Robust PID control design for an electrostatic micromechanical actuator with structured uncertainty
Robust PID control design for an electrostatic micromechanical actuator with structured uncertainty
- Author(s): M. Vagia and A. Tzes
- DOI: 10.1049/iet-cta:20070284
For access to this article, please select a purchase option:
Buy article PDF
Buy Knowledge Pack
IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.
Thank you
Your recommendation has been sent to your librarian.
- Author(s): M. Vagia 1 and A. Tzes 1
-
-
View affiliations
-
Affiliations:
1: Electrical and Computer Engineering Department, University of Patras, Rio, Greece
-
Affiliations:
1: Electrical and Computer Engineering Department, University of Patras, Rio, Greece
- Source:
Volume 2, Issue 5,
May 2008,
p.
365 – 373
DOI: 10.1049/iet-cta:20070284 , Print ISSN 1751-8644, Online ISSN 1751-8652
- « Previous Article
- Table of contents
- Next Article »
A robust proportional integral derivative (PID) controller coupled to a feedforward compensator is designed for set-point regulation manoeuvres of an electrostatic micromechanical system. The system is linearised at multiple operating points, and the feedforward compensator provides the nominal voltage. Perturbations around these points are handled from the PID controller, whose gains are tuned via the utilisation of a linear matrix inequality (LMI) approach, which guarantees robustness against the switching nature of the linearised system dynamics. The maximum microspring-stiffness parametric uncertainty that can be tolerated within this scheme, is computed through the use of the small gain theorem. Simulation studies are presented that proves the efficacy of the suggested scheme.
Inspec keywords: linear matrix inequalities; uncertain systems; three-term control; electrostatic actuators; feedforward; robust control; control system synthesis
Other keywords:
Subjects: Microactuators; Algebra; Stability in control theory; Control system analysis and synthesis methods
References
-
-
1)
- Lyshevski, E.: `Microelectromechanical systems: motion control of microactuators', Proc. IEEE Conf. Decision and Control, 1998, p. 4334–4335.
-
2)
- L. Xie , L. Guo . How much uncertainty can be dealt with by feedback?. Trans. Autom. Control , 2203 - 2217
-
3)
- J.W. Judy . Microelectromechanical systems (MEMS): fabrication, design and applications. Smart Mater. Struct. , 1115 - 1134
-
4)
- L.A. Rocha , E. Cretu , R.F. Wolffenbuttel . Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning. J. Microelectromech. Syst. , 69 - 83
-
5)
- J.G. VanAntwerp , R.D. Braatz . A tutorial on linear and bilinear matrix inequalities. J. Process Control , 363 - 385
-
6)
- S. Hong , V. Varadan , V. Varadan . Implementation of coupled mode optimal structural vibration control using approximated eigenfunctions. Smart Mater. Struct. , 63 - 71
-
7)
- M. Vagia , G. Nikolakopoulos , A. Tzes . Intelligent robust controller design for a micro-actuator. J. Intell. Robot. Syst. , 299 - 315
-
8)
- Barros, D., Fekri, S., Athans, M.: `Robust mixed synthesis performance for mass-spring system with stiffness uncertainty', Proc. 13th Mediterranean Conf. Control and Automation, June 2005, Limassol, Cyprus, p. 743–748.
-
9)
- D. Angeli , E. Mosca . Lyapunov-based switching supervisory control of nonlinear uncertain systems. IEEE Trans. Autom. Control , 500 - 505
-
10)
- H. Zhang , A. Laws , V. Bright , K. Gupta , Y. Lee . MEMS variable-capacitor phase shifters Part I: loaded-line phase shifter. Int. J. RF Microw. Comput.-Aided Eng. , 321 - 337
-
11)
- C. Chen . A simple method for on-line identification and controller tuning. AIChE , 2037 - 2039
-
12)
- A. Lee , C. Mcconaghy , G. Sommargren , P. Krulevitch , E. Campbell . Vertical–actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry. J. Microelectromech. Sys. , 960 - 971
-
13)
- Maithripala, D.H.S., Bergand, J.M., Dayawansa, W.P.: `A port controlled hamiltonian appoach to control of an electrostatic MEMS actuator', proc. ASME Int. Mechanical Enginnering Congress and Exposition, November 2003, Washington, DC, USA.
