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Microcomputer-aided interface-state analysis

Microcomputer-aided interface-state analysis

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© The Institution of Electrical Engineers
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A semiautomatic measurement system has been developed for evaluating the electronic structure of the interface between an insulator and a semiconductor. The associated microcomputer possesses advanced software which leads to simple operation particularly when used in a real-time mode. An attractive feature of the technique is that admittance data are evaluated in the voltage domain using a modified version of the Simonne method. The Si-SiO2 junction has been used to demonstrate this novel approach although it is equally applicable to other semiconductor-insulator structures.

Inspec keywords: measurement systems; computerised instrumentation; computer aided analysis; semiconductor-insulator boundaries; interface electron states

Other keywords: admittance data; semiautomatic measurement system; microcomputer aided interface state analysis; Si-SiO2 junction; semiconductor insulator boundaries; voltage domain

Subjects: Electrical properties of metal-insulator-semiconductor structures; Electronic states (surfaces and interfaces); Metal-insulator-semiconductor structures; Electrical instruments and techniques; Computerised instrumentation; Electronic engineering computing

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