A standard SIMOX substrate with 0.2 µm silicon film can be used for integrated optics. A lateral P+–I–N+ structure in the silicon film is proposed to obtain electro-optical phase modulation by carrier injection. Field confinement is ensured by a rib-loaded geometry. Simulations have been performed to estimate waveguide losses for such 2D-guiding structures suitable for phase modulation. Quasi-singlemode propagation with low losses in the doped regions and low additional loss under injection conditions is predicted.
Inspec keywords: SIMOX; optical losses; optical planar waveguides; optical waveguides; integrated optics; electro-optical modulation; silicon; phase modulation
Other keywords:
Subjects: Metal-insulator-semiconductor structures; Semiconductor doping; Electrical properties of metal-insulator-semiconductor structures; Optical beam modulators; Integrated optics; Optical waveguides; Modulation and coding methods; Electro-optical devices; Optical waveguides and couplers
References
-
-
1)
- R.A. Soref , L. Friedman . Electro-optical modulation in Si1-xGex/Si and relatedheterostructures. Int. J. Optolectron. , 205 - 210
-
2)
- U. Fischer , T. Zinke , B. Schüppert , K. Peterman . Singlemode optical switches based onSOI waveguides with large cross-section. Electron. Lett.
-
3)
- R.A. Soref , J.P. Lorenzo . All silicon active and passive guided-wave components for 1.3and 1.6 µm. IEEE J. Quant. Electron. , 873 - 879
-
4)
- C.K. Tang , G.T. Reed . Highly efficient optical phase modulator in SOI waveguides. Electron. Lett. , 451 - 452
-
5)
- K.L. Wang , R.P.G. Karunasiri . SiGe/Si electronics and optoelectronics. J. Vacuum Sci. Technol. , 1159 - 1167
-
6)
- R.M. Emmons , B.N. Kurdi , D.G. Hall . Buried-oxide silicon-on-insulator structures I:Optical waveguide characteristics. IEEE J. Quantum Electron. , 157 - 163
-
7)
- G.L. Zhou , H. Morkoç . Si/SiGe heterostructures and devices. Thin Solid Films , 125 - 141
-
8)
- E.D. Palik . (1985) Handbook of optical constant of solids.
-
9)
- T. Tamir . (1990) Guided-wave optoelectronics.
-
10)
- A.J. Auberton-Hervé , J.M. Lamure , T. Barge , M. Bruel , B. Aspar , J.L. Pelloie . SOI materials for ULSI applications. Semicond. Int. , 97 - 104
-
11)
- C.K. Tang , G.T. Reed , A.J. Walton , A.G. Rickman . Low-loss, single-mode optical phase modulator in SIMOX material. IEEE J. Lightw. Technol. , 1394 - 1400
-
12)
- R.A. Soref . Silicon-based optoelectronics. Proc. IEEE , 1687 - 1706
-
13)
- Thienpont, H., Peiffer, W., Veretennicoff, I., De Tandt, C., Ranson, W., Vounckx, R., Koster, A.: `SIMOX multifunctional optical switches for smart pixel arrays', Proceedings of CLEO, 1994, Amsterdam, Pays-Bas, p. 351.
-
14)
- A.W. Snyder , J.D. Love . (1983) Optical waveguide theory.
-
15)
- R.A. Soref , E. Cortesi , F. Namavar , L. Friedman . Vertically integrated silicon-on-insulatorwaveguides. IEEE Photonics Technol. Lett. , 22 - 24
-
16)
- D. Pascal , R. Orobtchouk , A. Layadi , A. Koster , S. Laval . Optimised coupling of agaussian beam into an optical waveguide using a grating coupler: comparison of experimentaland theoretical results. Appl. Opt.
-
17)
- Orobtchouk, R.: `Modélisation et étude de composants pour l'optique intégréesilicium surisolant (SIMOX) à λ = 1,3 µm', 1996, Thèse de doctorat 4106, , Orsay.
-
18)
- A. Layadi, private communication.
-
19)
- Vonsovici, A.: `Structures à guides d'ondes optiques silicium sur isolant (SIMOX)etSi', 1996, Thèse de doctorat 4507, , Orsay.
-
1)
Related content