Robust proportional–integral–derivative controller design for an electrostatic micro-actuator with measurement uncertainties

Robust proportional–integral–derivative controller design for an electrostatic micro-actuator with measurement uncertainties

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In this study the effects of unaccounted modal dynamics within the control scheme of an electrostatic micro-actuator (µ-A) are presented. The µ-A is composed of a µ-capacitor, whose one plate is clamped on the ground whereas its other plate is floating on the air. The dynamic model of the µ-A allows both lateral and angular movements of the upper plate. The feedback controller is designed based on the single-mode (lateral) linearised model. The reduced non-linear model (RnM) is linearised at multiple operating points, and the designed proportional–integral–derivative (PID)-controller, tuned via linear matrix inequalities (LMIs)-theory, stabilises all linear modes within the polytopic defined by the vertices of the linearised systems. The overall scheme comprises: (a) a feedforward controller that stabilises the µ-A around its nominal operating points and (b) a robust PID controller that handles deviations from the operating points. The resulting overall control scheme is applied to the non-linear (bimodal structure) of a µ-A, and the simulation results derived are used to investigate the efficacy of the suggested control architecture.


    1. 1)
    2. 2)
      • Sitti, M.: `Survey of nanomanipulation systems', IEEE-Nanotechnology Conf., November 2001, Maui, USA, p. 75–80.
    3. 3)
    4. 4)
    5. 5)
    6. 6)
    7. 7)
    8. 8)
    9. 9)
    10. 10)
    11. 11)
    12. 12)
    13. 13)
    14. 14)
    15. 15)
    16. 16)
      • Keng-Peng, T., Shuzhi Sam, G., Eng Hock, T.: `Output-feedback adaptive control of electrostatic microactuators', Proc. American Control Conf., July 2009, Misouri, USA, p. 4215–4220.
    17. 17)
    18. 18)
    19. 19)
    20. 20)
    21. 21)
    22. 22)
    23. 23)
      • Tzes, A., Nikolakopoulos, G., Dritsas, L., Koveos, Y.: `Multi-parametric ', Proc. 2005 IFAC World Congress, (Prague, Czech), July 2005, 4455.
    24. 24)
      • Zarubinskaya, M., Horssen, W.: `On the free vibrations of a rectangular plate with two opposite sides simply supported and the other sides attached to linear springs', Report 03-09, 2003.
    25. 25)
    26. 26)
    27. 27)
      • Zolotas, A., Tzes, A., Vagia, M.: `Robust control design for an uncertain electrostatic micro-mechanical system via loop shaping', Proc. European Control Conf. (ECC'07), July 2007, Kos, Greece, p. 389–394.
    28. 28)
    29. 29)
      • Seeger, J.I., Crary, S.B.: `Stabilization of electrostatically actuated mechanical devices', Proc. Solid State Sensors and Actuators(TRANSDUCERS), 1997, Chicago, IL, p. 1133–1136.
    30. 30)
    31. 31)
    32. 32)
    33. 33)
    34. 34)
    35. 35)

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