access icon openaccess Fabrication of Al microtubes by electromigration and controlled etching

Al microtubes were fabricated by electromigration and controlled etching. Samples consisted of thin Al films with slits and discharge holes near the anode. Al atoms accumulated and discharged forming a microwire, which was then etched into a hollow microtube. Al microtubes could be fabricated at predetermined positions, with their lengths dependent on the current supply duration. The outer and inner diameters of the Al microtube could be determined by controlling the size of the etched hole. This technique has potential in the fabrication of other metallic microtubes.

Inspec keywords: sputter etching; microfabrication; electromigration; aluminium; focused ion beam technology; metallic thin films

Other keywords: etching; discharge holes; current supply duration; thin films; Al; hollow microtube; anode; microwire; electromigration; metallic microtubes

Subjects: General fabrication techniques; Surface treatment and degradation of metals and alloys; Thin film growth, structure, and epitaxy; Electromigration in solids

References

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      • 7. Lu, Y., Saka, M.: ‘Fabrication of Al micro-belts by utilizing electromigration’, Mater. Lett., 2009, 63, pp. 19721975.
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      • 8. McAllister, D.V., Cros, F., Davis, S.P., et al: ‘Three-dimensional hollow microneedle and microtube arrays’. Int. Conf. on Solid State Sensors and Actuators, Sendai, Japan, 1999.
http://iet.metastore.ingenta.com/content/journals/10.1049/joe.2016.0162
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