access icon openaccess Research on modelling of piezoelectric micro-positioning stage based on PI hysteresis model

Piezopositioning stage is widely used in the field of precision positioning. However, the positioning accuracy of the stage is primarily affected by the hysteresis property and dynamic property. In order to obtain high positioning precision, a mathematical model of the micro-displacement stage needs to be accurately modelled. They take a comprehensive consideration of the hysteresis property and dynamic property of stage and then build a mathematical model by combining these two properties, which can reflect both of the two properties. PI model is adopted to model the hysteresis property, the threshold r is determined by the non-uniform threshold method, and weight coefficient w is firstly identified by fitting the initial curve under the condition of off-line, and then on-line modified when the stage works. Dynamic modelling adopts a second-order system whose parameters of transfer function model are determined by the frequency analysis method. Comparing with the experiment results and the simulation, the maximum error and the mean error of this model are, respectively, 0.124 and 0.061 µm when the positioning range is 10 V. It indicates that this mathematical model of piezopositioning stage can meet the needs of the precision positioning of the micro-displacement stage.

Inspec keywords: transfer functions; displacement control; micropositioning; hysteresis; piezoelectric actuators

Other keywords: positioning accuracy; transfer function model; positioning range; dynamic modelling; nonuniform threshold method; high positioning precision; PI hysteresis model; PI model; piezoelectric micropositioning stage; second-order system; mathematical model; precision positioning; dynamic property; hysteresis property; microdisplacement stage

Subjects: Control system analysis and synthesis methods; Spatial variables control

http://iet.metastore.ingenta.com/content/journals/10.1049/joe.2018.8978
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content/journals/10.1049/joe.2018.8978
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