A novel method of detecting infrared (IR) radiation by tracking resonant frequency of bimaterial resonant sensors is presented. A capacitive bimaterial resonant sensor (BRS) array consisting of 6×6 cells is fabricated by surface sacrificial layer process. The BRSs are packaged and tested not only by optical but also by electrical method. The results indicate that the BRSs exhibit a monotonic frequency response, which is in correspondence with the theoretical prediction by finite element method. The resonant frequency responsivity of the BRS is better than 363 Hz/K by electrical measurement.
Inspec keywords: cantilevers; finite element analysis; infrared detectors
Other keywords:
Subjects: Detection of radiation (bolometers, photoelectric cells, i.r. and submillimetre waves detection); Finite element analysis; Photodetectors
References
-
-
1)
- D. Grbovic , N.V. Lavrik , P.G. Datskos . Uncooled infrared imaging using bimaterial microcantilever arrays. Appl. Phys. Lett.
-
2)
- Y. Zhao , M.Y. Mao , R. Horowitz . Optomechanical uncooled infrared imaging system :design, microfabrication, and performance. J. Microelectromech. Syst. , 136 - 146
-
3)
- T. Cheng , Q.C. Zhang , X.P. Wu , D.P. Chen , B.B. Jiao . Uncooled infrared imaging using a substrate-free focal-plane array. IEEE Electron Device Lett. , 11 , 1218 - 1221
-
4)
- Z.Y. Miao , Q.C. Zhang , D.P. Chen . Uncooled IR imaging using optomechanical detectors. Ultramicroscopy , 610 - 616
-
5)
- M.F. Toy , O. Ferhanoglu , H. Torun , H. Urey . Uncooled infrared thermo-mechanical detector array: design, fabrication and testing. Sens. Act. A , 88 - 94
-
6)
- X.M. Yu , Y.L. Yi , S.L. Ma . Design and fabrication of a high sensitivity focal plane array for uncooled IR imaging. J. Micromech. Microeng.
-
7)
- Zhang, X.: `Uncooled optical readout and resonant IR FPA devices and imaging systems', 2010, , Chinese Academy of Sciences, Dissertation of Institute of Microelectronics.
-
8)
- http://www.polytec.com/int/products/vibration-sensors/single-point-vibrometers/, 2011.
-
9)
- Y.-W. Lin , S. Lee , S.S. Li , Y. Xie , Z. Ren , C.T.C. Nguyen . Series-resonant VHF micromechanical resonator reference oscillators. IEEE J. Solid-State Circuits , 12 , 2477 - 2491
-
10)
- Z. Djurić , D. Randjelović , P. Krstajić , I. Jokić , M. Djukić . Theory of infrared detector based on the microcantilever resonant frequency temperature dependence. Procedia Eng. , 383 - 386
-
11)
- L. Dong , R.F. Yue , L.T. Liu . Fabrication and characterization of integrated uncooled infrared sensor arrays using a-Si thin-film transistors as active elements. J. Microelectromech. Syst. , 1167 - 1177
-
12)
- S.S. Huang , H. Tao , I.-K. Lin , X. Zhang . Development of double-cantilever infrared detectors: fabrication, curvature control and demonstration of thermal detection. Sens. Act. A , 145 - 146
-
13)
- G. Piazza , R. Abdolvand , G.K. Ho , F. Ayazi . Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators. Sens. Act. A , 71 - 78
-
14)
- I.W. Kwon , J.E. Kim , C.H. Hwang , T.S. Kim , Y.S. Lee , H.Ch. Lee . A high fill-factor uncooled infrared detector with thermo-mechanical bimaterial structure. Proc. SPIE
-
15)
- Y. Laghla , E. Scheid . Optical study of undoped, B or P-doped polysilicon. Thin Solid Films , 76 - 73
-
16)
- H.H. Gaber , H. El-Semary , H.H. Ali . Hexagonal shaped microcantilever based IR imaging sensor. ICM , 370 - 373
-
17)
- I. Chasiotis , W.G. Knauss . The mechanical strength of polysilicon films: part 1. The influence of fabrication governed surface conditions. J. Mech. Phys. Solids , 1533 - 1550
-
18)
- Lee, S., Nguyen, C.T.C.: `Mechanically-coupled micromechanical resonator arrays for improved phase noise', IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conf., 2004, Montreal, Canada.
-
19)
- S.R. Hunter , G. Maurer , L.J. Jiang , G. Simelgor . High sensitivity uncooled microcantilever infrared imaging arrays. Proc. SPIE
-
20)
- D.C. Miller , W.L. Hughes , Z.L. Wang , K. Gall , C.R. Stoldt . Mechanical effects of Galvanic corrosion on structural polysilicon. J. Microelectromech. Syst. , 1 , 87 - 101
-
21)
- M.J. Lachut , J.E. Sader . Effect of surface stress on the stiffness of cantilever plates. Phys. Rev. Lett.
-
1)
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