http://iet.metastore.ingenta.com
1887

Diagnostic system to determine the in-service life of dry vacuum pumps

Diagnostic system to determine the in-service life of dry vacuum pumps

For access to this article, please select a purchase option:

Buy article PDF
$19.95
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
IEE Proceedings - Science, Measurement and Technology — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

A diagnostic system for dry pumps is proposed. It predicts future pump motor current from time-series in-situ measurements. The prediction system has been constructed using a data acquisition system with an online system identification software algorithm. A field test on a low pressure chemical vapour deposition (LPCVD) system for the silicon nitride process predicted large values of motor current, some of which correlated well with actual motor currents as the pump became clogged. The combined use of the predicted motor current and the stability criteria shows promise in predicting the actual service life of a dry pump.

Inspec keywords: control engineering computing; electronic engineering computing; time series; maintenance engineering; recursive estimation; life testing; autoregressive moving average processes; identification; stability criteria; vacuum pumps; chemical vapour deposition; data acquisition; integrated circuit manufacture; automatic test software

Other keywords: actual service life; preventive maintenance; in-service life determination; data acquisition system; dry vacuum pumps; semiconductor fabrication facility; ARMAX model; system model; recursive computation; future pump motor current; diagnostic system; time-series in-situ measurements; LPCVD system; online system identification software algorithm; stability criteria

Subjects: Vacuum physics; Testing; Pressure and vacuum control; Other final control equipment; Control applications in the electronics industry; Computerised instrumentation; Plant engineering, maintenance and safety; Surface treatment and coating techniques; Semiconductor industry; Control applications to materials processing; Electronic engineering computing; Production facilities and engineering; Chemical vapour deposition; Control gear and apparatus; Electronics industry; Data acquisition systems for control; Control technology and theory; Production engineering computing; Control engineering computing; Industrial applications of IT; Semiconductor technology; Computerised instrumentation; Instrumentation; Data acquisition systems; Maintenance and reliability

References

    1. 1)
      • H. Wycliffe . Mechanical high-vacuum pumps with an oil-free swept volume. J. Vac. Sci. Technol. , 4 , 2608 - 2611
    2. 2)
      • Konishi, S., Ishida, A., Satoh, T., Yamasawa, K.: `An analytical study of stochastic signal models applied to dry vacuumpump in-service lifeprediction in the ultimate term of non-stationary over loading', VLD98-78, ED98-103, SDM98-139, ICD98-209 (1998-10), Technical Report of IEICE, 1998, p. 39–49, in Japanese.
    3. 3)
      • C.G. Goodwin , K.S. Sin . (1984) Adaptive filtering prediction and control.
    4. 4)
      • L. Ljung . (1999) System identification: theory for the user.
    5. 5)
      • B.T. Poljak , J.Z. Tsypkin . Robust identification. Automatica , 1 , 53 - 63
    6. 6)
      • A. Vieira , T. Kailath . On another approach to the Schur-Cohn criterion. IEEE Trans. Circuits Syst. , 4 , 218 - 220
    7. 7)
      • P.J. Hurber . Robust estimation of a location parameter. Ann. Math. Stat. , 1 , 73 - 101
http://iet.metastore.ingenta.com/content/journals/10.1049/ip-smt_19990654
Loading

Related content

content/journals/10.1049/ip-smt_19990654
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address