Metal-based piezoelectric energy harvesters by direct deposition of PZT thick films on stainless steel

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Metal-based piezoelectric energy harvesters by direct deposition of PZT thick films on stainless steel

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This study presents a lead zirconate titanate (PZT) energy harvester with stainless steel (SUS 304) substrate the resonance frequency of which is lower than 100 Hz. The PZT thick films had been directly and successfully deposited on SUS substrates by the sol-gel method with a thickness of 4 µm. Then the deposited films were evaluated by the X-ray diffraction method and the scanning electron microscopy method. Energy harvesters were fabricated and their performance was measured under various vibration conditions. Optimal output power and resonant frequency are 15 µW and 89 Hz, respectively, when the devices were tested under 1 g acceleration vibration and connected with a 23 kΩ resistor.

Inspec keywords: sol-gel processing; X-ray diffraction; lead compounds; thick films; scanning electron microscopy; vibrations; energy harvesting; piezoelectric transducers; stainless steel

Other keywords: acceleration vibration; stainless steel; PZT; frequency 89 Hz; X-ray diffraction method; power 15 W; resistance 23 kohm; sol-gel method; metal-based piezoelectric energy harvesters; size 4 m; PZT thick film direct deposition; vibration conditions; SUS 304 substrate; resonance frequency; PZT energy harvester; scanning electron microscopy method

Subjects: Piezoelectric devices; Deposition from liquid phases; Deposition from liquid phases (melts and solutions); Energy harvesting; Energy harvesting

References

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      • Kanno, I., Ichida, T., Kotera, H., Shibata, K., Horikiri, F., Mishima, T.: `Vibration energy harvesters of lead-free (K,Na)NbO', Proc. PowerMEMS, 2011, p. 110–113.
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http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2012.0581
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