Steps to fabricate 3D overhanging nanostructures using focused ion beam

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Steps to fabricate 3D overhanging nanostructures using focused ion beam

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Novel methodologies to overcome some of the difficulties in standard deposition procedures in focused ion beam (FIB) systems to fabricate 3D nanostructures are described. The geometrical restriction put on by the position of electron and ion columns and the precursor gas needles in a conventional FIB chamber, complicates the 3D fabrication process. As case studies, wide vertical walls and overhanging bridge-type structures of tungsten are fabricated. The overhanging bridge-type structure of tungsten can be used as a nanofilament for producing heat within a few micrometre distances. The heat, produced in the filament, is sensed by a tungsten–platinum nanothermocouple fabricated underneath the filament.

Inspec keywords: focused ion beam technology; nanofibres; thermocouples; platinum; ion beam assisted deposition; tungsten; nanofabrication; nanosensors; heat of formation

Other keywords: W-Pt; FIB; tungsten; precursor gas needles; heat-of-formation; nanosensors; deposition procedures; nanofilament; tungsten-platinum nanothermocouple; geometrical restriction; nanofibre; overhanging bridge-type structures; focused ion beam deposition; wide vertical walls; 3D overhanging nanostructures

Subjects: Other thin film deposition techniques; Micromechanical and nanomechanical devices and systems; Microsensors and nanosensors; Methods of nanofabrication and processing; Ion plating and other vapour deposition; Low-dimensional structures: growth, structure and nonelectronic properties; Enthalpies of combustion, reaction and formation; Sensing and detecting devices

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      • J. Orloff , M. Utlaut , L. Swanson . (2003) High resolution focused ion beams: FIB and its applications.
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2011.0376
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