Flat panel X-ray imagers using amorphous silicon active matrix addressing have been introduced to the medical imaging market at sizes up to 40×40 cm and with up to 10 million pixels. Some new technology developments, which can further increase the performance of these devices, are described. High atomic number polycrystalline X-ray photoconductors can operate near the theoretical sensitivity and at reasonably low bias voltages. The higher sensitivity obtained in HgI2 allows single-photon detection, which opens up new imaging opportunities. Another approach to improve sensitivity is to integrate an amplifier at the pixel level, which requires laser-recrystallised polysilicon transistors. A pixel-level source follower amplifier is shown to have enough gain to overcome other noise sources. A three-dimensional device structure is needed to accommodate the pixel electronics, and so the sensor is deposited on top of the electronics, separated by a thick passivation layer. Future possible detector technologies based on printing and organic semiconductors are discussed.
References
-
-
1)
-
W. Zhao ,
J.A. Rowlands
.
A large solid-state detector for radiology using amorphous selenium.
Proc. SPIE-Int. Soc. Opt. Eng.
-
2)
-
S. Wagner ,
H. Gleskova ,
J.C. Sturm ,
Z. Suo ,
R.A. Street
.
(2000)
Novel processing technology for macroelectronics, Technology and applications of amorphous silicon.
-
3)
-
K.S. Karim ,
A. Nathan
.
Readout circuit in active pixel sensors in amorphous silicon technology.
IEEE Electron Device Lett.
,
10 ,
469 -
471
-
4)
-
M. Mulato ,
J.P. Lu ,
R.A. Street
.
Simulated and measured data-line parasitic capacitance of amorphous silicon large-area image sensor arrays.
J. Appl. Phys.
-
5)
-
J.B. Boyce ,
J.P. Lu ,
J. Ho ,
R.A. Street ,
K. Van Schuylenbergh ,
Y. Wang
.
Pulsed laser crystallization of amorphous silicon for polysilicon flat-panel imagers.
J. Non-Cryst. Solids
-
6)
-
S. Tokuda ,
H. Kishihara ,
S. Adachi ,
T. Sato ,
Y. Izumi ,
O. Teranuma ,
Y. Yamane ,
S. Yamada
.
Large area deposition of a poly-crystalline CdZnTe film and its applicability to X-ray panel detectors with superior sensitivity.
Proc. SPIE-Int. Soc. Opt. Eng.
-
7)
-
Physics of medical imaging.
Proc. SPIE-Int. Soc. Opt. Eng.
-
8)
-
R.A. Street ,
M. Mulato ,
R. Lau ,
J. Ho ,
J. Graham ,
Z. Popovic ,
J. Hor
.
Image capture array with an organic light sensor.
Appl. Phys. Lett.
-
9)
-
T. Tsukada ,
R.A. Street
.
(2000)
Active-matrix liquid-crystal displays, Technology and applications of amorphous silicon.
-
10)
-
D.L. Lee ,
L.K. Cheung ,
L.S. Jeromin
.
A new digital detector for projection radiography.
Proc. SPIE-Int. Soc. Opt. Eng.
-
11)
-
R.A. Street ,
S.E. Ready ,
K. Van Schuylenbergh ,
J. Ho ,
J.B. Boyce ,
P. Nylen ,
K.S. Shah ,
L. Melekhov ,
H. Hermon
.
Comparison of PbI2 and HgI2 for direct detection active matrix X-ray image sensors.
J. Appl. Phys.
-
12)
-
W.S. Wong ,
S. Ready ,
R. Matusiak ,
S.D. White ,
J.-P. Lu ,
J. Ho ,
R.A. Street
.
Amorphous silicon thin-film transistors and arrays fabricated by jet-printing.
Appl. Phys. Lett.
-
13)
-
M. Schieber ,
A. Zuck ,
M. Braiman ,
J. Nissenbaum ,
R. Turchetta ,
W. Dulinski ,
D. Husson ,
J.L. Riester
.
IEEE Trans. Nucl. Sci..
IEEE Trans. Nucl. Sci.
-
14)
-
L.E. Antonuk ,
J. Boudry ,
W. Huang ,
D.L. McShan ,
E.J. Morton ,
J. Yorkston ,
M.J. Longo ,
R.A. Street
.
Demonstration of megavoltage and diagnostic X-ray imaging with hydrogenated amorphous silicon arrays.
Med. Phy.
,
1455 -
1466
-
15)
-
R.A. Street ,
R.A. Street
.
(2000)
Large area image sensor arrays, Technology and applications of amorphous silicon.
