Your browser does not support JavaScript!
http://iet.metastore.ingenta.com
1887

Robust PID control design for an electrostatic micromechanical actuator with structured uncertainty

Robust PID control design for an electrostatic micromechanical actuator with structured uncertainty

For access to this article, please select a purchase option:

Buy article PDF
£12.50
(plus tax if applicable)
Buy Knowledge Pack
10 articles for £75.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
IET Control Theory & Applications — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

A robust proportional integral derivative (PID) controller coupled to a feedforward compensator is designed for set-point regulation manoeuvres of an electrostatic micromechanical system. The system is linearised at multiple operating points, and the feedforward compensator provides the nominal voltage. Perturbations around these points are handled from the PID controller, whose gains are tuned via the utilisation of a linear matrix inequality (LMI) approach, which guarantees robustness against the switching nature of the linearised system dynamics. The maximum microspring-stiffness parametric uncertainty that can be tolerated within this scheme, is computed through the use of the small gain theorem. Simulation studies are presented that proves the efficacy of the suggested scheme.

References

    1. 1)
      • Lyshevski, E.: `Microelectromechanical systems: motion control of microactuators', Proc. IEEE Conf. Decision and Control, 1998, p. 4334–4335.
    2. 2)
      • L. Xie , L. Guo . How much uncertainty can be dealt with by feedback?. Trans. Autom. Control , 2203 - 2217
    3. 3)
    4. 4)
    5. 5)
      • J.G. VanAntwerp , R.D. Braatz . A tutorial on linear and bilinear matrix inequalities. J. Process Control , 363 - 385
    6. 6)
    7. 7)
    8. 8)
      • Barros, D., Fekri, S., Athans, M.: `Robust mixed synthesis performance for mass-spring system with stiffness uncertainty', Proc. 13th Mediterranean Conf. Control and Automation, June 2005, Limassol, Cyprus, p. 743–748.
    9. 9)
    10. 10)
    11. 11)
      • C. Chen . A simple method for on-line identification and controller tuning. AIChE , 2037 - 2039
    12. 12)
      • A. Lee , C. Mcconaghy , G. Sommargren , P. Krulevitch , E. Campbell . Vertical–actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry. J. Microelectromech. Sys. , 960 - 971
    13. 13)
      • Maithripala, D.H.S., Bergand, J.M., Dayawansa, W.P.: `A port controlled hamiltonian appoach to control of an electrostatic MEMS actuator', proc. ASME Int. Mechanical Enginnering Congress and Exposition, November 2003, Washington, DC, USA.
    14. 14)
      • L. Sung , Q.K. Yongsang , G. Dae-Gab . Continuous gain scheduling control for a micro-positioning system: simple, robust and no overshoot response. Control Eng. Pract. , 133 - 138
    15. 15)
      • K. Zhou , J. Doyle . (1998) Essential of robust control.
    16. 16)
      • Sitti, M.: `Survey of nanomanipulation systems', IEEE-Nanotechnology Conference, November 2001, Maui, USA, p. 75–80.
    17. 17)
      • Tzes, A., Nikolakopoulos, G., Dritsas, L., Koveos, Y.: `Multi-parametric H', Proc. 2005 IFAC World Congress, July 2005, Prague, Czech, no. 4455.
    18. 18)
      • M.J. Madou . (1997) Fundamentals of microfabrication.
    19. 19)
      • B. Liu . (2004) Uncertainty theory.
    20. 20)
    21. 21)
      • A. Menciassi , A. Eisinberg , I. Izzo , P. Dario . From “macro” to “micro” manipulation: models and experiments. IEEE-ASME Trans. Mechatronics , 311 - 320
    22. 22)
      • H. Ishihara , F. Arai , T. Fukuda . Micro mechatronics and micro actuators. IEEE/ASME Trans. Mechatronics , 68 - 79
    23. 23)
      • Y. Cheng , C. Yu . Nonlinear process control using multiple models: relay feedback approach. Ind. Eng.Chem. , 420 - 431
    24. 24)
      • H.K. Khalil . (1988) Nonlinear systems.
    25. 25)
      • Bubnicki, Z.: `Uncertain variables as a tool for design of uncertain control systems', Proc. 44th IEEE Conf. Decision and Control and European Control Conf. ECC 2005 (CDC-ECC '05), December 2005, Seville, Spain, p. 3669–3674.
    26. 26)
      • Zarubinskaya, M., Horssen, W.: `On the free vibrations of a rectangular plate with two opposite sides simply supported and the other sides attached to linear springs', Report 03–09 Report, 2003, DELFT University of Technology.
    27. 27)
      • Petersen, I.R.: `A notion of controllability for uncertain linear systems with structured uncertainty', Proc. 44th IEEE Conf. Decision and Control and European Control Conf. ECC 2005 (CDC-ECC '05), December 2005, Seville, Spain, p. 2922–2927.
    28. 28)
      • A. Agarwal , S. Sridharamurthy , D. Beebe . Programmable autonomous micromixers and micropumps. IEEE J. Microelectromech. Syst. , 1409 - 1421
    29. 29)
      • S. Chang . Demonstration of robust micromachined jet technology and its application to realistic flow control problems. J. Mech. Sci. Technol. , 554 - 560
    30. 30)
      • M. Hon , S. Tsai Huang . On the synthesis of robust PID controllers for plants with structured and unstructured uncertainty. Int. J. Robust Nonlinear Control , 269 - 285
    31. 31)
      • Lyshevski, E.: `Micro-electromechanical systems: motion control of micro-actuators', Proc. IEEE Conf. Decision and Control, 1998, Tampa, FL, USA, p. 4334–4335.
    32. 32)
    33. 33)
      • Y. Shao , D.L. Dickensheets , P. Himmer . 3-D MOEMS mirror for laser beam pointing and focus control. IEEE J. Sel. Top. Quantum Electron. , 528 - 535
    34. 34)
      • M.S.C. Lu , G. Fedder . Position control of parallel-plate micro actuators for probe-based data storage. J. Microelectromech. Syst. , 759 - 769
    35. 35)
    36. 36)
      • E. Chen , R.W. Dutton . Electrostatic micromechanical actuator with extended range of travel. J. Microelectromech. Syst. , 321 - 328
    37. 37)
http://iet.metastore.ingenta.com/content/journals/10.1049/iet-cta_20070284
Loading

Related content

content/journals/10.1049/iet-cta_20070284
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address