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Compact CMOS current conveyor for integrated NEMS resonators

Compact CMOS current conveyor for integrated NEMS resonators

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© The Institution of Engineering and Technology
Published

A fully integrated nanoelectromechanical system (NEMS) resonator together with a compact built-in complementary metal–oxide–semiconductor (CMOS) interfacing circuitry is presented. The proposed low-power second generation current conveyor circuit allows measuring the mechanical frequency response of the nanocantilever structure in the megahertz range. Detailed experimental results at different DC biasing conditions and pressure levels are presented for a real mixed electromechanical system integrated through a combination of in-house standard CMOS technology and nanodevice post-processing based on nanostencil lithography. The proposed readout circuit can be adapted to operate the nanocantilever in closed loop as a stand-alone oscillator.

Inspec keywords: nanoelectronics; readout electronics; micromechanical resonators; nanolithography; low-power electronics; current conveyors; CMOS integrated circuits

Other keywords: mechanical frequency response; stand-alone oscillator; CMOS current conveyor; complementary metal-oxide-semiconductor interfacing circuitry; nanodevice post-processing; nanocantilever structure; integrated NEMS resonators; nanostencil lithography; readout circuit; low-power second generation circuit; DC biasing conditions; nanoelectromechanical system

Subjects: Nanometre-scale semiconductor fabrication technology; CMOS integrated circuits; Fabrication of MEMS and NEMS devices; Active filters and other active networks

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