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access icon free Optical MEMS accelerometer sensor relying on a micro-ring resonator and an elliptical disk

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References

    1. 1)
      • 21. Sheikhaleh, A., Abedi, K., Jafari, K.: ‘An optical MEMS accelerometer based on a two-dimensional photonic crystal add-drop filter’, J. Lightwave Technol., 2017, 35, (14), pp. 30293034.
    2. 2)
      • 12. Crosnier, G., Sanchez, D., Bouchoule, S., et al: ‘Hybrid indium phosphide-on-silicon nanolaser diode’, Nat. Photonics, 2017, 11, (5), pp. 297300.
    3. 3)
      • 4. Bogaerts, W., De Heyn, P., Van Vaerenbergh, T., et al: ‘Silicon microring resonators’, Laser Photonics Rev., 2012, 6, (1), pp. 4773.
    4. 4)
      • 9. Wu, J.-W., Sarma, A.K.: ‘Ultrafast all-optical XOR logic gate based on a symmetrical Mach-Zehnder interferometer employing SOI waveguides’, Opt. Commun., 2010, 283, (14), pp. 29142917.
    5. 5)
      • 10. Sah, P., Das, B.K.: ‘Integrated optical rectangular-edge filter devices in SOI’, J. Lightwave Technol., 2017, 35, (2), pp. 128135.
    6. 6)
      • 14. Errando-Herranz, C., Niklaus, F., Stemme, G., et al: ‘Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter’, Opt. Lett., 2015, 40, (15), pp. 35563559.
    7. 7)
      • 30. Jafari, K., Juillard, J., Roger, M.: ‘Convergence analysis of an online approach to parameter estimation problems based on binary observations’, Automatica, 2012, 48, (11), pp. 28372842.
    8. 8)
      • 1. Stojanović, V., Ram, R.J., Popović, M., et al: ‘Monolithic silicon-photonic platforms in state-of-the-art CMOS SOI processes [invited]’, Opt. Express, 2018, 26, (10), pp. 1310613121.
    9. 9)
      • 5. Khalil, K., Sabry, Y.M., Hassan, K., et al: ‘In-line optical MEMS phase modulator and application in ring laser frequency modulation’, IEEE J. Quantum Electron., 2016, 52, (8), pp. 18.
    10. 10)
      • 27. Luo, G., Lee, C., Cheng, C., et al: ‘CMOS-MEMS Fabry-Perot optical interference device with tunable resonant cavity’. 2013 Transducers & Eurosensors XXVII: The 17th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, 2013, pp. 26002603.
    11. 11)
      • 28. Hao, L., Gang, Z., Carley, L.R., et al: ‘A post-CMOS micromachined lateral accelerometer’, J. Microelectromech. Syst., 2002, 11, (3), pp. 188195.
    12. 12)
      • 20. Trigona, C., Ando, B., Baglio, S.: ‘Design, fabrication, and characterization of BESOI-accelerometer exploiting photonic bandgap materials’, IEEE Trans. Instrum. Meas., 2014, 63, (3), pp. 702710.
    13. 13)
      • 25. Sheikhaleh, A., Abedi, K., Jafari, K.: ‘A proposal for an optical MEMS accelerometer relied on wavelength modulation with one dimensional photonic crystal’, J. Lightwave Technol., 2016, 34, (22), pp. 52445249.
    14. 14)
      • 22. Krause, A.G., Winger, M., Blasius, T.D., et al: ‘A high-resolution microchip optomechanical accelerometer’, Nat. Photonics, 2012, 6, p.768.
    15. 15)
      • 6. Azzam, S.I., Obayya, S.S.A.: ‘Ultra-compact resonant tunneling-based TE-pass and TM-pass polarizers for SOI platform’, Opt. Lett., 2015, 40, (6), pp. 10611064.
    16. 16)
      • 15. Lipson, A., Yeatman, E.M.: ‘A 1-D photonic band gap tunable optical filter in (110) silicon’, J. Microelectromech. Syst., 2007, 16, (3), pp. 521527.
    17. 17)
      • 29. Jafari, K.: ‘A parameter estimation approach based on binary measurements using maximum likelihood analysis - application to MEMS’, Int. J. Control, Autom. Syst., 2017, 15, (2), pp. 716721.
    18. 18)
      • 17. Dong, X., Yang, S., Zhu, J., et al: ‘Method of measuring the mismatch of parasitic capacitance in MEMS accelerometer based on regulating electrostatic stiffness’, Micromachines. (Basel), 2018, 9, (3), p. 128.
    19. 19)
      • 18. Davies, E., George, D.S., Gower, M.C., et al: ‘MEMS fabry–pérot optical accelerometer employing mechanical amplification via a V-beam structure’, Sens. Actuators, A, 2014, 215, pp. 2229.
    20. 20)
      • 7. Xiong, Y., Xu, D., Schmid, J.H., et al: ‘High extinction ratio and broadband silicon Te-pass polarizer using subwavelength grating index engineering’, IEEE Photonics J., 2015, 7, (5), pp. 17.
    21. 21)
      • 11. Omran, H., Sabry, Y.M., Sadek, M., et al: ‘Deeply-etched optical MEMS tunable filter for swept laser source applications’, IEEE Photonics Technol. Lett., 2014, 26, (1), pp. 3739.
    22. 22)
      • 24. Sheikhaleh, A., Abedi, K., Jafari, K., et al: ‘Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal’, Appl. Opt., 2016, 55, (32), pp. 89938999.
    23. 23)
      • 8. Majumder, A., Shen, B., Polson, R., et al: ‘Ultra-compact polarization rotation in integrated silicon photonics using digital metamaterials’, Opt. Express, 2017, 25, (17), pp. 1972119731.
    24. 24)
      • 26. Yang, Z., Peroulis, D.: ‘A 20–40 Ghz tunable MEMS bandpass filter with enhanced stability by gold-vanadium micro-corrugated diaphragms’. 2016 IEEE MTT-S Int. Microwave Symp. (IMS), San Francisco, CA, 2016, pp. 13.
    25. 25)
      • 3. Bogaerts, W., Baets, R., Dumon, P., et al: ‘Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology’, J. Lightwave Technol., 2005, 23, (1), p. 401.
    26. 26)
      • 19. Lu, Q., Bai, J., Wang, K., et al: ‘Design, optimization, and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer’, J. Microelectromech. Syst., 2017, 26, (4), pp. 859869.
    27. 27)
      • 23. Ahmadian, M., Jafari, K., Sharifi, M.J.: ‘Novel graphene-based optical MEMS accelerometer dependent on intensity modulation’, ETRI J., 2018, 40, (6), pp. 794801.
    28. 28)
      • 13. Zhao, X., Tsai, J., Cai, H., et al: ‘A nano-opto-mechanical pressure sensor via ring resonator’, Opt. Express, 2012, 20, (8), pp. 85358542.
    29. 29)
      • 16. Tan, S.S., Liu, C.Y., Yeh, L.K., et al: ‘A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stability’, J. Micromech. Microeng., 2011, 21, (3), p. 035005.
    30. 30)
      • 2. Orcutt, J.S., Moss, B., Sun, C., et al: ‘Open foundry platform for high-performance electronic-photonic integration’, Opt. Express, 2012, 20, (11), pp. 1222212232.
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