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An electromagnetic bistable microactuator fabricated on a single wafer is presented. Its overall size is 3×3×1 mm. Tested results show that the bistable state of the device is realised by 5 V voltage pulse and held by the permanent magnet without current. The response time is 0.96 ms with a large displacement of 160 µm.
References
-
-
1)
-
H. Ren ,
E. Gerhard
.
Design and fabrication of a current-pulse-excited bistable magnetic microactuator.
Sens. Actuators A, Phys.
,
259 -
264
-
2)
-
J.W. Judy
.
Microelectromechanical systems (MEMS): fabrication, design and applications.
Smart Mater. Struct.
,
1115 -
1134
-
3)
-
M. Ruan ,
J. Shen ,
C.B. Wheeler
.
Latching micromagnetic relays.
J. Microelectromech. Syst.
,
4 ,
511 -
517
-
4)
-
Y. Wu ,
G. Ding ,
C. Zhang ,
J. Wang ,
S. Mao ,
H. Wang
.
Magnetostatic bistable MEMS switch with electrothermal actuators.
Electron. Lett.
,
15 ,
1074 -
1075
-
5)
-
X.H. Dai ,
G. Ding ,
X.L. Zhao
.
Batch fabricated long throw bi-stable electromagnetic micro-actuator.
Electron. Lett.
,
9 ,
638 -
639
-
6)
-
S. Fu ,
G.F. Ding ,
J. Yao ,
Y. Wang ,
J. Feng
.
Hybrid electromagnetic micro-relay with fast response and bistable operation mode.
Electron. Lett.
,
15 ,
860 -
862
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2011.0572
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content/journals/10.1049/mnl.2011.0572
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