Quasi-TE00 singlemode optical waveguides for electro-optical modulation at 1.3 µm using standard SIMOX material
Quasi-TE00 singlemode optical waveguides for electro-optical modulation at 1.3 µm using standard SIMOX material
- Author(s): R. Orobtchouk ; A. Koster ; D. Pascal ; S. Laval
- DOI: 10.1049/ip-opt:19971037
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- Author(s): R. Orobtchouk 1 ; A. Koster 1 ; D. Pascal 1 ; S. Laval 1
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View affiliations
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Affiliations:
1: Institut d'Électronique Fondamentale - CNRS URA 22, Université Paris Sud, 91405 ORSAY cedex, France
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Affiliations:
1: Institut d'Électronique Fondamentale - CNRS URA 22, Université Paris Sud, 91405 ORSAY cedex, France
- Source:
Volume 144, Issue 2,
April 1997,
p.
83 – 86
DOI: 10.1049/ip-opt:19971037 , Print ISSN 1350-2433, Online ISSN 1359-7078
A standard SIMOX substrate with 0.2 µm silicon film can be used for integrated optics. A lateral P+–I–N+ structure in the silicon film is proposed to obtain electro-optical phase modulation by carrier injection. Field confinement is ensured by a rib-loaded geometry. Simulations have been performed to estimate waveguide losses for such 2D-guiding structures suitable for phase modulation. Quasi-singlemode propagation with low losses in the doped regions and low additional loss under injection conditions is predicted.
Inspec keywords: SIMOX; optical losses; optical planar waveguides; optical waveguides; integrated optics; electro-optical modulation; silicon; phase modulation
Other keywords:
Subjects: Metal-insulator-semiconductor structures; Semiconductor doping; Electrical properties of metal-insulator-semiconductor structures; Optical beam modulators; Integrated optics; Optical waveguides; Modulation and coding methods; Electro-optical devices; Optical waveguides and couplers
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