http://iet.metastore.ingenta.com
1887

Realisation of silicon piezoresistive accelerometer with proof mass-edge-aligned-flexures using wet anisotropic etching

Realisation of silicon piezoresistive accelerometer with proof mass-edge-aligned-flexures using wet anisotropic etching

For access to this article, please select a purchase option:

Buy article PDF
$19.95
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Micro & Nano Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

This Letter presents simulation, fabrication and testing of a high-performance quad-beam silicon piezoresistive accelerometer with very low cross-axis sensitivity. Cross-axis sensitivity in piezoresistive accelerometers is an important issue particularly for high-performance applications. In the present Letter, low cross-axis sensitivity is achieved by improving the device stability by placing four flexures in line with the proof mass edges. The accelerometer device is realised in a single-step double-sided bulk micromachining technique using a 5% dual-doped tetra methyl ammonium hydroxide solution as an anisotropic etchant. Test results of four fabricated devices show an average prime-axis sensitivity of 559.5 µV/g/5 V, a maximum cross-axis sensitivity of 0.62% full scale (FS acceleration=13 g) of the prime-axis sensitivity and nonlinearity at a level of 0.5% of FS which are comparatively better than already reported devices and commercially available piezoresistive sensors.

References

    1. 1)
    2. 2)
    3. 3)
    4. 4)
    5. 5)
    6. 6)
    7. 7)
    8. 8)
    9. 9)
    10. 10)
    11. 11)
    12. 12)
    13. 13)
    14. 14)
    15. 15)
    16. 16)
      • A. Ravi Sankar , G.J. Jency , S. Das . Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures. Microsyst. Technol.
    17. 17)
      • http://www.meas-spec.com/product/t_product.aspx?id=2556.
    18. 18)
      • http://www.endevco.com/product/Product.aspx?product_id=68.
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2011.0717
Loading

Related content

content/journals/10.1049/mnl.2011.0717
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address