Behaviour of unimorph ring-shaped piezoelectric actuator in fluidic valve
This article focuses on the behaviour analysis of an unimorph ring-shaped piezoelectric plate that is used as an actuator in a fluidic valve. First, the system modelling is discussed by using the material mechanical properties of the piezoelectric plate and the non-piezoelectric substrate. That is, two differential equations are established for the displacements along the radial and transverse directions. After that, based on the clamped edge conditions, the transverse displacement solution is obtained as an explicit function of the applied voltage. On this basis, the analytical relationship between the transverse displacement and the applied voltage is displayed. Finally, three different voltages are applied to the ring-shaped piezoelectric plate of a fluidic valve. The measured experimental results are almost consistent to the analytical results, which illustrates the validity of the established system model.