Observation of localised vibration modes in a micromechanical oscillator trio with coupling overhang for highly sensitive mass sensing

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Observation of localised vibration modes in a micromechanical oscillator trio with coupling overhang for highly sensitive mass sensing

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The use of vibration mode localisation in arrays of micromechanically coupled, nearly identical beam-shaped resonators, has been studied for ultra-sensitive mass detection and analyte identification. Eigenstate shifts (amplitude change in this work) that are three to four times (compared to a single resonator), and orders (compared to a resonator array) of magnitude greater than corresponding shifts in resonant frequency for an induced mass perturbation are theoretically analysed, as well as considering the geometry of the coupling overhang. A mechanically coupled beam-shaped 3-resonator array was therefore analysed, fabricated and characterised. The experimental results show that bigger amplitude change could be obtained for the two outermost resonators owing to the symmetrical design, which are found to correspond well to the analytical results.

Inspec keywords: micromechanical resonators; vibrational modes; microfabrication

Other keywords: highly sensitive mass sensing; ultrasensitive mass detection; eigenstate shifts; symmetrical design; localised vibration modes; mass perturbation; micromechanical oscillator trio; identical beam-shaped resonators; resonant frequency; micromechanical coupling; mechanically coupled beam-shaped 3-resonator array

Subjects: Fabrication of MEMS and NEMS devices; Micromechanical and nanomechanical devices and systems

References

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      • Chatani, K., Wang, D.F., Ikehara, T., Maeda, R.: `Investigation of vibration mode localization using micromechanically-coupled beam-shaped 3-resonator array for ultra-sensitive mass detection and analyte identification', Digest of the Second Japan-China-Korea Joint Conf. on MEMS/NEMS for Green and Life Innovation, 2011, Jeju Island, Korea, p. 137–138.
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      • Chatani, K., Wang, D.F., Ikehara, T., Maeda, R.: `Amplitude enhancement using vibration mode localization with a single micro-mechanically coupled beam-shaped resonator array', Proc. 13th Int. Conf. on Design, Integration and Packaging of MEMS/MOEMS, Aix-en-Provence, 2011, France, p. 339–343.
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http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2012.0358
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