Actuators for objective lens positioning are indispensable components for writing and reading data to and from optical storage media. Significant advances in the technical capabilities of microlens actuators for optical heads have been achieved using MEMS technology, enabling miniaturisation and integration of optical data storage systems. In this reported work, a compact silicon-on-glass (SOG) actuator for two-dimensional (2D) positioning of a dispensed polymer microlens is developed by MEMS technology. A wafer-level process for fabrication of the SOG actuator is achieved using anodic bonding, in which a Pyrex wafer was bonded with an ultra-thin silicon wafer. Dispensed polymer microlenses are fabricated and subsequently integrated onto the 2D actuator by an automatic handling system. Typical displacements of about ±28.6 μm in the tracking direction and 3.2 μm in the focusing direction are experimentally characterised. The compact 2D SOG actuator and assembly technology may be particularly useful for expanding the application area for the optical head.

References

1. 1)
  - 5. Wu, M., Hsiao, S., Peng, C., Fang, W.: ‘Development of tracking and focusing micro actuators for dual-stage optical pick-up head’, J. Opt. A, Pure Appl. Opt., 2006, 8, pp. S323–S329 (doi: 10.1088/1464-4258/8/7/S05).
2. 2)
  - 6. Kim, S., Park, J., Park, G., et al: ‘An optical flying head assembly for a small-form-factor plastic disk in PCMCIA-like drive’, Jpn. J. Appl. Phys., 2004, 43, pp. 4752–4758 (doi: 10.1143/JJAP.43.4752).
3. 3)
  - 2. Yoo, S., Ha, J.G., Jin, J.Y., Ji, C.H., Kim, Y.K.: ‘Monolithically integrated glass microlens scanner using a thermal reflow process’, J. Micromech. Microeng., 2013, 23, p. 065012 (doi: 10.1088/0960-1317/23/6/065012).
4. 4)
  - 10. SAM 42 datasheet. Available at http://www.inseto.co.uk/products/amadynesam42.htm.
5. 5)
  - 12. Blu-ray Disc Association. White Paper Blu-ray Disc Format. 1.A Physical Format Specifications for BD-RE. 3rd Edition, Oct. 2010. Available at http://www.blu-raydisc.com/Assets/Downloadablefile/BD-RE_physical_format_specifications-18325.pdf.
6. 6)
  - 1. Bargiel, S., Jia, C., Barański, M., et al: ‘Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses’, Proc. Eng., 2012, 47, pp. 1133–1136 (doi: 10.1016/j.proeng.2012.09.351).
7. 7)
  - 4. Hane, K.: ‘MEMS technologies for optical storage application’. Proc. Int. Symp. Optical Memory, The Japan Society of Applied Physics, Nagasaki, Japan, 2009, pp. 14–15.
8. 8)
  - 8. Li, P., Sasaki, T., Pan, L., Hane, K.: ‘Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer’, Opt. Express, 2012, 20, pp. 627–634 (doi: 10.1364/OE.20.000627).
9. 9)
  - 11. Li, P., Pan, L., Zappe, H.: ‘Compact 3-axis actuator for positioning a polymer microlens in an optical pickup’, J. Microelectromechan. Syst.2013(accepted, DOI: 10.1109/JMEMS.2013.2262599).
10. 10)
  - 3. Wu, M.: ‘Micromachining for optical and optoelectronic systems’, Proc. IEEE, 1997, 85, (11), pp. 1833–1856 (doi: 10.1109/5.649660).
11. 11)
  - 5. Wu, M., Hsiao, S., Peng, C., Fang, W.: ‘Development of tracking and focusing micro actuators for dual-stage optical pick-up head’, J. Opt. A, Pure Appl. Opt., 2006, 8, pp. S323–S329 (doi: 10.1088/1464-4258/8/7/S05).
12. 12)
  - 7. Cheng, H., Hsiao, S., Wu, M., Fang, W.: ‘Integrated tracking and focusing systems of MEMS optical head head’, IEEE Trans. Magn., 2007, 43, pp. 805–807 (doi: 10.1109/TMAG.2006.888420).
13. 13)
  - 9. Li, P., Pan, L., Zappe, H.: ‘Microlens actuator and polymer objective lens for optical pickup’. Proc. SPIE 8782, Shanghai, China, 2013, p. 87820W.

Two-dimensional silicon-on-glass actuator combined with a dispensed polymer microlens

References

Related content