High sensitivity temperature sensor based on a long, suspended single-walled carbon nanotube array

Author(s): Xing Yang ; Zhaoying Zhou ; Fuzhong Zheng ; Ying Wu
DOI: 10.1049/mnl.2010.0005

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Author(s): Xing Yang ^{1, 2} ; Zhaoying Zhou ^{1, 2} ; Fuzhong Zheng ^{1, 3} ; Ying Wu ⁴
- Affiliations: 1: MEMS Laboratory, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, People's Republic of China
  2: The State Key Laboratory of Precision Measurement Technology and Instrumentation, Tsinghua University, Beijing, People's Republic of China
  3: College of Mechanical Engineering, Chongqing University, Chongqing, People's Republic of China
  4: College of Mechanical Engineering, Chongqing University of Science and Technology, Chongqing, People's Republic of China
Source: Volume 5, Issue 2, April 2010, p. 157 – 161
DOI: 10.1049/mnl.2010.0005 , Online ISSN 1750-0443

Considering the electron–phonon scattering mechanisms as well as the number of conduction channels, the long single-walled carbon nanotube (SWCNT) has larger temperature coefficient of resistivity than that of the short SWCNT or that of the multi-walled carbon nanotube (CNT). A tens of micrometres length, suspended SWCNT array-based temperature sensor was proposed, and its fabrication technique was presented. The theoretical analysis and the experimental results showed that the long SWCNT array device had high sensitivity and low power consumption than ordinary platinum thermal resistor. The long SWCNT array sensor also featured a simple and application-oriented process and was easier to use than a single CNT-based device. Thus, it has the potential to be applied in high sensitivity temperatures or flow measurements in an ultra small scale.

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High sensitivity temperature sensor based on a long, suspended single-walled carbon nanotube array

High sensitivity temperature sensor based on a long, suspended single-walled carbon nanotube array

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