access icon openaccess Research on the planar-coil linear time grating

This is an open access article published by the IET under the Creative Commons Attribution-NonCommercial-NoDerivs License (http://creativecommons.org/licenses/by-nc-nd/3.0/)
Received 03/10/2018, Accepted 12/10/2018, Published 22/10/2018

This article proposes a planar-coil linear time grating displacement sensor. Compared with the existing magnetic field-type linear time grating, the structure without tooth and slot improves the velocity uniformity of travelling wave magnetic field and the measurement accuracy can be greatly improved. The two-phase excitation coils are arranged to form a plane coil array, and the travelling wave magnetic field is generated after the two-phase orthogonal signals are entered, respectively. Then, the electric travelling wave signal is induced by the pickup coils, and the displacement is obtained after processing. The signal processing circuit is designed to amplify and filter the electric travelling wave signal, and the accuracy experiment is carried out. Result shows that in the range of 240 mm (full-scale), the measurement accuracy can achieve ±0.8 μm.

Inspec keywords: coils; diffraction gratings; displacement measurement

Other keywords: pickup coils; plane coil array; two-phase excitation coils; two-phase orthogonal signals; planar-coil linear time; electric travelling wave signal; travelling wave magnetic field

Subjects: Inductors and transformers; Spatial variables measurement; Spatial variables measurement

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