-
14)
- L. Sung , Q.K. Yongsang , G. Dae-Gab . Continuous gain scheduling control for a micro-positioning system: simple, robust and no overshoot response. Control Eng. Pract. , 133 - 138
-
15)
- K. Zhou , J. Doyle . (1998) Essential of robust control.
-
16)
- Sitti, M.: `Survey of nanomanipulation systems', IEEE-Nanotechnology Conference, November 2001, Maui, USA, p. 75–80.
-
17)
- Tzes, A., Nikolakopoulos, G., Dritsas, L., Koveos, Y.: `Multi-parametric H', Proc. 2005 IFAC World Congress, July 2005, Prague, Czech, no. 4455.
-
18)
- M.J. Madou . (1997) Fundamentals of microfabrication.
-
19)
- B. Liu . (2004) Uncertainty theory.
-
20)
- A. Ketsdever , R. Lee , T. Lilly . Performance testing of a microfabricated propulsion system for nanosatellite applications. J. Micromech. Microeng. , 2254 - 2263
-
21)
- A. Menciassi , A. Eisinberg , I. Izzo , P. Dario . From “macro” to “micro” manipulation: models and experiments. IEEE-ASME Trans. Mechatronics , 311 - 320
-
22)
- H. Ishihara , F. Arai , T. Fukuda . Micro mechatronics and micro actuators. IEEE/ASME Trans. Mechatronics , 68 - 79
-
23)
- Y. Cheng , C. Yu . Nonlinear process control using multiple models: relay feedback approach. Ind. Eng.Chem. , 420 - 431
-
24)
- H.K. Khalil . (1988) Nonlinear systems.
-
25)
- Bubnicki, Z.: `Uncertain variables as a tool for design of uncertain control systems', Proc. 44th IEEE Conf. Decision and Control and European Control Conf. ECC 2005 (CDC-ECC '05), December 2005, Seville, Spain, p. 3669–3674.
-
26)
- Zarubinskaya, M., Horssen, W.: `On the free vibrations of a rectangular plate with two opposite sides simply supported and the other sides attached to linear springs', Report 03–09 Report, 2003, DELFT University of Technology.
-
27)
- Petersen, I.R.: `A notion of controllability for uncertain linear systems with structured uncertainty', Proc. 44th IEEE Conf. Decision and Control and European Control Conf. ECC 2005 (CDC-ECC '05), December 2005, Seville, Spain, p. 2922–2927.
-
28)
- A. Agarwal , S. Sridharamurthy , D. Beebe . Programmable autonomous micromixers and micropumps. IEEE J. Microelectromech. Syst. , 1409 - 1421
-
29)
- S. Chang . Demonstration of robust micromachined jet technology and its application to realistic flow control problems. J. Mech. Sci. Technol. , 554 - 560
-
30)
- M. Hon , S. Tsai Huang . On the synthesis of robust PID controllers for plants with structured and unstructured uncertainty. Int. J. Robust Nonlinear Control , 269 - 285
-
31)
- Lyshevski, E.: `Micro-electromechanical systems: motion control of micro-actuators', Proc. IEEE Conf. Decision and Control, 1998, Tampa, FL, USA, p. 4334–4335.
-
32)
- H. Liu , B. Lu , Y. Ding , Y. Tang , D. Li . A motor-piezo actuator for nano-scale positioning based on dual servo loop and non-linearity compensation. J. Micromech. Microeng. , 295 - 299
-
33)
- Y. Shao , D.L. Dickensheets , P. Himmer . 3-D MOEMS mirror for laser beam pointing and focus control. IEEE J. Sel. Top. Quantum Electron. , 528 - 535
-
34)
- M.S.C. Lu , G. Fedder . Position control of parallel-plate micro actuators for probe-based data storage. J. Microelectromech. Syst. , 759 - 769
-
35)
- K. Narendra , J. Balakrishnan , M.K. Ciliz . Adaptation and learning using multiple models, switching and tuning. IEEE Control Syst. Mag. , 37 - 51
-
36)
- E. Chen , R.W. Dutton . Electrostatic micromechanical actuator with extended range of travel. J. Microelectromech. Syst. , 321 - 328
-
37)
- M. Ge , M.S. Chiu , Q.G. Wang . Robust PID controller design via LMI approach. J. Process Control , 3 - 13
-
1)