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1887

access icon free Bandwidth controlled weakly connected MEMS resonators based narrowband filter

© The Institution of Engineering and Technology
Received 12/05/2020, Accepted 13/08/2020, Revised 30/06/2020, Published 16/10/2020

Electrical tuning of bandwidth is critical for microelectromechanical system (MEMS) resonator-based narrowband filters especially at ultra-high frequency ranges and beyond. The resonance frequency of MEMS resonators is highly susceptible to fabrication process uncertainties and very small fabrication variations could result in significant shift in their resonance frequency. Although, disk resonators are the most acceptable candidates for implementing of resonators at GHz frequencies, according to their high stiffness, electrical tuning of these resonators and consequently the resulting filters is almost impossible. This study presents a novel tuning method for low velocity through anchor coupled MEMS radial contour mode disk resonators based on the coupling beam's stiffness tuning using the piezoelectric effect. As the results of this method, high bandwidth tuning ratio as 1:1.25 is achieved due to changing the tuning DC voltage from 0 to 20 V. This impressive result for a narrowband filter with 450 kHz of bandwidth is achieved due to changing the stiffness of low stiff coupling beam which is much easier to control in comparison with extremely high stiffness disk resonators. Various simulation results, as well as analytical works, verify the proposed approach.

Inspec keywords: resonator filters; micromechanical resonators; band-pass filters

Other keywords: bandpass filters; resonance frequency; electrical stiffness; tuning DC voltage; voltage 0.0 V to 20.0 V; piezoelectric effect; coupling beam stiffness; narrowband filter; microelectromechanical system resonator; ultra-high frequency ranges; fabrication process uncertainties; bandwidth controlled MEMS resonator; frequency shift; extremely high stiffness disk resonators; applied electrical voltage; weakly connected MEMS resonator; electrical control; low stiff coupling beam; high bandwidth tuning ratio; electrical tuning; bandwidth 450.0 kHz; MEMS radial contour mode disk resonators

Subjects: Micromechanical and nanomechanical devices and systems; Waveguide and microwave transmission line components; Design and modelling of MEMS and NEMS devices; Fabrication of MEMS and NEMS devices; Passive filters and other passive networks

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