Electromagnetic bistable microactuator fabricated on a single wafer

Access Full Text

Electromagnetic bistable microactuator fabricated on a single wafer

For access to this article, please select a purchase option:

Buy article PDF
£12.50
(plus tax if applicable)
Buy Knowledge Pack
10 articles for £75.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Micro & Nano Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

An electromagnetic bistable microactuator fabricated on a single wafer is presented. Its overall size is 3×3×1 mm. Tested results show that the bistable state of the device is realised by 5 V voltage pulse and held by the permanent magnet without current. The response time is 0.96 ms with a large displacement of 160 µm.

Inspec keywords: permanent magnets; electromagnetic actuators; microactuators

Other keywords: permanent magnet; size 1 mm; voltage 5 V; electromagnetic bistable microactuator; size 3 mm; single wafer

Subjects: Microactuators; Permanent magnets; Electromagnetic device applications; Design and modelling of MEMS and NEMS devices; Fabrication of MEMS and NEMS devices

References

    1. 1)
    2. 2)
    3. 3)
    4. 4)
    5. 5)
    6. 6)
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2011.0572
Loading

Related content

content/journals/10.1049/mnl.2011.0572
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading