characteristics.

Inspec keywords: electrical resistivity; electron beam deposition; vacuum deposition; resistive RAM; titanium compounds; photolithography; semiconductor materials; scanning electron microscopy; platinum; transmission electron microscopy; metal-semiconductor-metal structures; atomic layer deposition

Other keywords: dielectric layers; electrodes; vertical resistive random-access memory switching devices; structural integrity; nanosized devices; cross-sectional scanning electron microscopy; electrical characteristics; atomic layer deposition; electron-beam evaporation; transmission electron microscopy; active switching cross-sectional area; photolithography; current-voltage characteristics; vertical three-dimensional structure; Pt-TiO2-Pt

Subjects: Chemical vapour deposition; Lithography (semiconductor technology); Memory circuits; Vacuum deposition

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http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2015.0021
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