http://iet.metastore.ingenta.com
1887

Microresonant accelerometer composed of silicon substrate and quartz double-ended tuning fork with temperature isolator

Microresonant accelerometer composed of silicon substrate and quartz double-ended tuning fork with temperature isolator

For access to this article, please select a purchase option:

Buy article PDF
$19.95
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Micro & Nano Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

A microresonant accelerometer which consists of silicon substrate and a quartz double-ended tuning fork (DETF) is described. A temperature isolator structure on the silicon substrate is designed to decrease the influence of thermal stress on the DETF's tines. Two stiff ends of the quartz DETF are mounted on the proof mass and temperature isolator, respectively. When acceleration is applied, the proof mass will move, inducing the variation of axial stress on the DETF's tines. The resonance frequency of the DETF's tines will change corresponding to the stress, so acceleration can be measured. The DETF is excited by the inherent piezoelectric property of quartz based on the anti-phase in-plane bending model. Both the silicon substrate and the DETF are fabricated by micromachining. The sensor is analysed by finite-element simulation. According to the simulation, the temperature isolator decreases thermal stress by 30.2%. Experimental results show that the resonance frequency of the sensor is 35.2563 kHz and the sensitivity is 8.55 Hz/g, which is in good agreement with analytical calculation.

References

    1. 1)
      • 1. Albert, W.C.: ‘Vibrating quartz crystal beam accelerometer’. 28th Int. Instrumentation Symp., Las Vegas, NV, USA, 1982, pp. 3344.
    2. 2)
    3. 3)
    4. 4)
    5. 5)
    6. 6)
    7. 7)
    8. 8)
      • 8. Kass, W.J., Snow, G.S.: ‘Double-ended tuning fork quartz accelerometer’. Proc. 40th Annual Frequency Control Symp., Philadelphia, PA, USA, 1986, pp. 230236.
    9. 9)
      • 9. Norling, B.L., Cornelius, C.J.: ‘Accelerometer with isolator for common mode inputs’. U.S. patent 4766768, 1988.
    10. 10)
      • 10. Le Traon, O., Janiaud, D., Lecorre, B., Pernice, M., Muller, S., Tridera, J.Y.: ‘Monolithic differential vibrating beam accelerometer within an isolating system between the two resonators’. Proc. IEEE Int. Conf. on Sensors, Irvine, CA, USA, 2005, pp. 648651.
    11. 11)
      • 11. Le Traon, O., Janiaud, D., Pernice, M., Masson, S., Muller, S., Tridera, J.: ‘A new quartz monolithic differential vibrating beam accelerometer’. Proc. IEEE/ION Position Location and Navigation Symp. (PLANS), San Diego, CA, USA, 2006, pp. 615.
    12. 12)
      • 12. Bao, M.: ‘Analysis and design principles of MEMS devices’ (Elsevier, 2005), p. 80.
    13. 13)
      • 13. Bouwstra, S., Geijselaers, B.: ‘On the resonance frequencies of microbridge’. Dig. Tech. Pap. 6th Int. Conf. Solid-State Sensors and Actuators, San Francisco, CA, USA, 1991, pp. 538542.
    14. 14)
    15. 15)
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2014.0265
Loading

Related content

content/journals/10.1049/mnl.2014.0265
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address