-
16)
-
S.O. Kasap
.
X-ray sensitivity of photoconductors: application to stabilized a-Se.
J. Phys. D, Appl. Phys.
,
2853 -
2865
-
17)
-
K.S. Shah ,
P. Bennett ,
L. Cirignano ,
Y. Dmitriyev ,
M. Klugerman ,
K. Mandal ,
L.P. Moy ,
R.A. Street
.
(1998)
Mater. Res. Soc. Symp. Proc..
-
18)
-
R.A. Street ,
S. Nelson ,
L. Antonuk ,
V. Perez Mendez
.
(1990)
Mater. Res. Soc. Symp. Proc..
-
19)
-
S. Uchikoga
.
Low-temperature polycrystalline silicon thin-film transistor technologies for system-on-glass displays.
MRS Bull.
,
881 -
885
-
20)
-
K.S. Shah ,
F. Olschner ,
L.P. Moy ,
P. Bennett ,
M. Misra ,
J. Zhang ,
M.R. Squillante ,
J.C. Lund
.
Lead iodide X-ray detection systems.
Nucl. Instrum. Methods Phys. Res. A, Accel. Spectrom. Detect. Assoc. Equip.
,
266 -
270
-
21)
-
R.A. Street ,
S.E. Ready ,
L. Melekhov ,
J. Ho ,
A. Zuck ,
B. Breen
.
Approaching the theoretical X-ray sensitivity with HgI2 direct detection image sensors.
Proc. SPIE-Int. Soc. Opt. Eng.
-
22)
-
U. Scheibel ,
N. Conrads ,
N. Jung ,
M. Weibrecht ,
H. Wieczorek ,
T. Zaengel ,
M.J. Powell ,
I.D. French ,
C. Glasse
.
Fluoroscopic X-ray imaging with amorphous silicon thin-film transistors.
Proc. SPIE-Int. Soc. Opt. Eng.
-
23)
-
Microelectronics and assembly.
Proc. SPIE-Int. Soc. Opt. Eng.
-
24)
-
J.P. Lu ,
K. van Schuylenbergh ,
R.T. Fulks ,
J. Ho ,
Y. Wang ,
R. Lau ,
P. Nylen ,
P. Mei ,
M. Mulato ,
J.B. Boyce ,
R.A. Street
.
Flat panel imagers based on excimer laser annealed, poly-Si thin film transistor technology.
Mater. Res. Soc. Symp. Proc.
-
25)
-
J.P. Lu ,
K. Van Schuylenbergh ,
J. Ho ,
Y. Wang ,
J.B. Boyce ,
R.A. Street
.
Flat panel imagers with pixel level amplifiers based on polycrystalline silicon thin-film transistor technology.
Appl. Phys. Lett.
,
4656 -
4658
-
26)
-
J.H. Siewardsen ,
D.A. Jaffray
.
Cone-beam computed tomography with a flat-panel imager: magnitude and effects of X-ray scatter.
Med. Phys.
,
220 -
231
-
27)
-
M. Schieber ,
H. Hermon ,
A. Zuck ,
A. Vilensky ,
L. Melekhov ,
R. Shatunovsky ,
R. Turketa
.
(1999)
Proc. SPIE-Int. Soc. Opt. Eng..
-
28)
-
K. Hecht
.
(1932)
Z. Phys..
-
29)
-
W. Zhao ,
I. Blevis ,
S. Germann ,
J.A. Rowlands ,
D. Waechter ,
Z. Huang
.
A flat panel detector for digital radiography using active matrix readout of amorphous silicon.
Proc. SPIE-Int. Soc. Opt. Eng.
-
30)
-
J.B. Boyce ,
P. Mei ,
R.A. Street
.
(2000)
Laser crystallization for polycrystalline silicon device applications, Technology and applications of amorphous silicon.
-
31)
-
J.T. Rahn ,
F. Lemmi ,
P. Mei ,
J.P. Lu ,
J.B. Boyce ,
R.A. Street ,
R.B. Apte ,
K.F. Ready ,
K.F. Van Schuylenbergh ,
P. Nylen ,
J. Ho ,
R.T. Fulks ,
R. Lau ,
R.L. Weisfield
.
High resolution, high fill factor a-Si:H sensor arrays for optical imaging.
Mater. Res. Soc. Symp. Proc.
http://iet.metastore.ingenta.com/content/journals/10.1049/ip-cds_20030555
Related content
content/journals/10.1049/ip-cds_20030555
pub_keyword,iet_inspecKeyword,pub_concept
6
6